JPH051068Y2 - - Google Patents
Info
- Publication number
- JPH051068Y2 JPH051068Y2 JP10062587U JP10062587U JPH051068Y2 JP H051068 Y2 JPH051068 Y2 JP H051068Y2 JP 10062587 U JP10062587 U JP 10062587U JP 10062587 U JP10062587 U JP 10062587U JP H051068 Y2 JPH051068 Y2 JP H051068Y2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- spray nozzle
- wafer
- nozzle
- spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007921 spray Substances 0.000 claims description 33
- 235000012431 wafers Nutrition 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 239000003595 mist Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 28
- 229910052757 nitrogen Inorganic materials 0.000 description 14
- 238000005507 spraying Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Spray Control Apparatus (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10062587U JPH051068Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10062587U JPH051068Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646036U JPS646036U (enrdf_load_stackoverflow) | 1989-01-13 |
| JPH051068Y2 true JPH051068Y2 (enrdf_load_stackoverflow) | 1993-01-12 |
Family
ID=31328869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10062587U Expired - Lifetime JPH051068Y2 (enrdf_load_stackoverflow) | 1987-06-30 | 1987-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051068Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-06-30 JP JP10062587U patent/JPH051068Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS646036U (enrdf_load_stackoverflow) | 1989-01-13 |
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