JPH0485748U - - Google Patents
Info
- Publication number
- JPH0485748U JPH0485748U JP12783690U JP12783690U JPH0485748U JP H0485748 U JPH0485748 U JP H0485748U JP 12783690 U JP12783690 U JP 12783690U JP 12783690 U JP12783690 U JP 12783690U JP H0485748 U JPH0485748 U JP H0485748U
- Authority
- JP
- Japan
- Prior art keywords
- phosphor
- ultraviolet
- sensor
- dimensional
- ultraviolet rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000000825 ultraviolet detection Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Description
第１図は本考案の一実施例による素子構造の断
面図、第２図は第１図の電極構造を示す平面図、
第３は本考案の他の実施例を示す概略構成図であ
る。
１……基板、２……下側電極、３……アモルフ
アスシリコンＰＩＮ層（ホトダイオード）、４…
…上側透明電極、５……保護膜、６……蛍光体、
７……２次元紫外線センサ、８……ＵＶ透過フイ
ルタ。
FIG. 1 is a sectional view of an element structure according to an embodiment of the present invention, FIG. 2 is a plan view showing the electrode structure of FIG. 1,
The third is a schematic configuration diagram showing another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Lower electrode, 3...Amorphous silicon PIN layer (photodiode), 4...
... Upper transparent electrode, 5 ... Protective film, 6 ... Phosphor,
7... Two-dimensional ultraviolet sensor, 8... UV transmission filter.
補正 平３．３．２２
図面の簡単な説明を次のように補正する。
明細書の６頁１７行の「第３は」を「第３図は
」と補正する。Amendment 1993.3.22 The brief description of the drawing is amended as follows. "3rd wa" on page 6, line 17 of the specification is amended to ``Fig. 3 wa''.
Claims (1)
と、該蛍光体によつて変換される可視光を電気信
号に変換するアモルフアスシリコンホトダイオー
ドを２次元のアレイ状に配列して基板上に形成さ
れた２次元紫外線センサと、このセンサの前記蛍
光体上の受光面に配置されて入射する紫外線を選
択的に透過させる光学フイルタとを備え、前記２
次元紫外線センサによつて変換される紫外線強度
に応じた信号を取り出すようにしたことを特徴と
する紫外線検出素子。 At least a phosphor that converts ultraviolet rays into visible light and an amorphous silicon photodiode that converts the visible light converted by the phosphor into an electrical signal are arranged in a two-dimensional array on a substrate. comprising: a two-dimensional ultraviolet sensor; and an optical filter disposed on a light-receiving surface on the phosphor of the sensor to selectively transmit incident ultraviolet rays;
An ultraviolet detection element characterized in that it extracts a signal according to the intensity of ultraviolet rays converted by a dimensional ultraviolet sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12783690U JPH0485748U (en) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12783690U JPH0485748U (en) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0485748U true JPH0485748U (en) | 1992-07-24 |
Family
ID=31875321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12783690U Pending JPH0485748U (en) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0485748U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016211970A (en) * | 2015-05-08 | 2016-12-15 | 日機装株式会社 | Optical measurement device and optical measurement method |
-
1990
- 1990-11-30 JP JP12783690U patent/JPH0485748U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016211970A (en) * | 2015-05-08 | 2016-12-15 | 日機装株式会社 | Optical measurement device and optical measurement method |
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