JPH0481049U - - Google Patents
Info
- Publication number
- JPH0481049U JPH0481049U JP12482490U JP12482490U JPH0481049U JP H0481049 U JPH0481049 U JP H0481049U JP 12482490 U JP12482490 U JP 12482490U JP 12482490 U JP12482490 U JP 12482490U JP H0481049 U JPH0481049 U JP H0481049U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- insulator
- gas sensor
- covered
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は、従来構造のガスセンサのヒータの概
略断面図である。第２図は、本考案の一実施例を
説明するための構成概略図であり、第３図は、半
導体式ガスセンサを用いてヒータ面をガラスで覆
つた構成概略図である。第４図は、５０℃から０
℃への急激な雰囲気温度変化に伴う絶縁物形成セ
ンサ、絶縁物非形成センサの温度変化を示した図
である。第５図は、絶縁管にコイルヒータを挿入
したガスセンサを用いてコイルヒータ挿入部を絶
縁物で覆つた概略構成図である。
１……ヒータ、２……絶縁基板、３……感ガス
部、４……ヒータ線、５……絶縁物、６……電極
、７……酸化物半導体膜層、８……コイルヒータ
、９……絶縁管、１０……貴金属線。
FIG. 1 is a schematic sectional view of a heater of a gas sensor having a conventional structure. FIG. 2 is a schematic diagram for explaining an embodiment of the present invention, and FIG. 3 is a schematic diagram of a heater surface covered with glass using a semiconductor gas sensor. Figure 4 shows the temperature range from 50℃ to 0℃.
FIG. 2 is a diagram showing temperature changes of an insulator-formed sensor and an insulator-non-formed sensor due to a sudden change in ambient temperature to .degree. FIG. 5 is a schematic configuration diagram in which a gas sensor is used in which a coil heater is inserted into an insulating tube, and the coil heater insertion part is covered with an insulator. DESCRIPTION OF SYMBOLS 1... Heater, 2... Insulating substrate, 3... Gas sensitive part, 4... Heater wire, 5... Insulator, 6... Electrode, 7... Oxide semiconductor film layer, 8... Coil heater, 9...Insulated tube, 10...Precious metal wire.
Claims (1)
タ１面を絶縁物５で覆うことを特徴とするガスセ
ンサ。 A gas sensor characterized in that, in a gas detection element having a heater 1, a surface of the heater 1 is covered with an insulator 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12482490U JPH0481049U (en) | 1990-11-26 | 1990-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12482490U JPH0481049U (en) | 1990-11-26 | 1990-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0481049U true JPH0481049U (en) | 1992-07-15 |
Family
ID=31872454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12482490U Pending JPH0481049U (en) | 1990-11-26 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0481049U (en) |
-
1990
- 1990-11-26 JP JP12482490U patent/JPH0481049U/ja active Pending
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