JPH03113169U - - Google Patents
Info
- Publication number
- JPH03113169U JPH03113169U JP2165790U JP2165790U JPH03113169U JP H03113169 U JPH03113169 U JP H03113169U JP 2165790 U JP2165790 U JP 2165790U JP 2165790 U JP2165790 U JP 2165790U JP H03113169 U JPH03113169 U JP H03113169U
- Authority
- JP
- Japan
- Prior art keywords
- chlorine
- temperature
- detects
- water
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 10
- 229910052801 chlorine Inorganic materials 0.000 claims description 10
- 239000000460 chlorine Substances 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は、従来の半導体式塩素センサの応答波
形を示す図である。第２図は、半導体式塩素セン
サの感ガス部の温度を変化させた場合の感ガス部
の抵抗値変化を示す図である。第３図は、半導体
式塩素センサの動作回路の構成図である。第４図
は、半導体式塩素センサの概略断面図である。第
５図は、半導体式塩素センサに第２図で示した動
作回路を用いた場合の塩素水濃度とセンサ出力検
出回路の出力との測定結果を示す図である。
１……アルミナ基板、２……電極、３……半導
体薄膜層、４……ヒータ。
FIG. 1 is a diagram showing a response waveform of a conventional semiconductor type chlorine sensor. FIG. 2 is a diagram showing a change in the resistance value of the gas sensing section when the temperature of the gas sensing section of the semiconductor chlorine sensor is changed. FIG. 3 is a configuration diagram of an operating circuit of a semiconductor type chlorine sensor. FIG. 4 is a schematic cross-sectional view of a semiconductor type chlorine sensor. FIG. 5 is a diagram showing measurement results of the chlorine water concentration and the output of the sensor output detection circuit when the operating circuit shown in FIG. 2 is used in a semiconductor type chlorine sensor. 1... Alumina substrate, 2... Electrode, 3... Semiconductor thin film layer, 4... Heater.
Claims (1)
残留塩素濃度を検知する半導体式塩素センサにお
いて、センサ素子の温度を塩素検知温度と、感ガ
ス部を浄化する温度に設定する温度制御回路を具
備し、感ガス部の抵抗値変化の積分値を検出する
センサ出力検出回路を備えたことを特徴とする水
質検知器。 A semiconductor chlorine sensor that detects vaporized chlorine from water and detects the concentration of free residual chlorine in the water, is equipped with a temperature control circuit that sets the temperature of the sensor element to the chlorine detection temperature and the temperature that purifies the gas-sensitive part. A water quality detector characterized in that it is equipped with a sensor output detection circuit that detects an integral value of a change in resistance value of a gas sensing section.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2165790U JPH03113169U (en) | 1990-03-03 | 1990-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2165790U JPH03113169U (en) | 1990-03-03 | 1990-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03113169U true JPH03113169U (en) | 1991-11-19 |
Family
ID=31524693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2165790U Pending JPH03113169U (en) | 1990-03-03 | 1990-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03113169U (en) |
-
1990
- 1990-03-03 JP JP2165790U patent/JPH03113169U/ja active Pending