JPH0512762Y2 - - Google Patents
Info
- Publication number
- JPH0512762Y2 JPH0512762Y2 JP1984148207U JP14820784U JPH0512762Y2 JP H0512762 Y2 JPH0512762 Y2 JP H0512762Y2 JP 1984148207 U JP1984148207 U JP 1984148207U JP 14820784 U JP14820784 U JP 14820784U JP H0512762 Y2 JPH0512762 Y2 JP H0512762Y2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- spectroscopic
- electron beam
- sample surface
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984148207U JPH0512762Y2 (enExample) | 1984-09-28 | 1984-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984148207U JPH0512762Y2 (enExample) | 1984-09-28 | 1984-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6161456U JPS6161456U (enExample) | 1986-04-25 |
| JPH0512762Y2 true JPH0512762Y2 (enExample) | 1993-04-02 |
Family
ID=30706429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984148207U Expired - Lifetime JPH0512762Y2 (enExample) | 1984-09-28 | 1984-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512762Y2 (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5590847A (en) * | 1978-12-29 | 1980-07-09 | Shimadzu Corp | Xxray spectroscope |
-
1984
- 1984-09-28 JP JP1984148207U patent/JPH0512762Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161456U (enExample) | 1986-04-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5995234A (en) | Method and apparatus for the alignment of a substrate | |
| TWI254141B (en) | Pattern forming member applied to sectioning image observation apparatus and sectioning image observation apparatus using them | |
| CN103858208B (zh) | 曝光装置用的对准装置以及对准标记 | |
| JP3485660B2 (ja) | マイクロリソグラフィ用投影露光装置の照明手段 | |
| WO1986007660A1 (fr) | Appareil et procede de reglage du cadrage d'elements de prise d'image a semi-conducteur | |
| EP3524967B1 (en) | Image inspection device and lighting device | |
| JPH0666241B2 (ja) | 位置検出方法 | |
| KR20000005876A (ko) | 영상표시장치 | |
| DE69118283T2 (de) | Bildaufnahmeanordnung | |
| JPH0512762Y2 (enExample) | ||
| JP2007071769A (ja) | モアレ縞を用いたずれ、パタ−ンの回転、ゆがみ、位置ずれ検出方法 | |
| JP3448812B2 (ja) | マーク検知装置、及びそれを有する露光装置、及びその露光装置を用いた半導体素子又は液晶表示素子の製造方法 | |
| JP3448778B2 (ja) | マーク検知装置、及びその検知装置を備えた露光装置、及びその露光装置により製造されたデバイス、並びにマーク検知方法、及びその検知方法を含む露光方法、及びその露光方法を含むデバイス製造方法 | |
| JPS6356917A (ja) | 投影露光装置 | |
| KR20240151522A (ko) | 하이브리드 오버레이 마크, 이를 이용한 오버레이 측정 방법, 측정 장치 및 반도체 소자의 제조방법 | |
| JP3189367B2 (ja) | アライメント装置および方法 | |
| JPH08201938A (ja) | 液晶調整機構 | |
| JPS62286014A (ja) | 交差線状像要素を形成する光学装置 | |
| JPH08152615A (ja) | 液晶表示装置 | |
| US6400402B1 (en) | Highly precise image pickup apparatus with apertures offset from a lenter | |
| JP2859629B2 (ja) | 等倍結像素子 | |
| JP2508499B2 (ja) | 光学的ロ―パスフィルタ | |
| JPH02100018A (ja) | 光学的ローパスフィルター | |
| JPH02262226A (ja) | 電子顕微鏡 | |
| JPH11252467A (ja) | 撮像装置 |