JPH0511642Y2 - - Google Patents
Info
- Publication number
- JPH0511642Y2 JPH0511642Y2 JP15082086U JP15082086U JPH0511642Y2 JP H0511642 Y2 JPH0511642 Y2 JP H0511642Y2 JP 15082086 U JP15082086 U JP 15082086U JP 15082086 U JP15082086 U JP 15082086U JP H0511642 Y2 JPH0511642 Y2 JP H0511642Y2
- Authority
- JP
- Japan
- Prior art keywords
- height
- analysis
- sample
- characteristic
- data
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004458 analytical method Methods 0.000 claims description 49
- 238000005259 measurement Methods 0.000 claims description 31
- 238000005211 surface analysis Methods 0.000 claims description 10
- 238000012937 correction Methods 0.000 claims description 9
- 239000002245 particle Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 description 51
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000004453 electron probe microanalysis Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082086U JPH0511642Y2 (de) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082086U JPH0511642Y2 (de) | 1986-09-30 | 1986-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6356556U JPS6356556U (de) | 1988-04-15 |
| JPH0511642Y2 true JPH0511642Y2 (de) | 1993-03-23 |
Family
ID=31067307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15082086U Expired - Lifetime JPH0511642Y2 (de) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0511642Y2 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5606791B2 (ja) * | 2010-05-20 | 2014-10-15 | 株式会社日立製作所 | 荷電粒子線装置 |
| WO2012093474A1 (ja) * | 2011-01-05 | 2012-07-12 | Isobe Shinichiro | 多光源顕微鏡 |
-
1986
- 1986-09-30 JP JP15082086U patent/JPH0511642Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6356556U (de) | 1988-04-15 |
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