JPH0480349B2 - - Google Patents
Info
- Publication number
- JPH0480349B2 JPH0480349B2 JP58105715A JP10571583A JPH0480349B2 JP H0480349 B2 JPH0480349 B2 JP H0480349B2 JP 58105715 A JP58105715 A JP 58105715A JP 10571583 A JP10571583 A JP 10571583A JP H0480349 B2 JPH0480349 B2 JP H0480349B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- external connection
- test
- connection terminal
- electrostatic breakdown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012360 testing method Methods 0.000 claims description 33
- 239000004065 semiconductor Substances 0.000 claims description 29
- 230000015556 catabolic process Effects 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 238000010998 test method Methods 0.000 claims description 9
- 230000006378 damage Effects 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
- G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58105715A JPS59231458A (ja) | 1983-06-15 | 1983-06-15 | 半導体装置の静電破壊試験方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58105715A JPS59231458A (ja) | 1983-06-15 | 1983-06-15 | 半導体装置の静電破壊試験方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2155227A Division JPH0315773A (ja) | 1990-06-15 | 1990-06-15 | 半導体装置用静電破壊試験装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS59231458A JPS59231458A (ja) | 1984-12-26 |
JPH0480349B2 true JPH0480349B2 (ko) | 1992-12-18 |
Family
ID=14415028
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58105715A Granted JPS59231458A (ja) | 1983-06-15 | 1983-06-15 | 半導体装置の静電破壊試験方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59231458A (ko) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6073375A (ja) * | 1983-09-30 | 1985-04-25 | Oki Electric Ind Co Ltd | 半導体装置の試験方法 |
JPS62145170U (ko) * | 1986-03-07 | 1987-09-12 | ||
JPH0711556B2 (ja) * | 1986-04-11 | 1995-02-08 | 沖電気工業株式会社 | 静電耐圧試験方法及びその装置 |
US4806857A (en) * | 1986-04-11 | 1989-02-21 | Oki Electric Industry Co., Ltd. | Apparatus for testing semiconductor devices |
JP2572816B2 (ja) * | 1988-06-10 | 1997-01-16 | 株式会社日立製作所 | 静電破壊試験装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5780577A (en) * | 1980-11-06 | 1982-05-20 | Mitsubishi Electric Corp | Testing method of semiconductor |
-
1983
- 1983-06-15 JP JP58105715A patent/JPS59231458A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5780577A (en) * | 1980-11-06 | 1982-05-20 | Mitsubishi Electric Corp | Testing method of semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPS59231458A (ja) | 1984-12-26 |
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