JPH048351Y2 - - Google Patents
Info
- Publication number
- JPH048351Y2 JPH048351Y2 JP2513286U JP2513286U JPH048351Y2 JP H048351 Y2 JPH048351 Y2 JP H048351Y2 JP 2513286 U JP2513286 U JP 2513286U JP 2513286 U JP2513286 U JP 2513286U JP H048351 Y2 JPH048351 Y2 JP H048351Y2
- Authority
- JP
- Japan
- Prior art keywords
- foreign object
- object detection
- light
- mirror
- rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 46
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Optical Radar Systems And Details Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2513286U JPH048351Y2 (fr) | 1986-02-25 | 1986-02-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2513286U JPH048351Y2 (fr) | 1986-02-25 | 1986-02-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62140351U JPS62140351U (fr) | 1987-09-04 |
JPH048351Y2 true JPH048351Y2 (fr) | 1992-03-03 |
Family
ID=30824999
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2513286U Expired JPH048351Y2 (fr) | 1986-02-25 | 1986-02-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH048351Y2 (fr) |
-
1986
- 1986-02-25 JP JP2513286U patent/JPH048351Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62140351U (fr) | 1987-09-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SE8201306L (sv) | Optisk svepanordning | |
JPS58167902A (ja) | 物体検出装置 | |
US4346994A (en) | Secondary alignment target for an electro-optical alignment measuring system | |
JPH0426042B2 (fr) | ||
US4561778A (en) | Apparatus for measuring the dimensions of cylindrical objects by means of a scanning laser beam | |
JPH048351Y2 (fr) | ||
EP0452665A2 (fr) | Dispositif et méthode de balayage pour mesurer l'épaisseur de couches opaques ou transparentes de n'importe quel type, utilisant un laser | |
US3002419A (en) | Alignment theodolite | |
EP0051899B1 (fr) | Dispositif pour la détection et l'évaluation automatiques des caractéristiques de documents imprimés | |
JP3155188B2 (ja) | 自動追尾装置 | |
JPH0345195Y2 (fr) | ||
JPS62502421A (ja) | 二次元の対象物を整向、検査及び/または測定するための装置 | |
JPH10104340A (ja) | ミラー走査型レーダ | |
JP2000338259A (ja) | 回帰反射形の安全及び正常確認装置 | |
JPH08122426A (ja) | レーザ距離測定装置およびレーザ距離測定方法 | |
JPS6044810A (ja) | スポット光位置検出装置 | |
US4458147A (en) | Apparatus for evaluating optical signals | |
JPS5927988Y2 (ja) | レ−ザ加工装置 | |
JPH05322529A (ja) | 表面形状測定装置 | |
JPS5899736A (ja) | 表面欠陥検出装置 | |
SU1272107A1 (ru) | Оптический датчик угловых перемещений объекта | |
RU1774162C (ru) | Способ определени погрешности изготовлени пр мого угла зеркально-призменных элементов | |
SU1379610A1 (ru) | Сферометр | |
JPH0424424Y2 (fr) | ||
SU1516777A1 (ru) | Способ контрол фотоэлектрических автоколлиматоров |