JPS6246364U - - Google Patents
Info
- Publication number
- JPS6246364U JPS6246364U JP11220886U JP11220886U JPS6246364U JP S6246364 U JPS6246364 U JP S6246364U JP 11220886 U JP11220886 U JP 11220886U JP 11220886 U JP11220886 U JP 11220886U JP S6246364 U JPS6246364 U JP S6246364U
- Authority
- JP
- Japan
- Prior art keywords
- thermal conductivity
- wheatstone bridge
- detection elements
- conductivity detector
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Description
第１図は熱伝導度検出器の従来例の回路説明図
、第２図は本考案の実施例の回路説明図、第３図
は本考案に係る検出素子周辺部の一実施例を示す
平面図および側面図、第４図は本考案に係る検出
素子周辺部の他の実施例を示す平面図および側面
図である。
１……定電流電源、４ａ，４ｂ，４ｃ，４ｄ…
…タングステンフイラメント、５，６，８……差
動増幅器、７……可変電圧電源、９……２乗演算
器、１０ａ，１０ｂ，１０ｃ，１０ｄ，２３……
検出素子、１１ａ，１１ｂ，２２……ヒータ素子
、１２，１５……定電圧電源、１４……可変抵抗
器、２１……基板、２４ａ，２４ｂ，２５ａ，２
５ｂ……接続端子、２６……ヒートシンク。
Fig. 1 is a circuit explanatory diagram of a conventional example of a thermal conductivity detector, Fig. 2 is a circuit explanatory diagram of an embodiment of the present invention, and Fig. 3 is a plan view showing an embodiment of the peripheral part of a detection element according to the present invention. FIG. 4 is a plan view and a side view showing another embodiment of the peripheral portion of the detection element according to the present invention. 1... Constant current power supply, 4a, 4b, 4c, 4d...
...Tungsten filament, 5, 6, 8...Differential amplifier, 7...Variable voltage power supply, 9...Square calculator, 10a, 10b, 10c, 10d, 23...
Detection element, 11a, 11b, 22... Heater element, 12, 15... Constant voltage power supply, 14... Variable resistor, 21... Substrate, 24a, 24b, 25a, 2
5b... Connection terminal, 26... Heat sink.
Claims (1)
ーンブリツジの第１の対辺を構成する第１および
第３の検出素子と、前記ホイートストーンブリツ
ジの第２の対辺を構成するとともにヒータ抵抗が
近接して設けられている第２および第４の検出素
子と、前記ホイートストーンブリツジに供電する
手段と、前記ホイートストーンブリツジの出力電
圧に応じて前記第２および第４の検出素子のヒー
タ抵抗に供電し前記ホイートストーンブリツジを
平衡させる手段と、前記ヒータへの供電に基ずい
て被測定ガスの熱伝導度を求める手段とを具備す
る熱伝導度検出器において、前記第１乃至第４の
検出素子が、熱伝導性のよいヒートシンクに搭載
された絶縁基板上に形成され且つ抵抗温度係数の
大きい薄膜抵抗からなることを特徴とする熱伝導
度検出器。 (2) 前記第２および第４の検出素子は、薄膜抵
抗とヒータ抵抗が絶縁被膜を介して積層されてい
ることを特徴とする実用新案登録請求の範囲第(1
)項記載の熱伝導度検出器。[Claims for Utility Model Registration] (1) First and third detection elements that are placed in the gas flow path for comparison and constitute the first opposite side of the Wheatstone bridge, and the Wheatstone bridge second and fourth sensing elements constituting a second opposite side of the circuit and having heater resistors provided adjacent to each other; means for supplying power to the Wheatstone bridge; and an output voltage of the Wheatstone bridge. means for balancing the Wheatstone bridge by supplying power to the heater resistors of the second and fourth detection elements in accordance with the above; and means for determining the thermal conductivity of the gas to be measured based on the supply of power to the heaters; In the thermal conductivity detector, the first to fourth detection elements are formed on an insulating substrate mounted on a heat sink with good thermal conductivity, and are made of thin film resistors with a large temperature coefficient of resistance. Thermal conductivity detector. (2) The second and fourth detection elements are characterized in that a thin film resistor and a heater resistor are laminated with an insulating film interposed therebetween.
The thermal conductivity detector described in ).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986112208U JPH0318935Y2 (en) | 1986-07-22 | 1986-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986112208U JPH0318935Y2 (en) | 1986-07-22 | 1986-07-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6246364U true JPS6246364U (en) | 1987-03-20 |
| JPH0318935Y2 JPH0318935Y2 (en) | 1991-04-22 |
Family
ID=30992864
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986112208U Expired JPH0318935Y2 (en) | 1986-07-22 | 1986-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318935Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230591A (en) * | 2009-03-27 | 2010-10-14 | Horiba Ltd | Thermal conductivity sensor |
| WO2017154059A1 (en) * | 2016-03-07 | 2017-09-14 | 株式会社島津製作所 | Thermal conductivity detector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492788A (en) * | 1977-12-30 | 1979-07-23 | Weber Guenther | Device for measuring heat transfer |
-
1986
- 1986-07-22 JP JP1986112208U patent/JPH0318935Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5492788A (en) * | 1977-12-30 | 1979-07-23 | Weber Guenther | Device for measuring heat transfer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010230591A (en) * | 2009-03-27 | 2010-10-14 | Horiba Ltd | Thermal conductivity sensor |
| WO2017154059A1 (en) * | 2016-03-07 | 2017-09-14 | 株式会社島津製作所 | Thermal conductivity detector |
| US11454598B2 (en) | 2016-03-07 | 2022-09-27 | Shimadzu Corporation | Thermal conductivity detector |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0318935Y2 (en) | 1991-04-22 |
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