JPH048356U - - Google Patents

Info

Publication number
JPH048356U
JPH048356U JP4899590U JP4899590U JPH048356U JP H048356 U JPH048356 U JP H048356U JP 4899590 U JP4899590 U JP 4899590U JP 4899590 U JP4899590 U JP 4899590U JP H048356 U JPH048356 U JP H048356U
Authority
JP
Japan
Prior art keywords
gas
vacuum chamber
passage
flow rate
supply source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4899590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4899590U priority Critical patent/JPH048356U/ja
Publication of JPH048356U publication Critical patent/JPH048356U/ja
Pending legal-status Critical Current

Links

JP4899590U 1990-05-10 1990-05-10 Pending JPH048356U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4899590U JPH048356U (enExample) 1990-05-10 1990-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4899590U JPH048356U (enExample) 1990-05-10 1990-05-10

Publications (1)

Publication Number Publication Date
JPH048356U true JPH048356U (enExample) 1992-01-24

Family

ID=31566303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4899590U Pending JPH048356U (enExample) 1990-05-10 1990-05-10

Country Status (1)

Country Link
JP (1) JPH048356U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62139239A (ja) * 1985-12-05 1987-06-22 イ−トン　コ−ポレ−シヨン イオン注入室の浄化方法及び同装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62139239A (ja) * 1985-12-05 1987-06-22 イ−トン　コ−ポレ−シヨン イオン注入室の浄化方法及び同装置

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