JPH0510353Y2 - - Google Patents
Info
- Publication number
- JPH0510353Y2 JPH0510353Y2 JP1294387U JP1294387U JPH0510353Y2 JP H0510353 Y2 JPH0510353 Y2 JP H0510353Y2 JP 1294387 U JP1294387 U JP 1294387U JP 1294387 U JP1294387 U JP 1294387U JP H0510353 Y2 JPH0510353 Y2 JP H0510353Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- support ring
- ring
- protrusions
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 72
- 238000003780 insertion Methods 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims description 3
- 238000002791 soaking Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294387U JPH0510353Y2 (ko) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1294387U JPH0510353Y2 (ko) | 1987-01-30 | 1987-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121432U JPS63121432U (ko) | 1988-08-05 |
| JPH0510353Y2 true JPH0510353Y2 (ko) | 1993-03-15 |
Family
ID=30801544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1294387U Expired - Lifetime JPH0510353Y2 (ko) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510353Y2 (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2733517B2 (ja) * | 1988-10-03 | 1998-03-30 | 東京エレクトロン株式会社 | 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具 |
| JP4914270B2 (ja) * | 2007-03-30 | 2012-04-11 | 光洋サーモシステム株式会社 | 熱処理容器 |
| JP5304068B2 (ja) * | 2008-07-15 | 2013-10-02 | 信越半導体株式会社 | 縦型熱処理装置 |
-
1987
- 1987-01-30 JP JP1294387U patent/JPH0510353Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63121432U (ko) | 1988-08-05 |
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