JPH03109059U

JPH03109059U -

Info

Publication number: JPH03109059U
Application number: JP1468290U
Authority: JP
Priority date: 1990-02-19
Filing date: 1990-02-19
Publication date: 1991-11-08
Anticipated expiration: 2004-11-24
Also published as: JPH0645896Y2

Description

[Brief explanation of drawings]

第１図は本考案による加速度計の一実施例を示
す概略構成図、第２図は第１図の検出部５，６お
よび比較回路７を含む具体的な回路を示す回路図
、第３図はマイクロブリツジフローセンサ２の具
体的な外観を示す斜視図、第４図〜第６図は第１
図のハウジングの他の実施例を示す断面図である
。１……ハウジング、１ａ，１ｂ……導通孔、１
ｃ……絞り部、１ｄ……壁、１ｅ……迂回路、２
……マイクロブリツジフローセンサ、３，４……
回路部、５，６……検出部、７……比較回路、８
……演算回路、１１，１２……測温抵抗エレメン
ト、１３，１４……固定抵抗、１５……ホイート
ストンブリツジ回路、１６……作動増幅器、１７
，１８……測温抵抗エレメント、１９，２０……
固定抵抗、２１……ホイートストンブリツジ回路
、２２……作動増幅器、３１……シリコン基板、
３２，３３……窓、３４……ブリツジ部、３５…
…ヒータエレメント。 FIG. 1 is a schematic configuration diagram showing an embodiment of an accelerometer according to the present invention, FIG. 2 is a circuit diagram showing a specific circuit including the detection units 5, 6 and comparison circuit 7 of FIG. 1, and FIG. is a perspective view showing the specific appearance of the microbridge flow sensor 2, and FIGS.
FIG. 7 is a sectional view showing another embodiment of the illustrated housing. 1...Housing, 1a, 1b...Conducting hole, 1
c...Aperture part, 1d...Wall, 1e...Detour, 2
...Microbridge flow sensor, 3,4...
Circuit section, 5, 6...Detection section, 7...Comparison circuit, 8
... Arithmetic circuit, 11, 12 ... Temperature measuring resistance element, 13, 14 ... Fixed resistance, 15 ... Wheatstone bridge circuit, 16 ... Operational amplifier, 17
, 18... Temperature measuring resistance element, 19, 20...
Fixed resistor, 21... Wheatstone bridge circuit, 22... operational amplifier, 31... silicon substrate,
32, 33...window, 34...bridge, 35...
...heater element.

補正平３．５．１７考案の名称を次のように補正する。考案の名称加速度計実用新案登録請求の範囲、図面の簡単な説明を
次のように補正する。Amendment 3.5.17 The name of the invention is amended as follows. Title of the invention: Accelerometer The scope of the claim for utility model registration and the brief description of the drawings are amended as follows.

【実用新案登録請求の範囲】加速度方向にその長手方向が一致するように配
置された概ね密閉状の中空ハウジングと、この中空ハウジングの両端測の上面にそれぞれ
形成された導通孔と、前記中空ハウジング内の各導通孔の間のほぼ中
央部に配置され、中空ハウジング内を流れる空気
の流速を測定するフローセンサと、このフローセンサの検出出力から予め定められ
た関係に基づいて加速度をする算出する手段とを備えたことを特徴とする加速度計。[Claims for Utility Model Registration] A generally sealed hollow housing arranged so that its longitudinal direction coincides with the acceleration direction, a conductive hole formed on the upper surface of both ends of the hollow housing, and the hollow housing. Based on a predetermined relationship based on the detection output of this flow sensor and the flow sensor that is placed approximately in the center between each conduction hole in the hollow housing and measures the flow velocity of the air flowing inside the hollow housing. An accelerometer comprising means for calculating acceleration.

【図面の簡単な説明】第１図は本考案による加速度計の一実施例を示
す概略構成図、第２図はフローセンサ２の具体的
な外観を示す斜視図、第３図および第４図は第１
図のハウジングのそれぞれ他の実施例を示す断面
図である。１……ハウジング、１ａ，１ｂ……導通孔、１
ｃ……絞り部、１ｄ……壁、１ｅ……迂回路、２
……フローセンサ、３……検出回路、８……演算
回路、１１，１７……測音抵抗エレメント、３１
……シリコン基板、３５……ヒータエレメント。[Brief Description of the Drawings] Fig. 1 is a schematic configuration diagram showing an embodiment of an accelerometer according to the present invention, Fig. 2 is a perspective view showing a specific appearance of the flow sensor 2, and Figs. 3 and 4. is the first
FIG. 6 is a cross-sectional view showing other embodiments of the illustrated housing; 1...Housing, 1a, 1b...Conducting hole, 1
c...Aperture part, 1d...Wall, 1e...Detour, 2
...Flow sensor, 3...Detection circuit, 8...Arithmetic circuit, 11, 17...Sound measuring resistance element, 31
...Silicon substrate, 35...Heater element.

Claims

[Scope of utility model registration request]

a hollow housing provided with gas conduction holes at both ends; a flow sensor for detecting flow velocity disposed approximately in the center of the hollow housing;
An accelerometer comprising means for calculating acceleration based on a predetermined relationship from the detection output of the flow sensor.