JPH0510316B2 - - Google Patents
Info
- Publication number
- JPH0510316B2 JPH0510316B2 JP61179624A JP17962486A JPH0510316B2 JP H0510316 B2 JPH0510316 B2 JP H0510316B2 JP 61179624 A JP61179624 A JP 61179624A JP 17962486 A JP17962486 A JP 17962486A JP H0510316 B2 JPH0510316 B2 JP H0510316B2
- Authority
- JP
- Japan
- Prior art keywords
- growth
- crystal
- temperature
- heater
- growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61179624A JPS6335492A (ja) | 1986-07-29 | 1986-07-29 | 化合物半導体結晶の成長方法 |
| US07/078,564 US4869776A (en) | 1986-07-29 | 1987-07-28 | Method for the growth of a compound semiconductor crystal |
| GB8717968A GB2194554B (en) | 1986-07-29 | 1987-07-29 | A method for the growth of a compound semiconductor crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61179624A JPS6335492A (ja) | 1986-07-29 | 1986-07-29 | 化合物半導体結晶の成長方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6335492A JPS6335492A (ja) | 1988-02-16 |
| JPH0510316B2 true JPH0510316B2 (enExample) | 1993-02-09 |
Family
ID=16069019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61179624A Granted JPS6335492A (ja) | 1986-07-29 | 1986-07-29 | 化合物半導体結晶の成長方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6335492A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4670002B2 (ja) * | 2004-07-20 | 2011-04-13 | 学校法人早稲田大学 | 窒化物単結晶の製造方法 |
| JP5272390B2 (ja) | 2007-11-29 | 2013-08-28 | 豊田合成株式会社 | Iii族窒化物半導体の製造方法、iii族窒化物半導体発光素子の製造方法、及びiii族窒化物半導体発光素子、並びにランプ |
-
1986
- 1986-07-29 JP JP61179624A patent/JPS6335492A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6335492A (ja) | 1988-02-16 |
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