JPH0488030U - - Google Patents

Info

Publication number
JPH0488030U
JPH0488030U JP40056890U JP40056890U JPH0488030U JP H0488030 U JPH0488030 U JP H0488030U JP 40056890 U JP40056890 U JP 40056890U JP 40056890 U JP40056890 U JP 40056890U JP H0488030 U JPH0488030 U JP H0488030U
Authority
JP
Japan
Prior art keywords
clutch
lever
fulcrum
elastic member
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP40056890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP40056890U priority Critical patent/JPH0488030U/ja
Publication of JPH0488030U publication Critical patent/JPH0488030U/ja
Pending legal-status Critical Current

Links

JP40056890U 1990-12-14 1990-12-14 Pending JPH0488030U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40056890U JPH0488030U (en, 2012) 1990-12-14 1990-12-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40056890U JPH0488030U (en, 2012) 1990-12-14 1990-12-14

Publications (1)

Publication Number Publication Date
JPH0488030U true JPH0488030U (en, 2012) 1992-07-30

Family

ID=31878790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40056890U Pending JPH0488030U (en, 2012) 1990-12-14 1990-12-14

Country Status (1)

Country Link
JP (1) JPH0488030U (en, 2012)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688314A (en) * 1979-12-21 1981-07-17 Hitachi Ltd Wafer holding jig
JPH01241114A (ja) * 1988-03-23 1989-09-26 Tel Sagami Ltd 異径被処理体用ボート
JPH02273919A (ja) * 1989-04-17 1990-11-08 Matsushita Electron Corp 半導体ウエハ処理ボート

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5688314A (en) * 1979-12-21 1981-07-17 Hitachi Ltd Wafer holding jig
JPH01241114A (ja) * 1988-03-23 1989-09-26 Tel Sagami Ltd 異径被処理体用ボート
JPH02273919A (ja) * 1989-04-17 1990-11-08 Matsushita Electron Corp 半導体ウエハ処理ボート

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