JPH0512669Y2 - - Google Patents

Info

Publication number
JPH0512669Y2
JPH0512669Y2 JP1985079708U JP7970885U JPH0512669Y2 JP H0512669 Y2 JPH0512669 Y2 JP H0512669Y2 JP 1985079708 U JP1985079708 U JP 1985079708U JP 7970885 U JP7970885 U JP 7970885U JP H0512669 Y2 JPH0512669 Y2 JP H0512669Y2
Authority
JP
Japan
Prior art keywords
clean area
area
low
clean
hanging wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985079708U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61197427U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985079708U priority Critical patent/JPH0512669Y2/ja
Publication of JPS61197427U publication Critical patent/JPS61197427U/ja
Application granted granted Critical
Publication of JPH0512669Y2 publication Critical patent/JPH0512669Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1985079708U 1985-05-28 1985-05-28 Expired - Lifetime JPH0512669Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (enEXAMPLES) 1985-05-28 1985-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985079708U JPH0512669Y2 (enEXAMPLES) 1985-05-28 1985-05-28

Publications (2)

Publication Number Publication Date
JPS61197427U JPS61197427U (enEXAMPLES) 1986-12-09
JPH0512669Y2 true JPH0512669Y2 (enEXAMPLES) 1993-04-02

Family

ID=30624869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985079708U Expired - Lifetime JPH0512669Y2 (enEXAMPLES) 1985-05-28 1985-05-28

Country Status (1)

Country Link
JP (1) JPH0512669Y2 (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002195636A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル
JP2002195620A (ja) * 2000-12-27 2002-07-10 Sankyo Seiki Mfg Co Ltd クリーン作業モジュール及びクリーントンネル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142792Y2 (enEXAMPLES) * 1980-12-08 1986-12-04

Also Published As

Publication number Publication date
JPS61197427U (enEXAMPLES) 1986-12-09

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