JP2510486B2 - Piezoelectric device - Google Patents
Piezoelectric deviceInfo
- Publication number
- JP2510486B2 JP2510486B2 JP59134795A JP13479584A JP2510486B2 JP 2510486 B2 JP2510486 B2 JP 2510486B2 JP 59134795 A JP59134795 A JP 59134795A JP 13479584 A JP13479584 A JP 13479584A JP 2510486 B2 JP2510486 B2 JP 2510486B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- electrostrictive
- contact
- elastic body
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000000630 rising effect Effects 0.000 description 10
- 230000010363 phase shift Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/0015—Driving devices, e.g. vibrators using only bending modes
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、電磁力を使うことなく、電歪素子の振動力
を用いた圧電装置。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a piezoelectric device using the vibration force of an electrostrictive element without using electromagnetic force.
従来からよく知られたアクチユエータは、電磁力を利
用したいわゆるリニアモータで、これらは鉄芯、巻線、
永久磁石などにより構成されている。このため部品点数
も多くなり、重くなってしまうという欠点があった。The well-known actuators are so-called linear motors that use electromagnetic force. These are iron cores, windings,
It is composed of a permanent magnet and the like. For this reason, the number of parts is increased, and it is heavy.
この点を改良したもので、電歪素子の振動により弾性
体に進行波をつくりその弾性体に接触した物体を動かす
というアクチユエータが、例えば特開昭58−148682号公
報に開示されている。しかしこれらのアクチユエータは
いずれも、移動体を一次元方向に駆動できるだけで、二
次元方向に自在に駆動できる装置はない。In order to improve this point, an actuator which creates a traveling wave in an elastic body by a vibration of an electrostrictive element and moves an object in contact with the elastic body is disclosed in, for example, Japanese Patent Application Laid-Open No. 58-148682. However, none of these actuators can drive a moving body in a one-dimensional direction but a device that can freely drive it in a two-dimensional direction.
また、ベース上にバネ板を立設し、該バネ板の両面に
屈曲形の圧電素子としてのバイモルフを貼着し、該バイ
モルフに交流信号を印加してバネ板の先端に設けられた
搬送板に所定方向の振動を与える圧電式アクチユエータ
も提案されているが、かかるアクチユエータはバイモル
フを有するバネ板がベース上に立設された構造である為
に、高さが高くなり、アクチユエータが大型化する問題
点があった。In addition, a spring plate is erected on the base, bimorphs as bending piezoelectric elements are attached to both surfaces of the spring plate, and an AC signal is applied to the bimorph to convey plate provided at the tip of the spring plate. A piezoelectric actuator that applies vibration in a predetermined direction has also been proposed.However, since such an actuator has a structure in which a spring plate having a bimorph is erected on the base, the height becomes high and the actuator becomes large. There was a problem.
本発明はこのような事情に鑑みなされたもので、一次
元方向の移動だけでなく二次元方向への移動も簡易に実
現可能な圧電装置を提供しようとするものである。The present invention has been made in view of such circumstances, and an object of the present invention is to provide a piezoelectric device capable of easily realizing not only movement in one dimension but also movement in two dimensions.
本発明の他の目的は、小型の圧電式アクチユエータを
提供せんとするものである。Another object of the present invention is to provide a small piezoelectric actuator.
［問題点を解決するための手段］ 本発明は、第１の振動部分と、前記第１の振動部分に
接合され、前記第１の振動部分を第１の方向に振動させ
る第１の電歪素子と、前記第１の振動部分の保持部より
離れた位置の振動変位部からのみ部分的に略直交する方
向に突出するように接続された第２の振動部分と、前記
第２の振動部分に接合され、前記第２の振動部分を前記
第１の方向とは異なる第２の方向に振動させる第２の電
歪素子を有する振動体と、 交流信号を発生させる信号発生手段と、 前記信号発生手段での交流信号を用いて前記第１及び
第２の電歪素子の各々に位相の異なる交流信号を印加
し、前記第１及び第２の振動部分を振動させる信号供給
手段と、を有し、前記第２の振動部分の非接続側の端部
に摩擦接触した部材と前記振動体とを相対的に移動させ
る圧電装置を特徴とする。[Means for Solving the Problems] The present invention provides a first vibrating portion and a first electrostrictive member that is joined to the first vibrating portion and vibrates the first vibrating portion in a first direction. An element, a second vibrating portion connected so as to project in a direction substantially orthogonal to a portion only from a vibrating displacement portion located away from a holding portion of the first vibrating portion, and the second vibrating portion. A vibrating body having a second electrostrictive element that is joined to the second vibrating portion and vibrates the second vibrating portion in a second direction different from the first direction; a signal generating unit that generates an AC signal; Signal supply means for vibrating the first and second vibrating portions by applying alternating signals having different phases to the first and second electrostrictive elements using the alternating signal from the generating means. And the vibrating body, which is in frictional contact with the non-connection-side end of the second vibrating portion. And wherein the piezoelectric device for relatively moving.
［実施例］ 第１の発明のアクチュエータは、第１図に示すよう
に、片側を固定された弾性体１と、弾性体に接合した第
１の電歪素子2a・2bと、弾性体１に第１の電歪素子2a・
2bとは別な面から接合した第２の電歪素子3a・3bと、弾
性体１に第１の電歪素子2a・2b及び第２の電歪素子3a・
3bとは別な面から接合した第３の電歪素子5a・5bと、固
定された以外の側で弾性体１に当接する移動体７とを備
えている。第１の電歪素子2a・2b及び第２の電歪素子3a
・3bはともに共振周波数で弾性体１を振動させるもの
で、いずれか一方或いは両方同時に選択され、動作をす
る。第３の電歪素子5a・5bは同じく共振周波数ではある
が位相のずれた振動をさせるもので、選択された第１の
電歪素子2a・2b或いは第２の電歪素子2a・2bと同時に動
作する。[Embodiment] As shown in FIG. 1, the actuator of the first invention includes an elastic body 1 fixed on one side, first electrostrictive elements 2a and 2b joined to the elastic body, and an elastic body 1. First electrostrictive element 2a
The second electrostrictive elements 3a and 3b joined from a surface different from 2b, and the first electrostrictive elements 2a and 2b and the second electrostrictive element 3a
It is provided with third electrostrictive elements 5a and 5b joined from a surface different from 3b, and a moving body 7 that comes into contact with the elastic body 1 on the side other than the fixed side. First electrostrictive elements 2a and 2b and second electrostrictive element 3a
3b both vibrate the elastic body 1 at the resonance frequency, and either one or both are selected and operated. The third electrostrictive elements 5a and 5b similarly vibrate at the resonance frequency but out of phase, and at the same time as the selected first electrostrictive elements 2a and 2b or the second electrostrictive elements 2a and 2b. Operate.
第１の電歪素子2a・2bが振動すると、弾性体１は固定
側を支点として左右に振動する。第２の電歪素子3a・3b
が振動すると、弾性体１は同じく固定側を支点として紙
面に対して前後に振動する。電歪素子5a・5bが振動する
と、弾性体１は位相がずれて上下に振動する。When the first electrostrictive elements 2a and 2b vibrate, the elastic body 1 vibrates left and right with the fixed side as a fulcrum. Second electrostrictive elements 3a and 3b
When vibrates, the elastic body 1 also vibrates back and forth with respect to the paper surface with the fixed side as a fulcrum. When the electrostrictive elements 5a and 5b vibrate, the elastic body 1 vibrates vertically with a phase shift.
いま電歪素子2a・2bが選ばれて、電歪素子5a・5bと同
時に動作するときの作用を第２図により説明する。同図
（ａ）は動作開始前の中立状態を示すもので、弾性体１
は移動体７に軽く接触している。上下の振動から始まる
と、まず（ｂ）のように弾性体１は上方に上がり、振動
の上死点で移動体７に強く押付けられる。このように位
相が1/4波長進んだところで、左右の振動を開始する。
（ｃ）に示すように弾性体１は下がりながらも右方へ振
れ摩擦で移動体７を右へ移動する。（ｄ）のように弾性
体１が右死点まで振れると、弾性体１は移動体７に軽く
接触した状態になる。弾性体１が左方に振れはじめるこ
ろには、さらに下るから、（ｅ）のように移動体７から
離れて、移動体７が駆動されることはない。弾性体１は
（ｆ）の下死点を経て上がってゆくが、（ｇ）では移動
体７に接触することがない。左死点（ｈ）に至って移動
体７に軽く接触する。（ｉ）のように弾性体１は右方に
振れてゆく状態では、移動体７に強く接触して右へ駆動
する。振動が続くと、さらに→（ｂ）→（ｃ）→（ｄ）
→（ｅ）→（ｆ）→（ｇ）→（ｈ）→（ｉ）→と繰返し
て、駆動を続ける。The operation when the electrostrictive elements 2a and 2b are now selected and operate simultaneously with the electrostrictive elements 5a and 5b will be described with reference to FIG. FIG. 1A shows a neutral state before the operation is started.
Is in light contact with the moving body 7. When starting from the vertical vibration, the elastic body 1 first rises upward as shown in (b), and is strongly pressed against the moving body 7 at the top dead center of the vibration. In this way, when the phase advances by 1/4 wavelength, left and right vibrations start.
As shown in (c), the elastic body 1 moves to the right while swinging to the right while moving downward due to friction. When the elastic body 1 swings to the right dead center as shown in (d), the elastic body 1 comes into a state of lightly contacting the moving body 7. When the elastic body 1 starts to swing to the left, it further descends, so that the moving body 7 is not driven away from the moving body 7 as shown in (e). The elastic body 1 goes up through the bottom dead center of (f), but does not contact the moving body 7 in (g). It reaches the left dead center (h) and contacts the moving body 7 lightly. In the state where the elastic body 1 swings to the right as shown in (i), the elastic body 1 strongly contacts the moving body 7 and is driven to the right. When vibration continues, → (b) → (c) → (d)
→ (e) → (f) → (g) → (h) → (i) → is repeated to continue driving.
すなわち二方向の振動周波数が同一で、位相がずれて
いるから、上死点→右死点→下死点→左死点→上死点→
の同一周期で、左死点から右死点に至る周期の間に駆動
がなされている。That is, since the vibration frequencies in the two directions are the same and the phases are shifted, top dead center → right dead center → bottom dead center → left dead center → top dead center →
In the same cycle, the driving is performed during the cycle from the left dead center to the right dead center.
第１図は本発明を適用する圧電式アクチユエータ（圧
電式搬送装置）の実施例正面図である。弾性体１は金属
などの弾性物質からなり、駆動片を形成する角棒状の立
上り部分1aと、該部分1aと一体に形成された角棒状で、
かつ縦方向振動用の基板を構成する固定側部分1bとの逆
Ｔ字型をしている。立上がり部分1aの先端には、板状の
移動体７の下面が接触している。固定側部分1bの両端部
は、スペーサ９を介してビス８により、固定基台10に取
付けられている。立上がり部分1aの左右側壁には、屈曲
動作用の圧電板を構成する例えば圧電性セラミックなど
からなる電歪素子2aと2bが取付けられる。前後壁には電
歪素子3aと3bが取付けられる。固定側部分1bの上下には
電歪素子5a・5bが取付けられる。FIG. 1 is a front view of an embodiment of a piezoelectric actuator (piezoelectric transfer device) to which the present invention is applied. The elastic body 1 is made of an elastic material such as metal and has a rectangular rod-shaped rising portion 1a forming a driving piece, and a rectangular rod shape integrally formed with the portion 1a,
In addition, it has an inverted T-shape with the fixed side portion 1b which constitutes the substrate for longitudinal vibration. The lower surface of the plate-shaped moving body 7 is in contact with the tip of the rising portion 1a. Both ends of the fixed side portion 1b are attached to the fixed base 10 with screws 8 via spacers 9. Electrostrictive elements 2a and 2b made of, for example, piezoelectric ceramics, which constitute a piezoelectric plate for bending operation, are attached to the left and right sidewalls of the rising portion 1a. Electrostrictive elements 3a and 3b are attached to the front and rear walls. Electrostrictive elements 5a and 5b are attached above and below the fixed side portion 1b.
第３図はこのような圧電ユニツトからなるアクチユエ
ータを駆動する回路を示すもので、12は共振周波数の発
振をする交流電源、13はその周波数の位相を90°遅らせ
る位相器、14は位相を90°速める位相器、15は切替えス
イッチ、15A1・15B1はその一次側接点、15A2・15B2はそ
の二次側接点、17はメインスイツチである。FIG. 3 shows a circuit for driving an actuator composed of such a piezoelectric unit. 12 is an AC power source that oscillates at the resonance frequency, 13 is a phase shifter that delays the phase of the frequency by 90 °, and 14 is a phase shifter. ° Phase shifter, 15 is a changeover switch, 15A 1・ 15B 1 is its primary contact, 15A 2・ 15B 2 is its secondary contact, and 17 is a main switch.
メインスイツチ17を入れ、切替えスイツチ15を操作し
接点15A1と接点15A2を導通させる。すると電歪素子5a・
5bに交流電圧が印加され振動し、それに励起されて弾性
体１の固定側部分1bが共振周波数で両端支持はりの上下
振動をする。電歪素子2aと2bには90°位相が遅れた交流
が印加され振動し、それに励起されて立上がり部分1aが
共振周波数で片持はりの左右振動をする。両者の振動の
位相は1/4波長ずれているから、移動体７は左方に駆動
される。Insert the main switch 17 and operate the switching switch 15 to bring the contacts 15A 1 and 15A 2 into conduction. Then the electrostrictive element 5a
An AC voltage is applied to 5b to vibrate, and when excited, the fixed side portion 1b of the elastic body 1 vibrates vertically at both ends of the support beam at the resonance frequency. Alternating current having a 90 ° phase delay is applied to the electrostrictive elements 2a and 2b to vibrate, and the rising portion 1a is excited by it and vibrates left and right of the cantilever at the resonance frequency. Since the phases of the vibrations of both are shifted by 1/4 wavelength, the moving body 7 is driven to the left.
スイツチ15の操作で接点15B1と接点15A2を導通させる
と、1/4波長の位相ずれが逆になり、右方向に駆動され
る。接点15B1と接点15B2が導通するよう切替えれば、電
歪素子5a・5bと共に電歪素子3a・3bが動作し、移動体７
は図の紙面に対して前方向に駆動される。接点15A1と接
点15B2を導通させると、移動体７は後方に駆動される。
接点15A1と接点15A2を導通させると同時に接点15B2もそ
こに導通させると、電歪素子5a・5bと共に電歪素子2a・
2bおよび電歪素子3a・3bが動作し、移動体７は左斜め後
方向に駆動される。同様に接点15B1・接点15A2・接点15
B2を導通させると、右斜め前方向に駆動される。接点15
A1と接点15B2とを導通させ、接点15B1と接点15A2とを導
通させると、右斜め後方向に駆動される。接点15A1と接
点15A2とを導通させ、接点15B1と接点15B2とを導通させ
ると、左斜め前方向に駆動される。When the switch 15 is operated to bring the contacts 15B 1 and 15A 2 into conduction, the phase shift of 1/4 wavelength is reversed and the contacts are driven to the right. If the contact point 15B 1 and the contact point 15B 2 are switched to be conductive, the electrostrictive elements 3a and 3b operate together with the electrostrictive elements 5a and 5b, and the moving body 7
Are driven forward with respect to the plane of the drawing. When the contact points 15A 1 and 15B 2 are brought into conduction, the moving body 7 is driven backward.
When the contact 15A 1 and the contact 15A 2 are made conductive at the same time as the contact 15B 2 is also made conductive there, the electrostrictive elements 5a and 5b and the electrostrictive element 2a
2b and the electrostrictive elements 3a and 3b operate, and the moving body 7 is driven diagonally left rearward. Similarly, contact 15B 1 , contact 15A 2 , contact 15
When B 2 is turned on, it is driven diagonally forward right. Contact 15
When A 1 and the contact 15B 2 are brought into conduction and the contact 15B 1 and the contact 15A 2 are brought into conduction, they are driven in a diagonally right rear direction. When the contact point 15A 1 and the contact point 15A 2 are brought into conduction and the contact point 15B 1 and the contact point 15B 2 are brought into conduction, they are driven in a diagonally left forward direction.
第４図は第１の発明における振動体１の別な実施例正
面図、第５図はその平面図である。この振動体１は＋字
型の固定側部分1bと立上り部分1aからなっている。＋字
の縦横両方の角棒の上下に電歪素子5a・5bが取付けられ
ている。FIG. 4 is a front view of another embodiment of the vibrating body 1 in the first invention, and FIG. 5 is a plan view thereof. The vibrating body 1 is composed of a + -shaped fixed side portion 1b and a rising portion 1a. Electrostrictive elements 5a and 5b are attached above and below the square bar in both the vertical and horizontal directions.
第６図も同じく振動体１の別な実施例正面図、第７図
は平面図で、振動体１は、円盤型の固定側部分1bと立上
り部分1aからなっている。FIG. 6 is also a front view of another embodiment of the vibrating body 1, and FIG. 7 is a plan view of the vibrating body 1. The vibrating body 1 comprises a disk-shaped fixed side portion 1b and a rising portion 1a.
第２の発明のアクチユエータは、電歪素子20が一つで
交叉する三方向のうち一方向だけが位相のずれている共
振周波数で振動する。そして電歪素子20は、第８図に示
すように、片側を固定し、非固定側に移動体７が当接し
ている。The actuator of the second invention vibrates at a resonance frequency in which only one of the three directions in which one electrostrictive element 20 intersects has a phase shift. As shown in FIG. 8, the electrostrictive element 20 has one side fixed and the movable body 7 is in contact with the non-fixed side.
このアクチユエータを動作させると、電歪素子20は固
定した側を支点として左右方向に或いは紙面に対して前
後方向振動する。同時に電歪素子20は位相がずれて上下
方向に振動する。すると移動体７がその振動により駆動
される。When this actuator is operated, the electrostrictive element 20 vibrates in the left-right direction or the front-back direction with respect to the paper surface with the fixed side as a fulcrum. At the same time, the electrostrictive element 20 is out of phase and vibrates vertically. Then, the moving body 7 is driven by the vibration.
駆動原理は、電歪素子20そのものが第１の発明におけ
る弾性体１の働きを兼ねる点が異なるのみで、各動作状
態については第２図に示す通りで、第１の発明の作用と
して既に説明してあるから、再度の説明を省略する。The driving principle is different only in that the electrostrictive element 20 itself also functions as the elastic body 1 in the first invention, and the respective operating states are as shown in FIG. 2, which has already been described as the operation of the first invention. Therefore, the repetitive description will be omitted.
第８図は本発明を適用するアクチユエータの実施例正
面図である。電歪素子20は角棒状の立上り部分20aと角
棒状の固定側部分20bとの逆Ｔ字型をしている。立上り
部分20aの先端には、移動体７が接触している。固定側
部分20bの両端部は、スペーサ９を介してビス８により
固定基台10に取付けられている。FIG. 8 is a front view of an embodiment of an actuator to which the present invention is applied. The electrostrictive element 20 has an inverted T-shape having a rectangular rod-shaped rising portion 20a and a rectangular rod-shaped fixed side portion 20b. The moving body 7 is in contact with the tip of the rising portion 20a. Both ends of the fixed side portion 20b are attached to the fixed base 10 with screws 8 via spacers 9.
第９図は電歪素子20の側面図で、立上り部分20aの左
右側壁面に表面電極22aと22bとが付けられ、駆動回路に
接続される。これにより左右の振動がなされる。前後壁
にも表面電極23aと23bが付けられ、駆動回路に接続され
前後の振動がなされる。第10図は電歪素子20の平面図
で、固定体側部分20bの上下面に表面電極25aと25bとが
付けられ、駆動回路に接続される。これにより上下の振
動がなされる。FIG. 9 is a side view of the electrostrictive element 20. Surface electrodes 22a and 22b are attached to the left and right side wall surfaces of the rising portion 20a and are connected to a drive circuit. This causes left and right vibrations. Surface electrodes 23a and 23b are also attached to the front and rear walls, which are connected to a drive circuit for front and rear vibration. FIG. 10 is a plan view of the electrostrictive element 20, in which surface electrodes 25a and 25b are attached to the upper and lower surfaces of the fixed body side portion 20b, and are connected to a drive circuit. This causes vertical vibration.
駆動回路は第３図に示す回路と同様の回路が使用され
る。同図の電歪素子2a・2b、3a・3b、5a・5bは、本例で
は一体の電歪素子20であるが、夫々対応する位置に付け
られた電極22a・22b、23a・23b、25a・25bに同じように
接続すれば、同様の動作をする。As the drive circuit, the same circuit as the circuit shown in FIG. 3 is used. The electrostrictive elements 2a, 2b, 3a, 3b, 5a, 5b in the figure are integrated electrostrictive elements 20 in this example, but the electrodes 22a, 22b, 23a, 23b, 25a attached to corresponding positions, respectively.・ Similar operation if connected to 25b in the same way.
第11図は第２の発明における電歪素子20の別な実施例
平面図である。この電歪素子20は、＋字型の固定側部分
20bと立上り部分20aからなっている。電極25a・25bは＋
字の縦横両方の角棒の上下に夫々付けられている。FIG. 11 is a plan view of another embodiment of the electrostrictive element 20 in the second invention. This electrostrictive element 20 is a + -shaped fixed side portion
It consists of 20b and a rising part 20a. Electrodes 25a and 25b are +
It is attached to the top and bottom of the square bar in both the vertical and horizontal directions.
また電歪素子20の固定側部分20bを円盤形にし（第７
図参照）、その上下面に電極25a・25bを付けてもよい。Further, the fixed side portion 20b of the electrostrictive element 20 is formed into a disk shape (7th
(See the drawing), and the electrodes 25a and 25b may be attached to the upper and lower surfaces thereof.
以上説明したように、本発明のアクチユエータは、部
品数が少なく小型軽量で安価なものとなる。As described above, the actuator of the present invention has a small number of parts, is small, lightweight, and is inexpensive.
また実施例によれば、二次元方向への移動も自在とな
る。Further, according to the embodiment, the movement in the two-dimensional direction is also possible.
第１図は本発明を適用する駆動装置の実施例正面図、第
２図はその駆動原理を説明する図、第３図は駆動回路
図、第４図は振動体の実施例正面図、第５図はその平面
図、第６図は別な実施例の正面図、第７図はその平面
図、第８図は本発明を適用する駆動装置の実施例正面
図、第９図は電歪素子の実施例側面図、第10図はその平
面図、第11図は別な実施例の平面図。 １は弾性体、2a・2b・3a・3b・5a・5b・20は圧電素子、
７は搬送体としての移動体、10は固定基台、12は交流電
源、22a・22b・23a・23b・25a・25bは電極。FIG. 1 is a front view of an embodiment of a drive device to which the present invention is applied, FIG. 2 is a view for explaining the drive principle thereof, FIG. 3 is a drive circuit diagram, and FIG. 4 is a front view of an embodiment of a vibrating body. 5 is a plan view thereof, FIG. 6 is a front view of another embodiment, FIG. 7 is a plan view thereof, FIG. 8 is a front view of an embodiment of a drive device to which the present invention is applied, and FIG. 9 is electrostrictive. 10 is a side view of an embodiment of the element, FIG. 10 is a plan view thereof, and FIG. 11 is a plan view of another embodiment. 1 is an elastic body, 2a / 2b / 3a / 3b / 5a / 5b / 20 are piezoelectric elements,
7 is a moving body as a carrier, 10 is a fixed base, 12 is an AC power source, and 22a / 22b / 23a / 23b / 25a / 25b are electrodes.
フロントページの続き (72)発明者 奥野 卓夫 東京都大田区下丸子３丁目30番２号 キ ヤノン株式会社内 (72)発明者 月本 貴之 東京都大田区下丸子３丁目30番２号 キ ヤノン株式会社内 (56)参考文献 特開 昭59−112085（ＪＰ，Ａ) 特開 昭60−74980（ＪＰ，Ａ)Front Page Continuation (72) Inventor Takuo Okuno 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Takayuki Tsukimoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) References JP 59-112085 (JP, A) JP 60-74980 (JP, A)
Claims (1)
接合され、前記第１の振動部分を第１の方向に振動させ
る第１の電歪素子と、前記第１の振動部分の保持部より
離れた位置の振動変位部からのみ部分的に略直交する方
向に突出するように接続された第２の振動部分と、前記
第２の振動部分に接合され、前記第２の振動部分を前記
第１の方向とは異なる第２の方向に振動させる第２の電
歪素子を有する振動体と、 交流信号を発生させる信号発生手段と、 前記信号発生手段での交流信号を用いて前記第１及び第
２の電歪素子の各々に位相の異なる交流信号を印加し、
前記第１及び第２の振動部分を振動させる信号供給手段
と、を有し、前記第２の振動部分の非接続側の端部に摩
擦接触した部材と前記振動体とを相対的に移動させるこ
とを特徴とする圧電装置。1. A first vibrating portion, a first electrostrictive element joined to the first vibrating portion and vibrating the first vibrating portion in a first direction, and the first vibrating portion. A second vibrating portion that is connected so as to project in a direction that is substantially orthogonal to only the vibration displacement portion that is distant from the holding portion, and that is joined to the second vibrating portion, A vibrating body having a second electrostrictive element for vibrating a portion in a second direction different from the first direction, a signal generating unit for generating an AC signal, and an AC signal in the signal generating unit. Applying alternating signals having different phases to each of the first and second electrostrictive elements,
A signal supply unit that vibrates the first and second vibrating portions, and relatively moves the member that is in frictional contact with the non-connection-side end of the second vibrating portion and the vibrating body. A piezoelectric device characterized by the above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59134795A JP2510486B2 (en) | 1984-06-29 | 1984-06-29 | Piezoelectric device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59134795A JP2510486B2 (en) | 1984-06-29 | 1984-06-29 | Piezoelectric device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6115572A JPS6115572A (en) | 1986-01-23 |
| JP2510486B2 true JP2510486B2 (en) | 1996-06-26 |
Family
ID=15136712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59134795A Expired - Fee Related JP2510486B2 (en) | 1984-06-29 | 1984-06-29 | Piezoelectric device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2510486B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0773428B2 (en) * | 1986-02-06 | 1995-08-02 | 洋 清水 | Piezoelectric drive |
| JPS6339473A (en) * | 1986-08-04 | 1988-02-19 | Rion Co Ltd | Ultrasonic linear motor |
| JPS63294271A (en) * | 1987-05-22 | 1988-11-30 | Nec Corp | Ultrasonic wave motor |
| US4928030A (en) * | 1988-09-30 | 1990-05-22 | Rockwell International Corporation | Piezoelectric actuator |
| EP0424609A1 (en) * | 1989-09-28 | 1991-05-02 | Rockwell International Corporation | Piezoelectric actuator |
| US5345137A (en) * | 1991-04-08 | 1994-09-06 | Olympus Optical Co., Ltd. | Two-dimensionally driving ultrasonic motor |
| JP3466690B2 (en) * | 1994-02-21 | 2003-11-17 | 財団法人神奈川科学技術アカデミー | Surface acoustic wave linear motor |
| CN100414092C (en) * | 1997-11-27 | 2008-08-27 | 佳能株式会社 | Vibration type actuator and vibration type driving apparatus |
| US6404104B1 (en) * | 1997-11-27 | 2002-06-11 | Canon Kabushiki Kaisha | Vibration type actuator and vibration type driving apparatus |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6074980A (en) * | 1983-09-29 | 1985-04-27 | Hitachi Maxell Ltd | Piezoelectric buckling tuning form type motor |
| JPS60256814A (en) * | 1984-05-31 | 1985-12-18 | Rion Co Ltd | Minute displacement driver |
-
1984
- 1984-06-29 JP JP59134795A patent/JP2510486B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115572A (en) | 1986-01-23 |
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| LAPS | Cancellation because of no payment of annual fees |