JPH05113B2 - - Google Patents

Info

Publication number
JPH05113B2
JPH05113B2 JP24553088A JP24553088A JPH05113B2 JP H05113 B2 JPH05113 B2 JP H05113B2 JP 24553088 A JP24553088 A JP 24553088A JP 24553088 A JP24553088 A JP 24553088A JP H05113 B2 JPH05113 B2 JP H05113B2
Authority
JP
Japan
Prior art keywords
rail
roller
cleaning
component
cleaning paper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP24553088A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0295488A (ja
Inventor
Haruki Kobayashi
Kazuhiro Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Ando Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ando Electric Co Ltd filed Critical Ando Electric Co Ltd
Priority to JP24553088A priority Critical patent/JPH0295488A/ja
Publication of JPH0295488A publication Critical patent/JPH0295488A/ja
Publication of JPH05113B2 publication Critical patent/JPH05113B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Electron Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP24553088A 1988-09-29 1988-09-29 段差のある部品の表面クリーニング機構 Granted JPH0295488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24553088A JPH0295488A (ja) 1988-09-29 1988-09-29 段差のある部品の表面クリーニング機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24553088A JPH0295488A (ja) 1988-09-29 1988-09-29 段差のある部品の表面クリーニング機構

Publications (2)

Publication Number Publication Date
JPH0295488A JPH0295488A (ja) 1990-04-06
JPH05113B2 true JPH05113B2 (en:Method) 1993-01-05

Family

ID=17135062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24553088A Granted JPH0295488A (ja) 1988-09-29 1988-09-29 段差のある部品の表面クリーニング機構

Country Status (1)

Country Link
JP (1) JPH0295488A (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0632793B2 (ja) * 1990-04-25 1994-05-02 北川精機株式会社 板状物のクリーニング装置
CN108246750B (zh) * 2017-12-13 2020-10-09 北京华航无线电测量研究所 一种大面阵ccd光窗清洁方法

Also Published As

Publication number Publication date
JPH0295488A (ja) 1990-04-06

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