JPH0478947B2 - - Google Patents
Info
- Publication number
- JPH0478947B2 JPH0478947B2 JP62131330A JP13133087A JPH0478947B2 JP H0478947 B2 JPH0478947 B2 JP H0478947B2 JP 62131330 A JP62131330 A JP 62131330A JP 13133087 A JP13133087 A JP 13133087A JP H0478947 B2 JPH0478947 B2 JP H0478947B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- sensor
- pressure
- rate
- airtight container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007789 gas Substances 0.000 claims description 49
- 239000001307 helium Substances 0.000 claims description 14
- 229910052734 helium Inorganic materials 0.000 claims description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 13
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 230000003321 amplification Effects 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62131330A JPS63298068A (ja) | 1987-05-29 | 1987-05-29 | ガスレ−トセンサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62131330A JPS63298068A (ja) | 1987-05-29 | 1987-05-29 | ガスレ−トセンサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63298068A JPS63298068A (ja) | 1988-12-05 |
| JPH0478947B2 true JPH0478947B2 (enrdf_load_stackoverflow) | 1992-12-14 |
Family
ID=15055424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62131330A Granted JPS63298068A (ja) | 1987-05-29 | 1987-05-29 | ガスレ−トセンサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63298068A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5719333A (en) * | 1994-01-20 | 1998-02-17 | Honda Giken Kogyo Kabushiki Kaisha | Acceleration sensor |
| JP3244208B2 (ja) * | 1994-02-07 | 2002-01-07 | 本田技研工業株式会社 | ガスレート検出器 |
| US5786744A (en) * | 1994-03-24 | 1998-07-28 | Honda Giken Kogyo Kabushiki Kaisha | Hybrid sensor |
| JP3281169B2 (ja) * | 1994-03-24 | 2002-05-13 | 本田技研工業株式会社 | 多軸型ガスレートセンサ |
-
1987
- 1987-05-29 JP JP62131330A patent/JPS63298068A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63298068A (ja) | 1988-12-05 |
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