JPH049387B2 - - Google Patents
Info
- Publication number
- JPH049387B2 JPH049387B2 JP57074753A JP7475382A JPH049387B2 JP H049387 B2 JPH049387 B2 JP H049387B2 JP 57074753 A JP57074753 A JP 57074753A JP 7475382 A JP7475382 A JP 7475382A JP H049387 B2 JPH049387 B2 JP H049387B2
- Authority
- JP
- Japan
- Prior art keywords
- mos transistor
- polycrystalline silicon
- silicon film
- driver
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Dram (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57074753A JPS58191461A (ja) | 1982-05-04 | 1982-05-04 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57074753A JPS58191461A (ja) | 1982-05-04 | 1982-05-04 | 半導体装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58191461A JPS58191461A (ja) | 1983-11-08 |
JPH049387B2 true JPH049387B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-20 |
Family
ID=13556336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57074753A Granted JPS58191461A (ja) | 1982-05-04 | 1982-05-04 | 半導体装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58191461A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2172977A1 (en) | 2008-10-03 | 2010-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
CN101714546B (zh) * | 2008-10-03 | 2014-05-14 | 株式会社半导体能源研究所 | 显示装置及其制造方法 |
KR101890096B1 (ko) * | 2009-09-24 | 2018-08-20 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 구동 회로, 상기 구동 회로를 포함하는 표시 장치, 및 상기 표시 장치를 포함하는 전자 기기 |
-
1982
- 1982-05-04 JP JP57074753A patent/JPS58191461A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58191461A (ja) | 1983-11-08 |
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