JPH0257027U - - Google Patents
Info
- Publication number
- JPH0257027U JPH0257027U JP13504688U JP13504688U JPH0257027U JP H0257027 U JPH0257027 U JP H0257027U JP 13504688 U JP13504688 U JP 13504688U JP 13504688 U JP13504688 U JP 13504688U JP H0257027 U JPH0257027 U JP H0257027U
- Authority
- JP
- Japan
- Prior art keywords
- flow sensor
- semiconductor base
- temperature
- microbridge
- measuring resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
第１図ａ，ｂは本考案によるマイクロブリツジ
フローセンサの一実施例を示す斜視図、そのＢ―
Ｂ′線断面図、第２図は本考案によるマイクロブ
リツジフローセンサの他の実施例を示す斜視図、
第３図ａ，ｂ，ｃは従来のマイクロブリツジフロ
ーセンサの構成を説明する斜視図、そのＢ―Ｂ′
線断面図、電圧出力に対する流速の関係を示す特
性図、第４図は従来および本考案の流量に対する
出力差の関係を示す特性図である。
１……半導体基台、２，３……開口、４……貫
通孔、５……橋絡部、６……保護膜、７……ヒー
タエレメント、８，９……測温抵抗エレメント、
１１，１１′……矢印、１２，１３……橋絡部、
１４，１５……測温抵抗エレメント。
Figures 1a and 1b are perspective views showing an embodiment of the micro bridge flow sensor according to the present invention;
2 is a perspective view showing another embodiment of the micro bridge flow sensor according to the present invention;
Figures 3a, b, and c are perspective views illustrating the configuration of a conventional microbridge flow sensor;
A line sectional view, a characteristic diagram showing the relationship between the flow velocity and the voltage output, and FIG. 4 are a characteristic diagram showing the relationship between the output difference and the flow rate in the conventional and the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor base, 2, 3... Opening, 4... Through hole, 5... Bridge portion, 6... Protective film, 7... Heater element, 8, 9... Temperature measuring resistance element,
11, 11'...arrow, 12, 13...bridge section,
14, 15... Temperature measuring resistance element.
補正 平２．１．１８
図面の簡単な説明を次のように補正する。
明細書７頁１０〜１１行の「本考案による〜を
示す斜視図」を「本考案の電圧出力に対する流速
の関係を示す特性図」と補正する。
明細書７頁１４〜１６行の「特性図、第４図は
〜特性図である。」を「特性図である。」と補正
する。Amendment Hei 2.1.18 The brief description of the drawing is amended as follows. ``Perspective view showing ~ according to the present invention'' on page 7, lines 10-11 of the specification is corrected to ``characteristic diagram showing the relationship between the flow velocity and the voltage output of the present invention''. The phrase "Characteristics diagram, FIG.
Claims (1)
離隔して一体形成される橋絡部を有して左右の開
口部を連通する貫通孔が設けられ、該橋絡部の表
面に熱的に絶縁された発熱体および測温抵抗体か
らなる検出部が形成され、該測温抵抗体の抵抗値
変化から流速を検出するマイクロブリツジフロー
センサにおいて、前記左右の開口部上に橋絡部を
一体形成し、該橋絡部の表面にそれぞれ測温抵抗
体を設けたことを特徴とするマイクロブリツジフ
ローセンサ。 A through hole is provided on the surface of the semiconductor base and has a bridge part formed integrally with the semiconductor base and is spatially separated from the semiconductor base, and communicates the left and right openings. In the microbridge flow sensor, a detection section is formed of a heating element and a temperature-measuring resistor which are insulated from each other, and the flow velocity is detected from a change in the resistance value of the temperature-measuring resistor. What is claimed is: 1. A microbridge flow sensor, characterized in that a microbridge flow sensor is integrally formed with a temperature sensing resistor on the surface of each bridge portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504688U JPH0612493Y2 (en) | 1988-10-18 | 1988-10-18 | Micro bridge flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13504688U JPH0612493Y2 (en) | 1988-10-18 | 1988-10-18 | Micro bridge flow sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0257027U true JPH0257027U (en) | 1990-04-25 |
| JPH0612493Y2 JPH0612493Y2 (en) | 1994-03-30 |
Family
ID=31394334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13504688U Expired - Lifetime JPH0612493Y2 (en) | 1988-10-18 | 1988-10-18 | Micro bridge flow sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612493Y2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361271A (en) * | 2003-06-05 | 2004-12-24 | Hitachi Ltd | Thermal type air flowmeter |
| JP2006017724A (en) * | 2004-06-30 | 2006-01-19 | Codman & Shurtleff Inc | Asymmetrically designed thermal flow sensor |
| JP2017044637A (en) * | 2015-08-28 | 2017-03-02 | 株式会社デンソー | Flow sensor |
-
1988
- 1988-10-18 JP JP13504688U patent/JPH0612493Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361271A (en) * | 2003-06-05 | 2004-12-24 | Hitachi Ltd | Thermal type air flowmeter |
| JP2006017724A (en) * | 2004-06-30 | 2006-01-19 | Codman & Shurtleff Inc | Asymmetrically designed thermal flow sensor |
| JP2017044637A (en) * | 2015-08-28 | 2017-03-02 | 株式会社デンソー | Flow sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0612493Y2 (en) | 1994-03-30 |