JPH048911B2 - - Google Patents

Info

Publication number
JPH048911B2
JPH048911B2 JP61151695A JP15169586A JPH048911B2 JP H048911 B2 JPH048911 B2 JP H048911B2 JP 61151695 A JP61151695 A JP 61151695A JP 15169586 A JP15169586 A JP 15169586A JP H048911 B2 JPH048911 B2 JP H048911B2
Authority
JP
Japan
Prior art keywords
heater
furnace
coil
winding
coil heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61151695A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6310487A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15169586A priority Critical patent/JPS6310487A/ja
Publication of JPS6310487A publication Critical patent/JPS6310487A/ja
Publication of JPH048911B2 publication Critical patent/JPH048911B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
JP15169586A 1986-06-30 1986-06-30 横置型処理炉における半導体プロセス用コイルヒータ Granted JPS6310487A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15169586A JPS6310487A (ja) 1986-06-30 1986-06-30 横置型処理炉における半導体プロセス用コイルヒータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15169586A JPS6310487A (ja) 1986-06-30 1986-06-30 横置型処理炉における半導体プロセス用コイルヒータ

Publications (2)

Publication Number Publication Date
JPS6310487A JPS6310487A (ja) 1988-01-18
JPH048911B2 true JPH048911B2 (enrdf_load_stackoverflow) 1992-02-18

Family

ID=15524242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15169586A Granted JPS6310487A (ja) 1986-06-30 1986-06-30 横置型処理炉における半導体プロセス用コイルヒータ

Country Status (1)

Country Link
JP (1) JPS6310487A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5760530A (en) * 1980-09-26 1982-04-12 Sanyo Chem Ind Ltd Binder and magnetic recording material
SE530968C2 (sv) * 2007-03-05 2008-11-04 Sandvik Intellectual Property Insats och värmeelement för elektriska ugnar
ES2548008T3 (es) * 2007-03-05 2015-10-13 Sandvik Intellectual Property Ab Elemento calentador así como un inserto para hornos eléctricos
JP2008311111A (ja) * 2007-06-15 2008-12-25 Kurabe Ind Co Ltd コード状ヒータ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61117224A (ja) * 1984-11-14 1986-06-04 Hitachi Ltd 高周波誘導加熱用コイル

Also Published As

Publication number Publication date
JPS6310487A (ja) 1988-01-18

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