JPH048351Y2 - - Google Patents

Info

Publication number
JPH048351Y2
JPH048351Y2 JP2513286U JP2513286U JPH048351Y2 JP H048351 Y2 JPH048351 Y2 JP H048351Y2 JP 2513286 U JP2513286 U JP 2513286U JP 2513286 U JP2513286 U JP 2513286U JP H048351 Y2 JPH048351 Y2 JP H048351Y2
Authority
JP
Japan
Prior art keywords
foreign object
object detection
light
mirror
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2513286U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62140351U (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2513286U priority Critical patent/JPH048351Y2/ja
Publication of JPS62140351U publication Critical patent/JPS62140351U/ja
Application granted granted Critical
Publication of JPH048351Y2 publication Critical patent/JPH048351Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Optical Radar Systems And Details Thereof (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
JP2513286U 1986-02-25 1986-02-25 Expired JPH048351Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2513286U JPH048351Y2 (fr) 1986-02-25 1986-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2513286U JPH048351Y2 (fr) 1986-02-25 1986-02-25

Publications (2)

Publication Number Publication Date
JPS62140351U JPS62140351U (fr) 1987-09-04
JPH048351Y2 true JPH048351Y2 (fr) 1992-03-03

Family

ID=30824999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2513286U Expired JPH048351Y2 (fr) 1986-02-25 1986-02-25

Country Status (1)

Country Link
JP (1) JPH048351Y2 (fr)

Also Published As

Publication number Publication date
JPS62140351U (fr) 1987-09-04

Similar Documents

Publication Publication Date Title
SE8201306L (sv) Optisk svepanordning
US4346994A (en) Secondary alignment target for an electro-optical alignment measuring system
JPH0426042B2 (fr)
US4561778A (en) Apparatus for measuring the dimensions of cylindrical objects by means of a scanning laser beam
JPH048351Y2 (fr)
EP0452665A2 (fr) Dispositif et méthode de balayage pour mesurer l'épaisseur de couches opaques ou transparentes de n'importe quel type, utilisant un laser
EP0051899B1 (fr) Dispositif pour la détection et l'évaluation automatiques des caractéristiques de documents imprimés
JP3155188B2 (ja) 自動追尾装置
JPH0345195Y2 (fr)
JPS62502421A (ja) 二次元の対象物を整向、検査及び/または測定するための装置
JPH10104340A (ja) ミラー走査型レーダ
JP2000338259A (ja) 回帰反射形の安全及び正常確認装置
JPH08122426A (ja) レーザ距離測定装置およびレーザ距離測定方法
JPS6044810A (ja) スポット光位置検出装置
US4458147A (en) Apparatus for evaluating optical signals
JPS5927988Y2 (ja) レ−ザ加工装置
JPH05322529A (ja) 表面形状測定装置
JPS5899736A (ja) 表面欠陥検出装置
SU1272107A1 (ru) Оптический датчик угловых перемещений объекта
RU1774162C (ru) Способ определени погрешности изготовлени пр мого угла зеркально-призменных элементов
SU1379610A1 (ru) Сферометр
JPH0610615B2 (ja) 多方向距離測定装置
JPH0424424Y2 (fr)
SU1516777A1 (ru) Способ контрол фотоэлектрических автоколлиматоров
JPH0425611Y2 (fr)