JPH0391221A - Green sheet for laminated ceramic capacitor - Google Patents

Green sheet for laminated ceramic capacitor

Info

Publication number
JPH0391221A
JPH0391221A JP22771989A JP22771989A JPH0391221A JP H0391221 A JPH0391221 A JP H0391221A JP 22771989 A JP22771989 A JP 22771989A JP 22771989 A JP22771989 A JP 22771989A JP H0391221 A JPH0391221 A JP H0391221A
Authority
JP
Japan
Prior art keywords
dielectric layer
green sheet
ceramic capacitor
internal electrodes
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22771989A
Other languages
Japanese (ja)
Inventor
Hikoharu Okuyama
彦治 奥山
Yasutaka Horibe
堀部 泰孝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP22771989A priority Critical patent/JPH0391221A/en
Publication of JPH0391221A publication Critical patent/JPH0391221A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To obtain a green sheet having a flat surface by forming inner electrodes newly in gaps of the electrodes to become a recessed surface when a lower dielectric layer is formed, and further forming an upper dielectric layer thereon. CONSTITUTION:A dielectric layer 6a is formed on a base film 4 in which inner electrodes 5a are formed. Upper inner electrodes 5b are formed in gaps of the electrodes 5a corresponding to the recesses of the sheet, dried, upper dielectric layer 6b is further formed from above, and a green sheet is obtained.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は積層セラミックコンデンサに用いられる積層セ
ラミックコンデンサ用グリーンシートに関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a green sheet for a multilayer ceramic capacitor used in a multilayer ceramic capacitor.

従来の技術 近年、電子機器の小型化、高周波化に伴い、積層セラミ
ックコンデンサの需要がますます高まっている。
BACKGROUND OF THE INVENTION In recent years, demand for multilayer ceramic capacitors has been increasing as electronic devices become smaller and operate at higher frequencies.

積層セラミックコンデンサの一般的な製造方法は、まず
チタン酸バリウム等の誘電体粉末と有機バインダ、可塑
剤及び有機溶剤からなるスラリーを用いてドクターブレ
ード法によりグリーンシートを作製する。
A general method for manufacturing a multilayer ceramic capacitor is to first prepare a green sheet by a doctor blade method using a slurry consisting of dielectric powder such as barium titanate, an organic binder, a plasticizer, and an organic solvent.

次に、このシートの上にパラジウム、白金等の貴金属を
主成分とした電極ペーストを用いてスクリーン印刷法等
により内部電極を形成する。
Next, internal electrodes are formed on this sheet by screen printing or the like using an electrode paste whose main component is a noble metal such as palladium or platinum.

次に、内部電極を形成したグリーンシートを内部電極層
が誘電体層を挟んで交互に対向するように配置して順次
積層し、所望の積層数を得た成形体を所望の大きさのチ
ップに切断後、120.0’C〜1400℃で坑底する
。こうして得られた焼結体の両端部に現われる上記内部
電極に、これらの内部電極が電気的に接続されるように
銀または銀パラジウム等を塗布し、焼付けることによっ
て外部電極を形成し、積層セラミックコンデンサを製造
している。
Next, the green sheets with internal electrodes formed thereon are stacked one after another by arranging the internal electrode layers to alternately face each other with dielectric layers in between, and the molded body with the desired number of stacked layers is shaped into a chip of the desired size. After cutting at 120.0'C to 1400C, the bottom of the hole is drilled. The internal electrodes appearing at both ends of the sintered body thus obtained are coated with silver, silver palladium, etc. so that these internal electrodes are electrically connected, and baked to form external electrodes, and laminated. Manufactures ceramic capacitors.

一方、コンデンサの大容量化を遠戚するには誘電体層の
薄層化を図る必要があるが、ドクターブレード法では誘
電体層の厚みに限度がある。そこで、スラリー中の有機
バインダ量を増やし、スラリー粘度をさらに小さくして
リバースロール法等により10μm以下の薄型シートを
作製し、熱盤等でベースフィルムの上から熱と圧力を加
えて予め用意された誘電体層の上にグリーンシートを熱
転写し、上記ベースフィルムを剥離した後、上記グリー
ンシートのフィルム面に内部電極を印刷し、乾燥後、別
の上記グリーンシートをベースフィルム面が上になるよ
うに載せ、上記と同様にして熱転写を行い、以後所望の
積層数まで順次積層を繰り返す製造方法(以下、ホット
スタンプ法と記す)も最近提案されている。
On the other hand, in order to increase the capacitance of capacitors, it is necessary to make the dielectric layer thinner, but there is a limit to the thickness of the dielectric layer in the doctor blade method. Therefore, by increasing the amount of organic binder in the slurry and further reducing the slurry viscosity, we produced a thin sheet of 10 μm or less using a reverse roll method, etc., and applied heat and pressure from above the base film using a heating plate, etc. to prepare the sheet in advance. After thermally transferring a green sheet onto the dielectric layer and peeling off the base film, internal electrodes are printed on the film surface of the green sheet, and after drying, another green sheet is placed with the base film side facing up. A manufacturing method (hereinafter referred to as the hot stamping method) has recently been proposed in which the layers are placed in the same manner as described above, thermal transfer is performed in the same manner as above, and the layers are sequentially stacked until the desired number of layers are stacked.

発明が解決しようとする課題 しかしながら、上記のような製造プロセスを採用するホ
ットスタンプ法の場合、内部電極白身の持つ厚みのため
、積層が高次に進むに従い、積層成形体において内部電
極を含む部分とその周囲の部分で顕著な凹凸を生しるこ
ととなる。この時、内部電極を含まない周囲の部分は凹
部となって、積層時の圧力が十分に加わらず、積層成形
体やその後の焼結体素子においてこの部分でクラックや
デラミネーションが多く発生し、積層セラミックコンデ
ンサの製造において大きな問題点となっている。
Problems to be Solved by the Invention However, in the case of the hot stamping method that employs the manufacturing process as described above, due to the thickness of the internal electrode white, as the lamination progresses to a higher level, the part containing the internal electrode in the laminate molded product becomes thinner. This results in noticeable unevenness in the area around the area. At this time, the surrounding area that does not include the internal electrode becomes a recess, and sufficient pressure is not applied during lamination, and many cracks and delaminations occur in this area in the laminated molded body and the subsequent sintered body element. This is a major problem in the manufacture of multilayer ceramic capacitors.

また最近では、このような問題を改善するため、第2図
に示すようにベースフィルム1上に内部電極2を形成し
た後、内部電極2を埋め込む形で誘電体層3を形成し、
内部電極2の厚みを相殺することを目的とした表面が比
較的平坦なグリーンシート(以下、埋め込みシートと記
す)も提案されているが(例えば、特開昭53−688
53号公報)、このような構成では誘電体層3の乾燥後
、内部電極2の上部に当たる部分の誘電体層3が凸部A
となり、基本的にグリーンシートの平坦化の問題を解決
するに至っていないのが現状である。
Recently, in order to improve this problem, after forming the internal electrodes 2 on the base film 1 as shown in FIG. 2, a dielectric layer 3 is formed to embed the internal electrodes 2.
Green sheets with relatively flat surfaces (hereinafter referred to as embedded sheets) for the purpose of offsetting the thickness of the internal electrodes 2 have also been proposed (for example, in Japanese Patent Application Laid-Open No. 53-688
In such a structure, after drying the dielectric layer 3, the portion of the dielectric layer 3 corresponding to the upper part of the internal electrode 2 forms the convex portion A.
Therefore, the current situation is that basically the problem of flattening the green sheet has not been solved.

そこで本発明は上記問題点に鑑み、積層セラミックコン
デンサの製造において、積層の際に内部電極の厚みによ
る積層時の成形体の凹凸等の悪影響を受けない表面の平
坦な積層セラミックコンデンサ用グリーンシートを提供
しようとするものである。
Therefore, in view of the above-mentioned problems, the present invention provides a green sheet for a multilayer ceramic capacitor with a flat surface that is not adversely affected by the unevenness of the molded body during stacking due to the thickness of the internal electrode during the production of multilayer ceramic capacitors. This is what we are trying to provide.

課題を解決するための手段 上記問題点を解決するために本発明は、内部電極を形成
したベースフィルム上に誘電体層が形成され、上記内部
電極どうしの間隙部分に上記誘電体層の上から上記内部
電極と全く同様の内部電極が形成され、かつその上に上
記誘電体層と全く同様の誘電体層が形成されてなるとい
う構成を備えたものである。
Means for Solving the Problems In order to solve the above-mentioned problems, the present invention provides that a dielectric layer is formed on a base film on which internal electrodes are formed, and that a dielectric layer is formed in the gap between the internal electrodes from above the dielectric layer. This device has a structure in which internal electrodes that are exactly the same as the internal electrodes described above are formed, and a dielectric layer that is exactly the same as the dielectric layer that is described above is formed thereon.

作用 本発明は」二足した構成によって、下部の誘電体層を形
成した際、表面が凹部となる内部電極どうしの間隙部分
に新たに内部電極が形成され、さらにその上に上部の誘
電体層が形成されていることで、グリーンシートの表面
の平坦化を実現し、高次の積層においても内部電極の厚
みに起因するグリーンシートの凹凸による弊害を排除し
、良好な積層成形体を得ることで厚みの均一な積層セラ
ミックコンデンサを得ることができることとなる。
The present invention has a two-layered structure. When the lower dielectric layer is formed, a new internal electrode is formed in the gap between the internal electrodes whose surface has a concave portion, and the upper dielectric layer is further formed on top of the internal electrode. By forming this, it is possible to flatten the surface of the green sheet, eliminate the adverse effects of unevenness of the green sheet due to the thickness of the internal electrode even in high-order lamination, and obtain a good laminated molded product. This makes it possible to obtain a multilayer ceramic capacitor with a uniform thickness.

実施例 以下、本発明の一実施例について図面を参照しながら説
明する。
EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図は本発明の一実施例における予め内部電極を形成
したベースフィルム上に誘電体層を形成し、上記内部電
極どうしの間隙部分に上記電体層の上から上記内部電極
と全(同様の内部電極を形成した後、上記誘電体層と全
く同様の誘電体層を形成して表面を平坦化したグリーン
シートの断面を示したものである。ここて、4はベース
フィルム、5aは下部の内部電極、6aは下部の誘電体
層、5bは上部の内部電極、6bは上部の誘電体層を示
す。
FIG. 1 shows an embodiment of the present invention in which a dielectric layer is formed on a base film on which internal electrodes have been formed in advance, and a dielectric layer is formed in the gap between the internal electrodes from above the electric layer to cover the internal electrodes (similar to the above). This figure shows a cross section of a green sheet in which after forming internal electrodes, a dielectric layer exactly the same as the dielectric layer described above was formed to flatten the surface.Here, 4 is the base film, and 5a is the lower part. 6a is the lower dielectric layer, 5b is the upper internal electrode, and 6b is the upper dielectric layer.

次に、本発明におijるグリーンシートの作り方の一例
とそれを用いた積層セラミックコンデンサの作製につい
て説明する。まず、ベースフィルム4の上にパラジウム
を主成分とする市販の内部電極ペーストを用いてスクリ
ーン印刷により所望のパターンの内部電極5aを形成し
た。
Next, an example of how to make a green sheet according to the present invention and a method of manufacturing a multilayer ceramic capacitor using the green sheet will be described. First, internal electrodes 5a having a desired pattern were formed on the base film 4 by screen printing using a commercially available internal electrode paste containing palladium as a main component.

次に、チタン酸バリウム粉末100重量部、ポリビニル
ブチラール樹脂30重量部、ブチルカルピトール150
重量部、フタル酸ジオクヂル4重量部を配合し、ボール
ミルで20時間混練して誘電体層用のスラリーを作製し
、このスラリーを用いて上記で作製した内部電極5aを
形成したベースフィルム4の上にリバースロール法で誘
電体層6aを形成した。こうして得られた埋め込みシー
トの表面段差を接触式の表面膜差計で測定した後、この
シートの凹部に当たる内部電極5aどうしの間隙部分に
前述と全く同様にして上部の内部電極5bを形成し、乾
燥後、さらにこの上から前述と全く同様にして上部の誘
電体層6bを形成することで本発明のグリーンシートを
得た。
Next, 100 parts by weight of barium titanate powder, 30 parts by weight of polyvinyl butyral resin, and 150 parts by weight of butyl calpitol.
parts by weight and 4 parts by weight of dioquidyl phthalate were mixed in a ball mill for 20 hours to prepare a slurry for the dielectric layer, and this slurry was used to coat the base film 4 on which the internal electrodes 5a prepared above were formed. A dielectric layer 6a was formed using a reverse roll method. After measuring the surface level difference of the embedded sheet obtained in this way with a contact type surface film difference meter, the upper internal electrode 5b is formed in the gap between the internal electrodes 5a corresponding to the recessed part of this sheet in exactly the same manner as described above, After drying, an upper dielectric layer 6b was further formed thereon in exactly the same manner as described above to obtain a green sheet of the present invention.

こうして得られたグリーンシートの表面段差を前述と同
様の方法で測定した後、熱プレス機を用いて1800C
,15kg/cm?、 2秒の条件で前述のホットスタ
ンプ≠に従い、積層数60.層の積層セ、ラミックコン
デンサを製゛造した。この60層の積層が完了した時点
で成形体の表面段差を前述と全く同様の方法で測定し、
チップに切断後、1300℃で2時間焼成した。尚、途
中バインダ除去のため、350℃で6時間保持した。上
記の焼成後、得られた積層セラミックコンデンサのデラ
ミネーションの発生率を算出し、その結果を従来の埋め
込みシート、すなわち本発明のグリーンシートを作製す
る前段階で得られる第2図に示すところの内部電極2を
単一の誘電体層3てのみ覆ったグリーンシートを用い、
上述と全く同様のホットスタンプ法で積層セラミックコ
ンデンサを作製した場合の結果と比較した。
After measuring the surface level difference of the thus obtained green sheet in the same manner as described above, it was heated to 1800C using a heat press machine.
,15kg/cm? , The number of laminated layers was 60, according to the above-mentioned hot stamping condition for 2 seconds. A laminated cell, a laminated capacitor, was manufactured. When the lamination of these 60 layers was completed, the surface level difference of the molded body was measured in exactly the same manner as described above,
After cutting into chips, they were fired at 1300°C for 2 hours. Incidentally, in order to remove the binder during the process, the temperature was maintained at 350° C. for 6 hours. After the above firing, the occurrence rate of delamination of the obtained multilayer ceramic capacitor was calculated, and the results were compared to those shown in FIG. Using a green sheet that covers the internal electrode 2 only with a single dielectric layer 3,
The results were compared with the results obtained when a multilayer ceramic capacitor was manufactured using the same hot stamping method as described above.

下表は従来の埋め込みシートと本発明シートとのグリー
ンシートの状態での表面段差と、60層の積層を経た後
の成形体の表面段差及び焼結体素子のデラミネーション
の発生個数をサンプル数1000個に対して調べた結果
を比較したものである。
The table below shows the surface level difference between the conventional embedded sheet and the sheet of the present invention in the green sheet state, the surface level difference of the molded body after lamination of 60 layers, and the number of samples of delamination of the sintered body element. The results are compared for 1000 items.

(以 下 余 白〉 表から明らかなように、本発明シートではグリーンシー
トの表面段差が圧倒的に低減され、積層後も表面の凹凸
のない均一な成形体が得られていることがわかる。また
、本発明シートを用いることで焼結体素子のデラミネー
ションの発生も抑えることができる。
(Margins below) As is clear from the table, in the sheet of the present invention, the surface level difference of the green sheet is overwhelmingly reduced, and even after lamination, a uniform molded product with no surface irregularities is obtained. Further, by using the sheet of the present invention, it is possible to suppress the occurrence of delamination of the sintered body element.

以上のように本実施例によれば、本発明による表面が平
坦なグリーンシートを用いることによって、積層セラミ
ックコンデンサの製造における歩留りを改善することが
できる。
As described above, according to this embodiment, by using the green sheet with a flat surface according to the present invention, the yield in manufacturing a multilayer ceramic capacitor can be improved.

発明の効果 以上のように本発明は、表面が平坦なグリーンシートを
提供するものであり、同時に積層セラミックコンデンサ
の製造において、生産性向上に画期的な効果をもたらす
ものである。
Effects of the Invention As described above, the present invention provides a green sheet with a flat surface, and at the same time brings about an epoch-making effect in improving productivity in the production of multilayer ceramic capacitors.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明にかかる積層セラミックコンデンサ用グ
リーンシートの一実施例を示す断面図、第2図は従来の
埋め込みシートの断面図である。 4・・・・・・ベースフィルム、5a・・・・・・下部
の内部電極、5b・・・・・・上部の内部電極、6a・
・・・・・下部の誘電体層、6b・・・・・・上部の誘
電体層。
FIG. 1 is a sectional view showing an embodiment of a green sheet for a multilayer ceramic capacitor according to the present invention, and FIG. 2 is a sectional view of a conventional embedded sheet. 4...Base film, 5a...Lower internal electrode, 5b...Upper internal electrode, 6a...
... lower dielectric layer, 6b ... upper dielectric layer.

Claims (1)

【特許請求の範囲】[Claims]  内部電極を形成したベースフィルム上に誘電体層が形
成され、上記内部電極どうしの間隙部分に上記誘電体層
の上から上記内部電極と全く同様の内部電極が形成され
、かつその上に上記誘電体層と全く同様の誘電体層が形
成されてなることを特徴とする積層セラミックコンデン
サ用グリーンシート。
A dielectric layer is formed on the base film on which the internal electrodes are formed, and an internal electrode exactly the same as the internal electrode is formed on the dielectric layer in the gap between the internal electrodes, and the dielectric layer is formed on top of the dielectric layer. A green sheet for a multilayer ceramic capacitor characterized by forming a dielectric layer exactly the same as the body layer.
JP22771989A 1989-09-01 1989-09-01 Green sheet for laminated ceramic capacitor Pending JPH0391221A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22771989A JPH0391221A (en) 1989-09-01 1989-09-01 Green sheet for laminated ceramic capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22771989A JPH0391221A (en) 1989-09-01 1989-09-01 Green sheet for laminated ceramic capacitor

Publications (1)

Publication Number Publication Date
JPH0391221A true JPH0391221A (en) 1991-04-16

Family

ID=16865283

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22771989A Pending JPH0391221A (en) 1989-09-01 1989-09-01 Green sheet for laminated ceramic capacitor

Country Status (1)

Country Link
JP (1) JPH0391221A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095813A (en) * 2005-09-27 2007-04-12 Tdk Corp Manufacturing method of laminated capacitor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095813A (en) * 2005-09-27 2007-04-12 Tdk Corp Manufacturing method of laminated capacitor

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