JPH04889Y2 - - Google Patents
Info
- Publication number
- JPH04889Y2 JPH04889Y2 JP12310486U JP12310486U JPH04889Y2 JP H04889 Y2 JPH04889 Y2 JP H04889Y2 JP 12310486 U JP12310486 U JP 12310486U JP 12310486 U JP12310486 U JP 12310486U JP H04889 Y2 JPH04889 Y2 JP H04889Y2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- chemical solution
- storage tank
- chemical
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 49
- 229920003002 synthetic resin Polymers 0.000 claims description 8
- 239000000057 synthetic resin Substances 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 16
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12310486U JPH04889Y2 (enrdf_load_stackoverflow) | 1986-08-11 | 1986-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12310486U JPH04889Y2 (enrdf_load_stackoverflow) | 1986-08-11 | 1986-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332612U JPS6332612U (enrdf_load_stackoverflow) | 1988-03-02 |
| JPH04889Y2 true JPH04889Y2 (enrdf_load_stackoverflow) | 1992-01-13 |
Family
ID=31013900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12310486U Expired JPH04889Y2 (enrdf_load_stackoverflow) | 1986-08-11 | 1986-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04889Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005088685A1 (ja) * | 2004-03-16 | 2005-09-22 | Hirata Corporation | 処理液供給システム及びフィルタ装置 |
-
1986
- 1986-08-11 JP JP12310486U patent/JPH04889Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332612U (enrdf_load_stackoverflow) | 1988-03-02 |
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