JPH0510350Y2 - - Google Patents
Info
- Publication number
- JPH0510350Y2 JPH0510350Y2 JP1797687U JP1797687U JPH0510350Y2 JP H0510350 Y2 JPH0510350 Y2 JP H0510350Y2 JP 1797687 U JP1797687 U JP 1797687U JP 1797687 U JP1797687 U JP 1797687U JP H0510350 Y2 JPH0510350 Y2 JP H0510350Y2
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- drawing board
- original drawing
- original
- board holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000032258 transport Effects 0.000 claims description 20
- 238000005192 partition Methods 0.000 claims description 15
- 239000000428 dust Substances 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1797687U JPH0510350Y2 (enrdf_load_stackoverflow) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1797687U JPH0510350Y2 (enrdf_load_stackoverflow) | 1987-02-10 | 1987-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63127123U JPS63127123U (enrdf_load_stackoverflow) | 1988-08-19 |
| JPH0510350Y2 true JPH0510350Y2 (enrdf_load_stackoverflow) | 1993-03-15 |
Family
ID=30811229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1797687U Expired - Lifetime JPH0510350Y2 (enrdf_load_stackoverflow) | 1987-02-10 | 1987-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510350Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-10 JP JP1797687U patent/JPH0510350Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63127123U (enrdf_load_stackoverflow) | 1988-08-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4924258A (en) | Mask holder and a mask conveying and holding mechanism using the same | |
| TWI739894B (zh) | 物體交換系統、曝光裝置、平面顯示器之製造方法、元件之製造方法、物體移動方法、及曝光方法 | |
| KR100993220B1 (ko) | 노광장비용 카세트의 위치 정렬장치 | |
| JP4978471B2 (ja) | 物体の搬出入方法及び搬出入装置、露光方法及び露光装置、並びにデバイス製造方法 | |
| JPH1010705A (ja) | レチクルケース | |
| JPH05182891A (ja) | 基板の位置決め装置 | |
| JPH0510350Y2 (enrdf_load_stackoverflow) | ||
| JPH05198663A (ja) | 試料搬送ホルダ | |
| KR101436195B1 (ko) | 노광 장치 및 노광 방법 | |
| JPH0377679B2 (enrdf_load_stackoverflow) | ||
| JP3862131B2 (ja) | 近接露光装置 | |
| JP4768309B2 (ja) | 表示用基板を受けるワークテーブルの交換装置及び表示用基板の検査装置 | |
| JP2853338B2 (ja) | 実装機への部品供給装置 | |
| JPS6156868B2 (enrdf_load_stackoverflow) | ||
| JP3708984B2 (ja) | 被処理材の固定装置 | |
| JPH10239855A (ja) | 基板搬送装置 | |
| JP2862632B2 (ja) | 基板の縦型搬送装置 | |
| JPH07153816A (ja) | 基板移載方法および装置 | |
| JP2945837B2 (ja) | 板状体の搬送機構および搬送方法 | |
| JPH0144215Y2 (enrdf_load_stackoverflow) | ||
| JPH079925B2 (ja) | 基板の位置決め装置 | |
| JPH01211917A (ja) | ウエハの保持装置 | |
| JPH06132383A (ja) | 基板用ホルダーの位置決め機構 | |
| JPS63140546A (ja) | 露光装置 | |
| JP2980361B2 (ja) | マスク保持装置 |