JPH0510367B2 - - Google Patents
Info
- Publication number
- JPH0510367B2 JPH0510367B2 JP15876184A JP15876184A JPH0510367B2 JP H0510367 B2 JPH0510367 B2 JP H0510367B2 JP 15876184 A JP15876184 A JP 15876184A JP 15876184 A JP15876184 A JP 15876184A JP H0510367 B2 JPH0510367 B2 JP H0510367B2
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive
- weight
- polyamide
- film
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Polyamides (AREA)
- Polymerisation Methods In General (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15876184A JPS6137808A (ja) | 1984-07-31 | 1984-07-31 | 感光性ポリアミド膜用の樹脂液組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15876184A JPS6137808A (ja) | 1984-07-31 | 1984-07-31 | 感光性ポリアミド膜用の樹脂液組成物 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6137808A JPS6137808A (ja) | 1986-02-22 |
| JPH0510367B2 true JPH0510367B2 (cs) | 1993-02-09 |
Family
ID=15678759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15876184A Granted JPS6137808A (ja) | 1984-07-31 | 1984-07-31 | 感光性ポリアミド膜用の樹脂液組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6137808A (cs) |
-
1984
- 1984-07-31 JP JP15876184A patent/JPS6137808A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6137808A (ja) | 1986-02-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6396162A (ja) | ポリアミド | |
| TW201351047A (zh) | 負型感光性樹脂組合物、硬化浮凸圖案之製造方法及半導體裝置 | |
| JPH0526186B2 (cs) | ||
| JPS59108031A (ja) | 感光性ポリイミド | |
| JPH0225378B2 (cs) | ||
| JP3827238B2 (ja) | 感光性ポリイミド前駆体組成物 | |
| JP6427383B2 (ja) | 樹脂組成物、硬化レリーフパターンの製造方法、及び半導体装置 | |
| JP4592999B2 (ja) | 新規な末端修飾したポリアミック酸及びそれを含む感光性樹脂組成物 | |
| TWI864226B (zh) | 圖案形成方法、積層體的製造方法及電子元件的製造方法 | |
| JPS59232122A (ja) | 有機溶媒可溶性の感光性ポリイミド | |
| JPS606729A (ja) | 有機溶媒に可溶性の感光性ポリイミド | |
| JPH0526187B2 (cs) | ||
| JP2003238683A (ja) | ポジ型感光性樹脂組成物 | |
| JPH0510367B2 (cs) | ||
| CN116574254A (zh) | 双马来酰亚胺化合物、含有该化合物的组合物、聚苯并噁唑、及半导体元件 | |
| JPH0259170B2 (cs) | ||
| JPH0339286B2 (cs) | ||
| JP2022073737A (ja) | 感光性樹脂組成物、および硬化膜の製造方法 | |
| JP2676662B2 (ja) | 感光性ポリアミド組成物及び光硬化膜の形成法 | |
| JPS60178446A (ja) | 有機溶媒可溶性の感光材料 | |
| JPH0315929B2 (cs) | ||
| KR100288846B1 (ko) | 감광성폴리이미드전구체조성물 | |
| CN112142974B (zh) | 改进光敏聚酰亚胺的伸长率的扩链剂及其配制物 | |
| JP3269072B2 (ja) | 感光性樹脂及び感光性樹脂組成物 | |
| JP2000019727A (ja) | 感光性ポリイミド前駆体組成物及びそれを用いたパターンの製造法 |