JPH049591B2 - - Google Patents
Info
- Publication number
- JPH049591B2 JPH049591B2 JP9570383A JP9570383A JPH049591B2 JP H049591 B2 JPH049591 B2 JP H049591B2 JP 9570383 A JP9570383 A JP 9570383A JP 9570383 A JP9570383 A JP 9570383A JP H049591 B2 JPH049591 B2 JP H049591B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- head
- photoelectric switch
- opening
- detection photoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 54
- 235000012431 wafers Nutrition 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9570383A JPS59222259A (ja) | 1983-06-01 | 1983-06-01 | 開口部検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9570383A JPS59222259A (ja) | 1983-06-01 | 1983-06-01 | 開口部検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59222259A JPS59222259A (ja) | 1984-12-13 |
| JPH049591B2 true JPH049591B2 (de) | 1992-02-20 |
Family
ID=14144861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9570383A Granted JPS59222259A (ja) | 1983-06-01 | 1983-06-01 | 開口部検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59222259A (de) |
-
1983
- 1983-06-01 JP JP9570383A patent/JPS59222259A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59222259A (ja) | 1984-12-13 |
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