JPH0477323B2 - - Google Patents
Info
- Publication number
- JPH0477323B2 JPH0477323B2 JP59112085A JP11208584A JPH0477323B2 JP H0477323 B2 JPH0477323 B2 JP H0477323B2 JP 59112085 A JP59112085 A JP 59112085A JP 11208584 A JP11208584 A JP 11208584A JP H0477323 B2 JPH0477323 B2 JP H0477323B2
- Authority
- JP
- Japan
- Prior art keywords
- drive
- shaft
- displacement
- piezoelectric
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000005452 bending Methods 0.000 description 4
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001875 Ebonite Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Control Of Position Or Direction (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】
〔発明の利用分野〕
この発明は微小変位駆動装置に係り、特に精密
位置決めテーブルやロボツト等と組合せ得る微小
変位駆動装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a minute displacement drive device, and more particularly to a minute displacement drive device that can be combined with a precision positioning table, a robot, or the like.
微小位置決めなど微小な変位を正確に実行する
ことは、例えば半導体ウエハ乃至はペレツト上で
の作業において要求され、近年その精度は増々高
いものが要求されるに至つている。
Accurate execution of minute displacements such as minute positioning is required, for example, when working on semiconductor wafers or pellets, and in recent years, higher and higher precision has been required.
この種の位置決めテーブルは、例えば２台の駆
動装置でｘ−ｙ二軸のそれぞれを駆動し、ｘ−ｙ
座標上の任意の点への位置決めを達成する様にし
ている。 This type of positioning table uses two drive devices to drive each of the x-y axes, and
It is designed to achieve positioning at any point on the coordinates.
しかし、従来の位置決めテーブルは、例えばネ
ジ加工した軸をサーボモータやステツプモータな
どで指示角度だけ回転させて、所望の移動を行う
ものである。 However, conventional positioning tables perform desired movements by rotating a threaded shaft by a specified angle using a servo motor, a step motor, or the like.
この場合、送り量が５ミクロン以下の微小領域
に近づいてくると、モータによる機械的機構によ
つて変位を行つているため、精度が悪くなる欠点
があつた。 In this case, when the feed amount approaches a minute region of 5 microns or less, the displacement is performed by a mechanical mechanism using a motor, which has the disadvantage that accuracy deteriorates.
また、主軸の最小回転角は、ネジの切り方で計
算上は小さくできても、変位量が２〜５ミクロン
程度となるといわゆるバツクラツシユが大きく影
響し、更に精度を劣化させていた。 Further, even if the minimum rotation angle of the main shaft can be calculated to be small depending on the way the thread is cut, when the displacement amount is about 2 to 5 microns, so-called backlash has a large effect, further deteriorating the accuracy.
この発明は、以上の従来技術の欠点を除去しよ
うとして成されたものであり、微小変位を精度良
く達成することのできる微小変位駆動装置を提供
することを目的とする。
The present invention has been made in an attempt to eliminate the above-mentioned drawbacks of the prior art, and an object of the present invention is to provide a micro-displacement drive device that can accurately achieve micro-displacement.
この目的を達成するため、この発明によれば、
圧電素子の圧縮、伸長、屈曲を利用し得る圧電駆
動手段を具え、前記圧縮、伸長、屈曲に従つて変
位させるべき対象を駆動する駆動シヤフトを一定
方向に所望変位させる様にする。
To achieve this objective, according to the invention:
A piezoelectric drive means capable of utilizing compression, expansion, and bending of a piezoelectric element is provided, and a drive shaft for driving an object to be displaced is displaced in a desired direction in accordance with the compression, expansion, and bending.
以下、添付図面に従つてこの発明の実施例を説
明する。尚、各図において同一の符号は同様の対
象を示す。
Embodiments of the present invention will be described below with reference to the accompanying drawings. Note that the same reference numerals in each figure indicate similar objects.
第１図〜第３図はこの発明の一実施例を示し、
第１図において、変位させるべき対象（図示せ
ず）を駆動するシヤフト４が、台板７上の支持手
段５−５（例えば、スライドベアリング）によつ
てA1−A2方向に移動可能に支持されている。 1 to 3 show an embodiment of this invention,
In FIG. 1, a shaft 4 that drives an object to be displaced (not shown) is supported movably in the A1-A2 direction by support means 5-5 (for example, a slide bearing) on a base plate 7. ing.
このシヤフト４には、台板７上の支持手段６−
６によつて支持された圧電駆動手段Ｅの一部が当
接している。 This shaft 4 is provided with support means 6- on a base plate 7.
A part of the piezoelectric drive means E supported by 6 is in abutment.
この圧電駆動手段Ｅは、互いに直行して結合さ
れたクランプ用駆動要素１と、ドライブ用の駆動
要素２とから成る。 This piezoelectric drive means E consists of a clamp drive element 1 and a drive drive element 2 which are coupled orthogonally to each other.
クランプ用駆動要素１は、弾性板１ａに圧電素
子のシート１ｂを貼付して成り、印加電圧の極性
を変えることにより、要素１の屈曲方向をY1，
Y2のいずれかに変えることができる。 The clamp driving element 1 is made up of a piezoelectric element sheet 1b attached to an elastic plate 1a, and by changing the polarity of the applied voltage, the bending direction of the element 1 can be changed to Y1,
Can be changed to either Y2.
ドライブ用駆動要素２は、第２図にその詳細を
示す様であり、基板２ａの両側に圧電素子のシー
ト２ｂ，２ｃを貼合せたバイモルフ構造とし、こ
れを並列に接続してシヤフト４のスラスト方向に
屈曲し得る様になつている。 The driving element 2 for the drive is shown in detail in FIG. 2, and has a bimorph structure in which sheets 2b and 2c of piezoelectric elements are pasted on both sides of a substrate 2a, and these are connected in parallel to drive the thrust of the shaft 4. It is designed so that it can be bent in any direction.
要素２の一端２ｄにはシヤフト４と当接させる
ための例えば硬質ゴム製のグリツプ３を取付けて
あり、他端２ｅは接着剤３′等で駆動要素１の略
中央に固着する。 A grip 3 made of, for example, hard rubber is attached to one end 2d of the element 2 for contacting the shaft 4, and the other end 2e is fixed approximately at the center of the drive element 1 with an adhesive 3' or the like.
ここで、第１図の状態では駆動手段Ｅには何ら
駆動電圧は印加されておらず、グリツプ３はシヤ
フト４にわずかに当接し又はわずかに離れてい
る。 Here, in the state shown in FIG. 1, no driving voltage is applied to the driving means E, and the grip 3 is slightly in contact with or slightly away from the shaft 4.
次に、この実施例の動作を第３図に従つて説明
する。 Next, the operation of this embodiment will be explained with reference to FIG.
先づ、クランプ用駆動要素１に電圧３２ａ（第
３図ａ）を印加し、グリツプ３がシヤフト４から
離れる方向Y2に要素１を駆動する。 First, a voltage 32a (FIG. 3a) is applied to the clamp driving element 1 to drive the element 1 in the direction Y2 in which the grip 3 moves away from the shaft 4.
次に、この状態のままでドライブ用駆動要素２
に電圧３２ｂ（第３図ｂ）を印加し左方向X2に屈
曲する様にする。 Next, in this state, drive driving element 2
A voltage 32b (FIG. 3b) is applied to it so that it bends in the left direction X2.
この後、クランプ用駆動要素１の電圧極性を逆
方向とし、電圧３３ａによつて要素２を左方向
X2に振つたままの状態を保ちつつグリツプ３を
シヤフト４に当接させる。 After this, the voltage polarity of the clamp driving element 1 is reversed, and the element 2 is moved to the left by the voltage 33a.
While keeping it swinging to X2, bring grip 3 into contact with shaft 4.
ここで、ドライブ用駆動要素２の電圧極性も前
述とは逆とし、電圧３３ｂによつて要素２を右方
向X1へ屈曲させる。 Here, the voltage polarity of the drive driving element 2 is also reversed to that described above, and the element 2 is bent in the right direction X1 by the voltage 33b.
この様に、第３図ａ，ｂの信号３２ａ−３３ａ
及び３２ｂ−３３ｂを一周期とする信号を繰返し
印加することにより、シヤフト４を右方向A1へ
所望量変位させることができる。第３図は信号の
全サイクルの途中を示すものであり、信号３１
ａ，３１ｂは信号３３ａ，３３ｂと同様の状態を
成すものである。 In this way, the signals 32a-33a in FIGS. 3a and 3b
By repeatedly applying a signal whose period is 32b-33b, the shaft 4 can be displaced by a desired amount in the right direction A1. FIG. 3 shows the middle of a complete cycle of the signal, and the signal 31
The signals a and 31b are in the same state as the signals 33a and 33b.
尚、第３図ａの信号に対して、同図ｂの極性を
図示とは逆にすれば、シヤフト４は左方向A2へ
変位させることができるのはもちろんのことであ
る。 It goes without saying that if the polarity of the signal shown in FIG. 3b is reversed from that shown in FIG. 3 with respect to the signal shown in FIG. 3a, the shaft 4 can be displaced in the left direction A2.
また、変位速度は、第３図の電圧値ならびに一
周期の所要時間とを調節することにより任意のも
のとすることができる。 Further, the displacement speed can be made arbitrary by adjusting the voltage value and the time required for one cycle shown in FIG.
ここで、圧電素子に印加する電圧と屈曲による
変位との関係は線形的な部分を選定することがで
き、またこの変位は微小なものであるため、この
実施例によれば、微小で正確な変位が可能とな
る。 Here, the relationship between the voltage applied to the piezoelectric element and the displacement due to bending can be selected to be linear, and since this displacement is minute, according to this embodiment, it is possible to displacement is possible.
尚、圧電駆動手段Ｅをシヤフト４に関して互い
に対向する様に少くとも一対設け、双方を同相で
駆動する様にすることにより、より大きい負荷に
対して精度良く変位を実行することができる。 Incidentally, by providing at least a pair of piezoelectric driving means E so as to face each other with respect to the shaft 4 and driving both of them in the same phase, it is possible to accurately perform displacement for a larger load.
また、シヤフト４に関して互いに対向する１組
の圧電駆動手段を複数組設け、互いに位相をずら
せて駆動することにより、各手段の配列に従つて
順送りが可能であり、変位速度を上げることがで
きる。 Further, by providing a plurality of pairs of piezoelectric drive means facing each other on the shaft 4 and driving them out of phase with each other, sequential feeding is possible according to the arrangement of each means, and the displacement speed can be increased.
この発明によれば、以上の様な構成とすること
により、圧電素子の特性を生かして、微小な変位
を精度良く達成することができ、しかも小型で消
費電力の少い微小変位駆動装置を提供することが
できる。
According to the present invention, by having the above-described configuration, it is possible to accurately achieve minute displacements by taking advantage of the characteristics of the piezoelectric element, and to provide a minute displacement drive device that is small and consumes little power. can do.
また、ロボツトアーム等と組合せることによ
り、高精度な自動装置を製造できることが期待さ
れる。 It is also expected that by combining it with a robot arm or the like, it will be possible to manufacture highly accurate automatic equipment.
第１図はこの発明の実施例の平面図、第２図は
第１図の要部を示す斜視図、第３図は第１図の装
置の駆動信号波形図である。
１，２……駆動要素、３……グリツプ、４……
駆動シヤフト、５，６……支持手段、７……台
板。
FIG. 1 is a plan view of an embodiment of the invention, FIG. 2 is a perspective view showing the main parts of FIG. 1, and FIG. 3 is a drive signal waveform diagram of the device shown in FIG. 1. 1, 2... Drive element, 3... Grip, 4...
Drive shaft, 5, 6... Support means, 7... Base plate.
Claims (1)
トと、この移動シヤフトの長さ方向と直角な方向
に屈曲動作する圧電素子でなるクランプ用駆動要
素と、このクランプ用駆動要素に直交結合され先
端に前記駆動シヤフトに当接するグリツプを有し
て前記駆動シヤフトの長さ方向に屈曲動作する圧
電バイモルフでなるドライブ用駆動要素とを備え
てなる微小変位駆動装置。1 A drive shaft supported movably in a uniaxial direction, a clamp drive element made of a piezoelectric element that bends in a direction perpendicular to the length direction of the moving shaft, and a clamp drive element that is orthogonally coupled to the clamp drive element and has a distal end. A micro-displacement drive device comprising: a drive element made of a piezoelectric bimorph that has a grip that contacts the drive shaft and bends in the longitudinal direction of the drive shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112085A JPS60256814A (en) | 1984-05-31 | 1984-05-31 | Minute displacement driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59112085A JPS60256814A (en) | 1984-05-31 | 1984-05-31 | Minute displacement driver |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60256814A JPS60256814A (en) | 1985-12-18 |
| JPH0477323B2 true JPH0477323B2 (en) | 1992-12-08 |
Family
ID=14577710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59112085A Granted JPS60256814A (en) | 1984-05-31 | 1984-05-31 | Minute displacement driver |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60256814A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2510486B2 (en) * | 1984-06-29 | 1996-06-26 | キヤノン株式会社 | Piezoelectric device |
| JPS62216677A (en) * | 1986-03-18 | 1987-09-24 | 神鋼電機株式会社 | Oval vibrator |
| JPS63294271A (en) * | 1987-05-22 | 1988-11-30 | Nec Corp | Ultrasonic wave motor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814379A (en) * | 1981-07-20 | 1983-01-27 | Toshiba Corp | Deflection arm device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5958811U (en) * | 1982-10-04 | 1984-04-17 | ソニー株式会社 | Micro movement positioning device |
-
1984
- 1984-05-31 JP JP59112085A patent/JPS60256814A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814379A (en) * | 1981-07-20 | 1983-01-27 | Toshiba Corp | Deflection arm device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60256814A (en) | 1985-12-18 |
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