JPS6375857U - - Google Patents

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Publication number
JPS6375857U
JPS6375857U JP1986170831U JP17083186U JPS6375857U JP S6375857 U JPS6375857 U JP S6375857U JP 1986170831 U JP1986170831 U JP 1986170831U JP 17083186 U JP17083186 U JP 17083186U JP S6375857 U JPS6375857 U JP S6375857U
Authority
JP
Japan
Prior art keywords
thin film
gas sensor
metal oxide
sno2
insulating metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986170831U
Other languages
Japanese (ja)
Other versions
JPH0634680Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986170831U priority Critical patent/JPH0634680Y2/en
Priority to KR1019870012099A priority patent/KR960016712B1/en
Priority to FR878715196A priority patent/FR2606150B1/en
Priority to CA000551002A priority patent/CA1292298C/en
Priority to GB8725989A priority patent/GB2198240B/en
Priority to US07/116,986 priority patent/US4897628A/en
Publication of JPS6375857U publication Critical patent/JPS6375857U/ja
Application granted granted Critical
Publication of JPH0634680Y2 publication Critical patent/JPH0634680Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案に係る可燃性ガスセンサーの
一例の概要を示す断面図、第２図は、比較例１で
得られたガスセンサーによるガス検知結果を示す
グラフ、第３図は、実施例１で得られたガスセン
サーによるガス検知結果を示すグラフである。 １…基板、３…ＳｎＯ２薄膜半導体層、５…電
極、７…絶縁性金属酸化物薄膜。 FIG. 1 is a cross-sectional view showing an overview of an example of the combustible gas sensor according to the present invention, FIG. 2 is a graph showing the gas detection results by the gas sensor obtained in Comparative Example 1, and FIG. 3 is a graph showing gas detection results by the gas sensor obtained in Example 1. DESCRIPTION OF SYMBOLS 1... Substrate, 3... SnO 2 thin film semiconductor layer, 5... Electrode, 7... Insulating metal oxide thin film.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ＳｎＯ２からなるｎ型半導体薄膜上に絶縁性金
属酸化物薄膜を備えたことを特徴とする可燃性ガ
スセンサー。 A flammable gas sensor comprising an insulating metal oxide thin film on an n-type semiconductor thin film made of SnO2 .
JP1986170831U 1986-11-05 1986-11-05 Combustible gas sensor Expired - Lifetime JPH0634680Y2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP1986170831U JPH0634680Y2 (en) 1986-11-05 1986-11-05 Combustible gas sensor
KR1019870012099A KR960016712B1 (en) 1986-11-05 1987-10-30 Gas sensor and method of manufacturing the same
FR878715196A FR2606150B1 (en) 1986-11-05 1987-11-03 GAS DETECTOR AND METHOD FOR MANUFACTURING THE SAME
CA000551002A CA1292298C (en) 1986-11-05 1987-11-04 Gas sensor and method of manufacturing the same
GB8725989A GB2198240B (en) 1986-11-05 1987-11-05 Gas sensor and method of manufacture thereof
US07/116,986 US4897628A (en) 1986-11-05 1987-11-05 Gas sensor and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986170831U JPH0634680Y2 (en) 1986-11-05 1986-11-05 Combustible gas sensor

Publications (2)

Publication Number Publication Date
JPS6375857U true JPS6375857U (en) 1988-05-20
JPH0634680Y2 JPH0634680Y2 (en) 1994-09-07

Family

ID=31105904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986170831U Expired - Lifetime JPH0634680Y2 (en) 1986-11-05 1986-11-05 Combustible gas sensor

Country Status (1)

Country Link
JP (1) JPH0634680Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010054205A (en) * 2008-08-26 2010-03-11 Tottori Univ Gas sensor, method of manufacturing sensor element, and gas detecting method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58221154A (en) * 1982-06-18 1983-12-22 Hitachi Ltd Gas sensor element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58221154A (en) * 1982-06-18 1983-12-22 Hitachi Ltd Gas sensor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010054205A (en) * 2008-08-26 2010-03-11 Tottori Univ Gas sensor, method of manufacturing sensor element, and gas detecting method

Also Published As

Publication number Publication date
JPH0634680Y2 (en) 1994-09-07

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