JPH0415057U - - Google Patents
Info
- Publication number
- JPH0415057U JPH0415057U JP5429090U JP5429090U JPH0415057U JP H0415057 U JPH0415057 U JP H0415057U JP 5429090 U JP5429090 U JP 5429090U JP 5429090 U JP5429090 U JP 5429090U JP H0415057 U JPH0415057 U JP H0415057U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- gas detection
- resistance value
- electrodes
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 7
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は実施例に用いるガスセンサの平面図、
第２図はその−方向断面図である。第３図は
実施例の回路図、第４〜第６図は、実施例の湿度
依存性を示す特性図、第７図は実施例の温度依存
性を示す特性図である。
図において、２……耐熱絶縁基板、４……ヒー
タ、６，８，１０，１２……電極、１４……金属
酸化物半導体膜、１６……ガラスコート膜。
FIG. 1 is a plan view of the gas sensor used in the example.
FIG. 2 is a sectional view in the - direction. FIG. 3 is a circuit diagram of the embodiment, FIGS. 4 to 6 are characteristic diagrams showing the humidity dependence of the embodiment, and FIG. 7 is a characteristic diagram showing the temperature dependence of the embodiment. In the figure, 2... heat-resistant insulating substrate, 4... heater, 6, 8, 10, 12... electrode, 14... metal oxide semiconductor film, 16... glass coat film.
Claims (1)
変化する金属酸化物半導体の膜に、一対の電極を
接続した第１のガス検出部と、 耐熱絶縁基板上に設けた、ガスにより抵抗値が
変化する金属酸化物半導体の膜に、一対の電極を
接続した第２のガス検出部とを設けると共に、 第２のガス検出部の金属酸化物半導体の膜には
、その周辺部に露出部を残して、電極間の領域を
ガラスコート膜で覆い、 かつ第１のガス検出部の抵抗値と、第２のガス
検出部の抵抗値との比から、ガスを検出する手段
を設けた、ガス検出装置。[Scope of Claim for Utility Model Registration] A first gas detection unit in which a pair of electrodes are connected to a metal oxide semiconductor film whose resistance value changes depending on gas, which is provided on a heat-resistant insulating substrate; A second gas detection section is provided in which a pair of electrodes are connected to the metal oxide semiconductor film whose resistance value changes depending on the gas, and the metal oxide semiconductor film of the second gas detection section includes: The area between the electrodes is covered with a glass coating film, leaving an exposed part in the periphery, and the gas is detected from the ratio of the resistance value of the first gas detection part and the resistance value of the second gas detection part. A gas detection device equipped with a means for detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5429090U JPH0415057U (en) | 1990-05-24 | 1990-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5429090U JPH0415057U (en) | 1990-05-24 | 1990-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0415057U true JPH0415057U (en) | 1992-02-06 |
Family
ID=31576222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5429090U Pending JPH0415057U (en) | 1990-05-24 | 1990-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0415057U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017156280A (en) * | 2016-03-03 | 2017-09-07 | 富士通株式会社 | Gas sensor device, gas measurement method, and gas measurement apparatus |
-
1990
- 1990-05-24 JP JP5429090U patent/JPH0415057U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017156280A (en) * | 2016-03-03 | 2017-09-07 | 富士通株式会社 | Gas sensor device, gas measurement method, and gas measurement apparatus |
| US10495595B2 (en) | 2016-03-03 | 2019-12-03 | Fujitsu Limited | Gas sensor device, gas measurement method, and gas measurement device |
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