JPH04957B2 - - Google Patents

Info

Publication number
JPH04957B2
JPH04957B2 JP60224070A JP22407085A JPH04957B2 JP H04957 B2 JPH04957 B2 JP H04957B2 JP 60224070 A JP60224070 A JP 60224070A JP 22407085 A JP22407085 A JP 22407085A JP H04957 B2 JPH04957 B2 JP H04957B2
Authority
JP
Japan
Prior art keywords
single crystal
radiation thermometer
molten metal
fusion ring
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60224070A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6283393A (ja
Inventor
Jukichi Horioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Materials Corp
Original Assignee
Mitsubishi Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp filed Critical Mitsubishi Materials Corp
Priority to JP22407085A priority Critical patent/JPS6283393A/ja
Publication of JPS6283393A publication Critical patent/JPS6283393A/ja
Publication of JPH04957B2 publication Critical patent/JPH04957B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP22407085A 1985-10-08 1985-10-08 単結晶引上装置 Granted JPS6283393A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22407085A JPS6283393A (ja) 1985-10-08 1985-10-08 単結晶引上装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22407085A JPS6283393A (ja) 1985-10-08 1985-10-08 単結晶引上装置

Publications (2)

Publication Number Publication Date
JPS6283393A JPS6283393A (ja) 1987-04-16
JPH04957B2 true JPH04957B2 (enExample) 1992-01-09

Family

ID=16808091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22407085A Granted JPS6283393A (ja) 1985-10-08 1985-10-08 単結晶引上装置

Country Status (1)

Country Link
JP (1) JPS6283393A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6452098B2 (ja) * 2017-03-13 2019-01-16 Ftb研究所株式会社 大口径cz単結晶の成長装置およびその成長方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55130895A (en) * 1979-03-28 1980-10-11 Hitachi Ltd Single crystal preparing method and apparatus therefor
JPS5933555A (ja) * 1982-08-18 1984-02-23 Oki Electric Ind Co Ltd デ−タフロ−制御方式

Also Published As

Publication number Publication date
JPS6283393A (ja) 1987-04-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term