JPH0510350Y2 - - Google Patents
Info
- Publication number
- JPH0510350Y2 JPH0510350Y2 JP1797687U JP1797687U JPH0510350Y2 JP H0510350 Y2 JPH0510350 Y2 JP H0510350Y2 JP 1797687 U JP1797687 U JP 1797687U JP 1797687 U JP1797687 U JP 1797687U JP H0510350 Y2 JPH0510350 Y2 JP H0510350Y2
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- drawing board
- original drawing
- original
- board holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000032258 transport Effects 0.000 claims description 20
- 238000005192 partition Methods 0.000 claims description 15
- 239000000428 dust Substances 0.000 description 6
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1797687U JPH0510350Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1797687U JPH0510350Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-10 | 1987-02-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63127123U JPS63127123U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-19 |
JPH0510350Y2 true JPH0510350Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-03-15 |
Family
ID=30811229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1797687U Expired - Lifetime JPH0510350Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-02-10 | 1987-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0510350Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-02-10 JP JP1797687U patent/JPH0510350Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS63127123U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-08-19 |