JPH05101969A - Manufacture of monolithic ceramic capacitor - Google Patents

Manufacture of monolithic ceramic capacitor

Info

Publication number
JPH05101969A
JPH05101969A JP26004091A JP26004091A JPH05101969A JP H05101969 A JPH05101969 A JP H05101969A JP 26004091 A JP26004091 A JP 26004091A JP 26004091 A JP26004091 A JP 26004091A JP H05101969 A JPH05101969 A JP H05101969A
Authority
JP
Japan
Prior art keywords
electrodes
green sheet
dielectric layer
parts
screen printing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26004091A
Other languages
Japanese (ja)
Inventor
Kenji Maruyama
賢治 丸山
Hikoharu Okuyama
彦治 奥山
Yasutaka Horibe
泰孝 堀部
Hideyuki Okinaka
秀行 沖中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP26004091A priority Critical patent/JPH05101969A/en
Publication of JPH05101969A publication Critical patent/JPH05101969A/en
Pending legal-status Critical Current

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  • Ceramic Capacitors (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

PURPOSE:To suppress occurrence of a structural defect such as delamination in a method for manufacturing a monolithic ceramic capacitor to be used for various electronic apparatuses. CONSTITUTION:A screen printing is conducted by employing a block having regions which have two types of different meshes on the same surface and so disposing fine mesh parts 2 as to coincide with forming parts of inner electrodes 5 and rough mesh parts 3 as to coincide with nonforming parts of the electrodes 5 in a step of forming a dielectric layer by a screen printing method of the type of covering a base film 4 as a support with the electrodes 5. Thus, since the electrodes 5 are coated with thin dielectric layer and the other parts are covered with thick dielectric layer, the thicknesses of the electrodes 5 are cancelled to obtain a green sheet having a flat surface. A satisfactory lamination is conducted by a heat transferring method using the sheet to obtain a uniform laminated layer forming body, and hence occurrence of a structural defect such as delamination in an element after baking can be suppressed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、ビデオカメラ等各種電
子機器に使用される積層セラミックコンデンサの製造方
法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a monolithic ceramic capacitor used in various electronic devices such as video cameras.

【0002】[0002]

【従来の技術】近年、電子機器の小型化,高周波化に伴
い積層セラミックコンデンサの需要がますます高まって
いる。
2. Description of the Related Art In recent years, the demand for monolithic ceramic capacitors has increased more and more with the miniaturization and higher frequency of electronic devices.

【0003】以下、一般的な積層セラミックコンデンサ
の製造方法を説明する。まず、チタン酸バリウム等の誘
電体粉末と有機バインダ,可塑剤および有機溶剤からな
るスラリーを用いてドクターブレード法によりグリーン
シートを作製する。次に、このグリーンシートの上にパ
ラジウム,白金等の貴金属を主成分とした導電性ペース
トを用いてスクリーン印刷法等により内部電極を形成す
る。
A method of manufacturing a general monolithic ceramic capacitor will be described below. First, a green sheet is produced by a doctor blade method using a slurry composed of a dielectric powder such as barium titanate and an organic binder, a plasticizer and an organic solvent. Next, an internal electrode is formed on the green sheet by a screen printing method or the like using a conductive paste containing a noble metal such as palladium or platinum as a main component.

【0004】次に、内部電極を形成したグリーンシート
を内部電極が誘電体層を挟んで交互に対向するように配
置して順次積層し、所望の積層数まで積層を繰り返す。
こうして得られた積層成形体を所望の大きさのチップに
切断し、有機バインダを脱脂した後、1200℃〜14
00℃で焼成する。次に、焼成して得た素子の両端部に
現われる上記内部電極にこれらの内部電極が電気的に接
続されるように銀,銀−パラジウム等を塗布し、焼き付
けることによって外部電極を形成し、積層セラミックコ
ンデンサを製造している。
Next, the green sheets on which the internal electrodes are formed are arranged so that the internal electrodes are alternately opposed to each other with the dielectric layer interposed therebetween, and are sequentially laminated, and the lamination is repeated up to a desired number of laminated layers.
The laminated molded body thus obtained is cut into chips of a desired size, the organic binder is degreased, and then 1200 ° C. to 14 ° C.
Bake at 00 ° C. Next, silver, silver-palladium or the like is applied to the internal electrodes appearing at both ends of the element obtained by firing so that these internal electrodes are electrically connected, and external electrodes are formed by baking, Manufactures monolithic ceramic capacitors.

【0005】一方、コンデンサの大容量化を達成するに
は誘電体層の薄層化を図る必要があるが、ドクターブレ
ード法ではグリーンシートの誘電体層の厚みを薄くする
には限度がある。そこで、スラリー中の有機バインダ量
を増やし、スラリー粘度をさらに小さくしてリバースロ
ール法等により10μm以下の薄型シートを作製し、加
熱プレスでベースフィルムの上から熱と圧力を加えて予
め用意された誘電体層の上にグリーンシートを熱転写
し、上記ベースフィルムを剥離した後、上記グリーンシ
ートのフィルム面に内部電極を印刷し、乾燥後、別の上
記グリーンシートをベースフィルム面が上になるように
載せ、上記と同様にして熱転写を行い、以後所望の積層
数まで順次積層を繰り返す製造方法(以下、熱転写工法
と記す)も最近提案されている。
On the other hand, it is necessary to reduce the thickness of the dielectric layer in order to increase the capacity of the capacitor, but the doctor blade method has a limit in reducing the thickness of the dielectric layer of the green sheet. Therefore, by increasing the amount of organic binder in the slurry and further decreasing the viscosity of the slurry, a thin sheet having a thickness of 10 μm or less is manufactured by a reverse roll method or the like, and heat and pressure are applied from above the base film by a heating press to prepare in advance. After thermally transferring the green sheet on the dielectric layer and peeling off the base film, print the internal electrodes on the film surface of the green sheet, and after drying, put another green sheet on the base film side. Recently, a manufacturing method (hereinafter referred to as a thermal transfer method) in which thermal transfer is performed in the same manner as described above and the layers are sequentially stacked up to a desired number of layers has been recently proposed.

【0006】[0006]

【発明が解決しようとする課題】しかしながら、上記の
ような熱転写工法の場合、内部電極の厚みのため、積層
が高次に進むに従って積層成形体において内部電極を含
む部分とその周囲の部分で顕著な凹凸を生じることとな
る。この時、内部電極を含まない周囲の部分は凹部とな
って積層時の圧力が十分に加わらず、積層成形体や焼成
後の素子においてこの部分でクラックやデラミネーショ
ン等の構造欠陥が発生し、積層セラミックコンデンサの
製造方法において大きな課題となっていた。
However, in the case of the thermal transfer method as described above, due to the thickness of the internal electrodes, as the lamination progresses to a higher order, the laminated molded body is remarkably formed in the portion including the internal electrodes and the peripheral portion thereof. Unevenness will occur. At this time, the peripheral portion not including the internal electrode becomes a recess and the pressure during lamination is not sufficiently applied, and structural defects such as cracks and delamination occur in this portion in the laminated molded body and the element after firing, This has been a major issue in the method of manufacturing a monolithic ceramic capacitor.

【0007】そこで本発明は上記問題点に鑑み、積層の
際、積層成形体に内部電極の厚みによる凹凸の悪影響を
及ぼさないような表面が平坦なグリーンシートを用いた
積層セラミックコンデンサの製造方法を提供しようとす
るものである。
In view of the above problems, the present invention provides a method for producing a laminated ceramic capacitor using a green sheet having a flat surface which does not adversely affect the unevenness due to the thickness of the internal electrodes in the laminated body during lamination. It is the one we are trying to provide.

【0008】[0008]

【課題を解決するための手段】上記問題点を解決するた
めに本発明は、積層セラミックコンデンサの製造におい
て、支持体となるベースフィルム上に形成された内部電
極を覆う形でスクリーン印刷によって誘電体層を形成す
るグリーンシートの作製工程と、上記ベースフィルム上
から上記グリーンシートを直接熱加圧して上記内部電極
を含む誘電体層を熱転写することを繰り返して順次積層
する積層工程とを具備し、かつ同一面内にメッシュ数の
異なる2種の領域を有する版をメッシュ数の大きい部
分、すなわち、メッシュの細かい部分が内部電極の形成
部分にメッシュ数の小さい部分、すなわち、メッシュの
粗い部分が内部電極の非形成部分に合致するように配置
してスクリーン印刷を行うという構成を備えたものであ
る。
SUMMARY OF THE INVENTION In order to solve the above problems, the present invention provides a dielectric material by screen printing in the form of a multilayer ceramic capacitor so as to cover the internal electrodes formed on a base film serving as a support. A step of forming a green sheet for forming a layer, and a step of laminating the green sheet directly on the base film by directly heat-pressing the dielectric layer including the internal electrodes to repeatedly laminate the layers sequentially, In addition, a plate having two kinds of regions having different mesh numbers in the same plane is used as a portion having a large mesh number, that is, a fine mesh portion is a portion having a small mesh number in an internal electrode formation portion, that is, a coarse mesh portion is an internal portion. The screen printing is performed by arranging the electrodes so as to match the non-formed portions of the electrodes.

【0009】[0009]

【作用】一般にスクリーン印刷方法では同一の印刷条件
下では版のメッシュ数を変えた場合、メッシュを粗くす
ると印刷塗膜の厚みが厚くなり、メッシュを細かくする
と印刷塗膜の厚みが薄くなる傾向がある。そこで本発明
は、上記した構成、すなわち、メッシュ数の大きい部分
を内部電極の形成部分に、メッシュ数の小さい部分を内
部電極の非形成部分にそれぞれ合致するように配置して
印刷を行うことにより、内部電極の形成部分の上には誘
電体層が薄く、また、内部電極の非形成部分には誘電体
層が厚く塗布されるため、内部電極の厚みによる表面の
凹凸を相殺した誘電体層が形成可能となり、表面の平坦
なグリーンシートを得ることができる。さらに積層の際
には、こうして得られたグリーンシートのベースフィル
ム上から上記グリーンシートを直接熱加圧し、ベースフ
ィルムを剥離した後、この剥離した面に表面が平坦な次
のグリーンシートを順次積層するため、積層面は常に平
坦面となって常に均一な加圧が可能となり、前述した積
層成形体の凹凸に起因した不良を解消することができる
こととなる。
In general, in the screen printing method, when the number of meshes of the plate is changed under the same printing conditions, the coarser the mesh, the thicker the printed coating film becomes, and the finer the mesh, the thinner the printed coating film tends to become. is there. Therefore, the present invention is configured as described above, that is, by performing printing by arranging a portion having a large number of meshes in a portion where internal electrodes are formed and a portion having a small number of meshes in portions where internal electrodes are not formed, respectively. Since the dielectric layer is thin on the internal electrode formation portion and the dielectric layer is thick on the internal electrode non-formation portion, the dielectric layer cancels the surface irregularities due to the internal electrode thickness. Can be formed, and a green sheet with a flat surface can be obtained. Further, at the time of stacking, the green sheet is directly heat-pressed from the base film of the green sheet thus obtained, the base film is peeled off, and then the next green sheet having a flat surface is sequentially laminated on the peeled surface. Therefore, the laminated surface is always a flat surface, and uniform pressing is always possible, so that the above-mentioned defects due to the unevenness of the laminated molded body can be eliminated.

【0010】[0010]

【実施例】以下、本発明の一実施例について図面を参照
しながら説明する。図1は本発明の一実施例における同
一面内にメッシュ数の異なる2種の領域を有する版1を
用い、メッシュの細かい部分2をベースフィルム4上の
内部電極5の形成部分に、メッシュの粗い部分3を内部
電極5の非形成部分に合致するように配置して印刷を行
う工程を説明する図であり、図2は版1を用いて誘電体
層6を印刷し作製したグリーンシートの構造を示す一部
断面図である。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 uses a plate 1 having two kinds of regions having different mesh numbers in the same plane in one embodiment of the present invention, and a fine portion 2 of the mesh is used as a portion where the internal electrode 5 is formed on the base film 4. FIG. 2 is a diagram illustrating a step of printing by arranging the rough portion 3 so as to match a portion where the internal electrode 5 is not formed. FIG. 2 shows a green sheet produced by printing the dielectric layer 6 using the plate 1. It is a partial cross section figure which shows a structure.

【0011】次に、本発明におけるグリーンシートを用
いた積層セラミックコンデンサの作製について説明す
る。まず、支持体となるベースフィルム4の表面に市販
のパラジウムペーストを用いて、スクリーン印刷法によ
り所望のパターンの内部電極5を形成した。また、チタ
ン酸バリウム粉末100重量部,ポリビニルブチラール
樹脂25重量部,ブチルカルビトール50重量部,フタ
ル酸ジオクチル5重量部を配合し、3本ロールミルで混
練して誘電体層用のペーストを作製した。
Next, the production of a laminated ceramic capacitor using the green sheet of the present invention will be described. First, a commercially available palladium paste was used on the surface of the base film 4 serving as a support to form the internal electrodes 5 having a desired pattern by a screen printing method. Further, 100 parts by weight of barium titanate powder, 25 parts by weight of polyvinyl butyral resin, 50 parts by weight of butyl carbitol, and 5 parts by weight of dioctyl phthalate were mixed and kneaded with a three-roll mill to prepare a paste for a dielectric layer. ..

【0012】次に、上記で形成した内部電極5のパター
ンに合わせて、内部電極5に対応するメッシュの細かい
部分2には400メッシュ、内部電極5の非形成部分に
対応するメッシュの粗い部分3には250メッシュとい
う具合に、同一面内でメッシュ数に違いのあるスクリー
ン印刷用の版1を作製した。この版1を用いて上記で作
製した内部電極5を形成したベースフィルム4の上に、
図1に示すように両者のパターンが一致するように位置
合わせした上で、上記で作製した誘電体層用ペーストを
用い、内部電極5を覆う形でスクリーン印刷法によって
誘電体層6を形成し、グリーンシートを作製した。こう
して得られたグリーンシートの表面を接触式の表面粗さ
計で測定し、表面段差Δt1(μm)を算出した。
Next, according to the pattern of the internal electrodes 5 formed as described above, a fine mesh portion 2 corresponding to the internal electrodes 5 has a 400 mesh portion, and a coarse mesh portion 3 corresponding to a portion where the internal electrodes 5 are not formed. A screen printing plate 1 having different mesh numbers in the same plane, such as 250 mesh, was prepared. On the base film 4 on which the internal electrode 5 produced above using this plate 1 is formed,
As shown in FIG. 1, the two layers are aligned so that their patterns match each other, and then the dielectric layer paste prepared above is used to form a dielectric layer 6 by a screen printing method so as to cover the internal electrodes 5. , A green sheet was prepared. The surface of the green sheet thus obtained was measured with a contact type surface roughness meter to calculate the surface step Δt 1 (μm).

【0013】次に上記で作製したグリーンシートを、前
述した熱転写工法に従い、図3(a)の積層工程の第1
ステップの図に示すように、加熱プレス機を用いて上記
グリーンシートのベースフィルム4の上からヒータを内
蔵する金型7の表面温度120℃,圧力35kg/cm2
加圧時間5秒の熱圧着条件で、積層用パレット9の上に
予め作製したコンデンサの電気容量に関与しない下部支
持層8の上に熱転写し、続いて、図3(b)の第2ステ
ップの図に示すように、転写されたグリーンシートのベ
ースフィルム4を剥離した後、次にくるグリーンシート
を容量取得のため所定の寸法だけ位置をずらし、上記と
全く同様の方法で熱転写を行った。以後、このような積
層を繰り返し、70層の積層が完了した時点で、最上層
に上記と同様の厚さを有する上部支持層(図示せず)を
形成することで積層成形体を作製してこの積層成形体を
所望の寸法に切断し、内部電極5を含む部分とその周辺
部分の厚みを測定しその厚み差Δt2(μm)を求め
た。
Next, the green sheet produced above is subjected to the first step of the laminating step of FIG. 3 (a) according to the above-mentioned thermal transfer method.
As shown in the step diagram, using a heating press, the surface temperature of the mold 7 having the heater built-in is 120 ° C., the pressure is 35 kg / cm 2 , from above the base film 4 of the green sheet.
Under a thermocompression bonding condition of a pressurizing time of 5 seconds, thermal transfer is performed on the lower support layer 8 which does not contribute to the electric capacity of the capacitor previously produced on the stacking pallet 9, and then the second step of FIG. 3B. As shown in the figure, after peeling off the base film 4 of the transferred green sheet, the position of the next green sheet was shifted by a predetermined dimension to obtain the capacity, and thermal transfer was performed in the same manner as above. .. Thereafter, such stacking is repeated, and when stacking of 70 layers is completed, an upper support layer (not shown) having the same thickness as above is formed on the uppermost layer to prepare a multilayer molded body. This laminated compact was cut into a desired size, and the thickness of the portion including the internal electrode 5 and its peripheral portion was measured to obtain the thickness difference Δt 2 (μm).

【0014】次に、上記で得られたチップ状の積層成形
体を電気炉内で有機バインダの脱脂のため350℃で途
中5時間放置した後、1300℃で2時間焼成した。焼
成後、得られた素子の外観および内部を観察し、デラミ
ネーション等の構造欠陥の発生率を1000個のサンプ
ルについて算出し、その結果を通常のスクリーン印刷方
法、すなわち、スクリーン印刷の版のメッシュ数に変化
がなく一律に250メッシュの版を用いて上記と全く同
様の熱転写工法で100層の積層を行った焼成後の素子
の場合の結果と比較した。なお、この時、上記と同様の
方法でグリーンシートの表面段差と積層成形体の厚み差
を測定し、併せて比較した。以上、グリーンシートの表
面段差Δt1(μm)、積層成形体の厚み差Δt2(μ
m)、焼成後の素子1000個に対する構造欠陥の発生
率(%)を下記の(表1)にまとめて示した。
Next, the chip-shaped laminated molded body obtained above was left in the electric furnace at 350 ° C. for 5 hours for degreasing of the organic binder and then fired at 1300 ° C. for 2 hours. After firing, the appearance and the inside of the obtained device are observed, the occurrence rate of structural defects such as delamination is calculated for 1000 samples, and the result is obtained by a normal screen printing method, that is, a screen printing plate mesh. The results were compared with the case of the element after firing in which 100 layers were stacked by the same thermal transfer method as above using a 250 mesh plate without any change in the number. At this time, the difference in surface step of the green sheet and the thickness difference between the laminated molded bodies were measured by the same method as described above, and also compared. As described above, the surface difference Δt 1 (μm) of the green sheet and the thickness difference Δt 2
m) and the occurrence rate (%) of structural defects for 1000 elements after firing are summarized in (Table 1) below.

【0015】[0015]

【表1】 [Table 1]

【0016】この(表1)より明らかなように、本実施
例によるものはグリーンシートの表面段差が圧倒的に低
減され、積層後も表面凹凸のない均一な積層成形体が得
られていることがわかる。また、焼成後の素子のデラミ
ネーション等の構造欠陥の発生もほぼ完全に抑えること
ができた。
As is clear from this (Table 1), according to the present embodiment, the surface step of the green sheet is overwhelmingly reduced, and a uniform laminated molded body having no surface irregularity even after lamination is obtained. I understand. Further, occurrence of structural defects such as delamination of the device after firing could be almost completely suppressed.

【0017】なお、上記の実施例では、内部電極として
パラジウムを用いた場合について説明したが、本発明は
これに限定されるものではなく、パラジウム−銀等のパ
ラジウムを主成分とするものや、ニッケル等の卑金属を
用いる場合にも本発明は適用できるものである。
In the above embodiments, the case where palladium is used as the internal electrode has been described, but the present invention is not limited to this, and one containing palladium such as palladium-silver as a main component, The present invention can be applied to the case where a base metal such as nickel is used.

【0018】[0018]

【発明の効果】以上のように本発明は、同一面内でメッ
シュ数の異なる版を用いて誘電体層を印刷することによ
り、表面が平坦なグリーンシートを作製することがで
き、これを用いることにより、構造欠陥の発生をほぼ完
全に抑えた積層セラミックコンデンサを実現するもので
あり、その製造において、生産性向上に画期的な効果を
もたらすものである。
INDUSTRIAL APPLICABILITY As described above, according to the present invention, it is possible to produce a green sheet having a flat surface by printing a dielectric layer by using plates having different mesh numbers in the same plane. As a result, it is possible to realize a monolithic ceramic capacitor in which the occurrence of structural defects is almost completely suppressed, and in the manufacture thereof, an epoch-making effect is brought about in improving productivity.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例によるスクリーン印刷方法の
説明図
FIG. 1 is an explanatory diagram of a screen printing method according to an embodiment of the present invention.

【図2】本発明の一実施例によるグリーンシートの一部
断面図
FIG. 2 is a partial sectional view of a green sheet according to an embodiment of the present invention.

【図3】(a)は本発明の一実施例における積層工程の
第1ステップの説明図 (b)は同第2ステップの説明図
FIG. 3A is an explanatory view of a first step of a laminating process in an embodiment of the present invention, and FIG. 3B is an explanatory view of the second step.

【符号の説明】[Explanation of symbols]

1 版 2 細かい部分 3 粗い部分 4 ベースフィルム 5 内部電極 6 誘電体層 7 金型 8 下部支持層 9 積層用パレット 1 plate 2 fine part 3 rough part 4 base film 5 internal electrode 6 dielectric layer 7 mold 8 lower support layer 9 stacking pallet

───────────────────────────────────────────────────── フロントページの続き (72)発明者 沖中 秀行 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hideyuki Okinaka 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】支持体となるベースフィルム上に形成され
た内部電極を覆う形でスクリーン印刷によって誘電体層
を形成するグリーンシートの作製工程と、上記ベースフ
ィルム上から上記グリーンシートを直接熱加圧して上記
内部電極を含む誘電体層を熱転写することを繰り返して
順次積層する積層工程とを具備し、かつ同一面内にメッ
シュ数の異なる2種の領域を有する版をメッシュ数の大
きい部分が上記内部電極の形成部分にメッシュ数の小さ
い部分が上記内部電極の非形成部分に合致するように配
置して上記スクリーン印刷を行うことを特徴とする積層
セラミックコンデンサの製造方法。
1. A step of producing a green sheet in which a dielectric layer is formed by screen printing so as to cover the internal electrodes formed on a base film serving as a support, and the green sheet is directly heated from above the base film. Laminating step in which the dielectric layers including the internal electrodes are repeatedly thermally transferred by pressing and sequentially laminating, and a plate having two kinds of regions having different mesh numbers in the same plane has a large mesh number. A method for manufacturing a monolithic ceramic capacitor, comprising: arranging a portion having a small mesh number in a portion where the internal electrode is formed so as to match a portion where the internal electrode is not formed, and performing the screen printing.
JP26004091A 1991-10-08 1991-10-08 Manufacture of monolithic ceramic capacitor Pending JPH05101969A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26004091A JPH05101969A (en) 1991-10-08 1991-10-08 Manufacture of monolithic ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26004091A JPH05101969A (en) 1991-10-08 1991-10-08 Manufacture of monolithic ceramic capacitor

Publications (1)

Publication Number Publication Date
JPH05101969A true JPH05101969A (en) 1993-04-23

Family

ID=17342468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26004091A Pending JPH05101969A (en) 1991-10-08 1991-10-08 Manufacture of monolithic ceramic capacitor

Country Status (1)

Country Link
JP (1) JPH05101969A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203224A (en) * 2006-02-20 2006-08-03 Tdk Corp Manufacturing method for ceramic electronic component
KR100764358B1 (en) * 2006-01-12 2007-10-08 삼성전기주식회사 Method of manufacturing laminated ceramic electronic component
US8867188B2 (en) 2010-12-06 2014-10-21 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component and fabricating method thereof
KR20220037136A (en) * 2020-09-17 2022-03-24 삼화콘덴서공업주식회사 Multi layer ceramic capacitor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100764358B1 (en) * 2006-01-12 2007-10-08 삼성전기주식회사 Method of manufacturing laminated ceramic electronic component
JP2006203224A (en) * 2006-02-20 2006-08-03 Tdk Corp Manufacturing method for ceramic electronic component
US8867188B2 (en) 2010-12-06 2014-10-21 Samsung Electro-Mechanics Co., Ltd. Multilayer ceramic electronic component and fabricating method thereof
KR20220037136A (en) * 2020-09-17 2022-03-24 삼화콘덴서공업주식회사 Multi layer ceramic capacitor

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