JPH048911B2 - - Google Patents
Info
- Publication number
- JPH048911B2 JPH048911B2 JP61151695A JP15169586A JPH048911B2 JP H048911 B2 JPH048911 B2 JP H048911B2 JP 61151695 A JP61151695 A JP 61151695A JP 15169586 A JP15169586 A JP 15169586A JP H048911 B2 JPH048911 B2 JP H048911B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- furnace
- coil
- winding
- coil heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004804 winding Methods 0.000 claims description 40
- 239000004065 semiconductor Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 238000005452 bending Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15169586A JPS6310487A (ja) | 1986-06-30 | 1986-06-30 | 横置型処理炉における半導体プロセス用コイルヒータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15169586A JPS6310487A (ja) | 1986-06-30 | 1986-06-30 | 横置型処理炉における半導体プロセス用コイルヒータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6310487A JPS6310487A (ja) | 1988-01-18 |
| JPH048911B2 true JPH048911B2 (ko) | 1992-02-18 |
Family
ID=15524242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15169586A Granted JPS6310487A (ja) | 1986-06-30 | 1986-06-30 | 横置型処理炉における半導体プロセス用コイルヒータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6310487A (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5760530A (en) * | 1980-09-26 | 1982-04-12 | Sanyo Chem Ind Ltd | Binder and magnetic recording material |
| KR101484341B1 (ko) * | 2007-03-05 | 2015-01-19 | 산드빅 인터렉츄얼 프로퍼티 에이비 | 히터 요소 및 전기로용 인서트 |
| SE530968C2 (sv) * | 2007-03-05 | 2008-11-04 | Sandvik Intellectual Property | Insats och värmeelement för elektriska ugnar |
| JP2008311111A (ja) * | 2007-06-15 | 2008-12-25 | Kurabe Ind Co Ltd | コード状ヒータ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61117224A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | 高周波誘導加熱用コイル |
-
1986
- 1986-06-30 JP JP15169586A patent/JPS6310487A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61117224A (ja) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | 高周波誘導加熱用コイル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310487A (ja) | 1988-01-18 |
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