JPH0512669Y2 - - Google Patents
Info
- Publication number
- JPH0512669Y2 JPH0512669Y2 JP1985079708U JP7970885U JPH0512669Y2 JP H0512669 Y2 JPH0512669 Y2 JP H0512669Y2 JP 1985079708 U JP1985079708 U JP 1985079708U JP 7970885 U JP7970885 U JP 7970885U JP H0512669 Y2 JPH0512669 Y2 JP H0512669Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean area
- area
- low
- clean
- hanging wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003749 cleanliness Effects 0.000 description 48
- 239000000428 dust Substances 0.000 description 21
- 230000000694 effects Effects 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079708U JPH0512669Y2 (en18) | 1985-05-28 | 1985-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985079708U JPH0512669Y2 (en18) | 1985-05-28 | 1985-05-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61197427U JPS61197427U (en18) | 1986-12-09 |
| JPH0512669Y2 true JPH0512669Y2 (en18) | 1993-04-02 |
Family
ID=30624869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985079708U Expired - Lifetime JPH0512669Y2 (en18) | 1985-05-28 | 1985-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512669Y2 (en18) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002195636A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
| JP2002195620A (ja) * | 2000-12-27 | 2002-07-10 | Sankyo Seiki Mfg Co Ltd | クリーン作業モジュール及びクリーントンネル |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6142792Y2 (en18) * | 1980-12-08 | 1986-12-04 |
-
1985
- 1985-05-28 JP JP1985079708U patent/JPH0512669Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61197427U (en18) | 1986-12-09 |
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