JPH0477323B2 - - Google Patents
Info
- Publication number
- JPH0477323B2 JPH0477323B2 JP59112085A JP11208584A JPH0477323B2 JP H0477323 B2 JPH0477323 B2 JP H0477323B2 JP 59112085 A JP59112085 A JP 59112085A JP 11208584 A JP11208584 A JP 11208584A JP H0477323 B2 JPH0477323 B2 JP H0477323B2
- Authority
- JP
- Japan
- Prior art keywords
- drive
- shaft
- displacement
- piezoelectric
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59112085A JPS60256814A (ja) | 1984-05-31 | 1984-05-31 | 微小変位駆動装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59112085A JPS60256814A (ja) | 1984-05-31 | 1984-05-31 | 微小変位駆動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60256814A JPS60256814A (ja) | 1985-12-18 |
JPH0477323B2 true JPH0477323B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-12-08 |
Family
ID=14577710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59112085A Granted JPS60256814A (ja) | 1984-05-31 | 1984-05-31 | 微小変位駆動装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60256814A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2510486B2 (ja) * | 1984-06-29 | 1996-06-26 | キヤノン株式会社 | 圧電装置 |
JPS62216677A (ja) * | 1986-03-18 | 1987-09-24 | 神鋼電機株式会社 | 楕円振動機 |
JPS63294271A (ja) * | 1987-05-22 | 1988-11-30 | Nec Corp | 超音波モ−タ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5814379A (ja) * | 1981-07-20 | 1983-01-27 | Toshiba Corp | 偏向ア−ム装置 |
JPS5958811U (ja) * | 1982-10-04 | 1984-04-17 | ソニー株式会社 | 微小移動位置決め装置 |
-
1984
- 1984-05-31 JP JP59112085A patent/JPS60256814A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60256814A (ja) | 1985-12-18 |