JPS6198868U - - Google Patents

Info

Publication number
JPS6198868U
JPS6198868U JP18360284U JP18360284U JPS6198868U JP S6198868 U JPS6198868 U JP S6198868U JP 18360284 U JP18360284 U JP 18360284U JP 18360284 U JP18360284 U JP 18360284U JP S6198868 U JPS6198868 U JP S6198868U
Authority
JP
Japan
Prior art keywords
vacuum chamber
semiconductor manufacturing
vacuum
evacuate
atmosphere
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18360284U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18360284U priority Critical patent/JPS6198868U/ja
Publication of JPS6198868U publication Critical patent/JPS6198868U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP18360284U 1984-12-05 1984-12-05 Pending JPS6198868U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18360284U JPS6198868U (enExample) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18360284U JPS6198868U (enExample) 1984-12-05 1984-12-05

Publications (1)

Publication Number Publication Date
JPS6198868U true JPS6198868U (enExample) 1986-06-24

Family

ID=30741098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18360284U Pending JPS6198868U (enExample) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPS6198868U (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174465A (en) * 1981-04-20 1982-10-27 Kokusai Electric Co Ltd High frequency ion etching device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57174465A (en) * 1981-04-20 1982-10-27 Kokusai Electric Co Ltd High frequency ion etching device

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