JPS58190079A - Mechanism of fine movement - Google Patents
Mechanism of fine movementInfo
- Publication number
- JPS58190079A JPS58190079A JP57072422A JP7242282A JPS58190079A JP S58190079 A JPS58190079 A JP S58190079A JP 57072422 A JP57072422 A JP 57072422A JP 7242282 A JP7242282 A JP 7242282A JP S58190079 A JPS58190079 A JP S58190079A
- Authority
- JP
- Japan
- Prior art keywords
- members
- fine movement
- movement mechanism
- drive
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 21
- 230000008602 contraction Effects 0.000 claims abstract description 9
- 230000009471 action Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 239000002344 surface layer Substances 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 230000000694 effects Effects 0.000 description 5
- 239000002245 particle Substances 0.000 description 3
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013518 transcription Methods 0.000 description 2
- 230000035897 transcription Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Turning (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、物体位置の回転および直進を高精度に行わせ
る微動機構曇こ関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a fine movement mechanism for rotating and rectilinearly moving an object position with high precision.
近年、半導体ウェーハやマスク基板等の試料に微細パタ
ーンを形成するものとして、電子ビーム描画装置、縮小
投影型転写装置およびＸ線転写装置等が開発されている
が、この種の装置ではサブ−ζ−クロン単位の精度を保
持するために、微小変位を駆動する微動機構が必要であ
る。才た、上記装置に限らず測定機器で精密な測定を行
う分野等においても、高精度を有する微動機構が必要で
ある。In recent years, electron beam writing equipment, reduction projection type transcription equipment, X-ray transcription equipment, etc. have been developed to form fine patterns on samples such as semiconductor wafers and mask substrates. - In order to maintain accuracy in units of microns, a fine movement mechanism is required to drive minute displacements. A fine movement mechanism with high precision is required not only in the above-mentioned devices but also in the field of performing precise measurements with measuring instruments.
微動機構としては、−軸方向に移動させるものや回転運
動を行わせるもの等があるが、回転運動を行わせる従来
の回転微動機構（こあっては次のような問題力あった。Fine movement mechanisms include those that move in the -axial direction and those that perform rotational movement, but conventional rotational fine movement mechanisms that perform rotational movement (these have the following problems).
すなわち、ストロークが長いものでは微動駆動が困難で
あり、微動駆動が可能なものはストロークを長くできな
い等の問題があった。また、微動機構として回転および
直進運動の両方を行えるものが要留されているが、この
ような機構で微動駆動が可能で、かつ長いストロークが
とれるものは未だ報告されていない。That is, if the stroke is long, it is difficult to perform fine movement, and if the stroke is possible, the stroke cannot be made long. Further, although there is a need for a fine movement mechanism that can perform both rotational and linear movement, no such mechanism has yet been reported that is capable of fine movement and has a long stroke.
本発明の目的は、同−駆動部を用いて回転および直進の
微＠運動を行うことができ、かつそのストロークを十分
長くし得る微動機構を提供することにある。An object of the present invention is to provide a fine movement mechanism that can perform rotational and linear fine movements using the same drive unit, and can make its stroke sufficiently long.
本発明の骨子は、圧電効果（印加電圧に応じて伸縮する
機能）を有する部材に適当な電圧を印加し、該部材を伸
び縮みさせることにより微動運動を行わせるようにした
ものである。The gist of the present invention is to apply an appropriate voltage to a member having a piezoelectric effect (a function that expands and contracts in response to applied voltage), and causes the member to expand and contract, thereby causing fine movement.
すなわち本発明は、基台上に少なくとも３個の移動部材
を移動自在に載置すると共ｌこ、印加電圧に応じて伸縮
する駆動部材の伸縮方向両端に上記各移動部材をそれぞ
れ取着して該移動部材の隣接するもの同士を接続し、上
記各移動部材をそれぞれ基台上に固定する固定部材を設
け、上記駆動部材の伸縮作用および固定部材の固定作用
によって移動部材を微小連動せしめるようにしたもので
ある。That is, in the present invention, at least three movable members are movably placed on a base, and each of the movable members is attached to both ends of a drive member in the direction of expansion and contraction, which expands and contracts in response to applied voltage. A fixing member is provided for connecting adjacent moving members and fixing each of the moving members on a base, so that the moving members are minutely interlocked by the expansion and contraction action of the driving member and the fixing action of the fixed member. This is what I did.
本発明によれば、複数（移動部材の個数と同数）の駆動
部材による各伸縮作用と、複轄の固定部材による各固定
作用とを適当に組み合わせることによって、同一駆動源
による移動部材の回転運動および直進運動が可能となる
。そして、従来機構のように微動を行わせるとストロー
クが極めて小さくなると云う欠点がなく、微動で十分長
いストロークがとれ、原理的には無限の回転と直進とが
可能である。このため、駆動相および微動用の機構が不
要となる。また、駆動源として圧電素子からなる駆動部
材で移動部材を直接駆動しているため、例えば印加電圧
１〔■〕で０．００５（μｍ〕と云う超微動を確実ζこ
行うことができる。さらに、圧電効果を有する部材は、
印加電圧の大きさによって異なるが数１００〔し〕〜数
（１）の力を発生することが可能であり、大きなトルク
を発生する微動機構を提供することができる。According to the present invention, by appropriately combining each expansion/contraction action by a plurality of drive members (same number as the number of moving members) and each fixing action by multiple fixed members, rotational movement of the moving member by the same driving source is achieved. and straight movement is possible. In addition, there is no disadvantage that the stroke becomes extremely small when fine movement is performed as in the conventional mechanism, and a sufficiently long stroke can be obtained with fine movement, and in principle, infinite rotation and straight movement are possible. This eliminates the need for a drive phase and fine movement mechanism. Furthermore, since the movable member is directly driven by a drive member made of a piezoelectric element as a drive source, it is possible to reliably perform ultra-fine movement of 0.005 (μm), for example, with an applied voltage of 1 [■]. , a member having a piezoelectric effect is
Although it varies depending on the magnitude of the applied voltage, it is possible to generate a force of several hundred to several (1), and it is possible to provide a fine movement mechanism that generates a large torque.
また、本発明はその構成が極めて簡単で故障する部品等
も用いてないので、計測器類や各種半導体装置内に組み
込んで使用しても十分信頼性のあるものである。さらに
、電子ビームやイオンビーム等の荷電粒子を用いた装置
では磁界の変動をこよって荷電粒子が影響を受けるが、
本発明では全ての構成材料を非磁性材で形成するどとが
でき、この点から荷電粒子を用いる製雪に極めて有用性
が高い。Further, since the present invention has an extremely simple configuration and does not use any parts that may break down, it is sufficiently reliable even when used by being incorporated into measuring instruments or various semiconductor devices. Furthermore, in devices that use charged particles such as electron beams and ion beams, the charged particles are affected by fluctuations in the magnetic field.
In the present invention, all the constituent materials can be made of non-magnetic materials, and from this point of view, it is extremely useful for snowmaking using charged particles.
第１図（ａ）〜（Ｃ）はそれぞれ本発明の一実施例に係
わる微動機構の概略構成を示すもので第１図（ａｌは平
面図、第１図（ｂｌは同図（ａｌの矢視Ａ−Ａ断面図、
第１図（Ｃ）は同図（ａｌの矢視Ｂ−Ｂ断面図である。Figures 1 (a) to (C) each show a schematic configuration of a fine movement mechanism according to an embodiment of the present invention. View A-A sectional view,
FIG. 1(C) is a sectional view taken along arrow BB in the same figure (al).
図中１．２，３．４はそれぞれ矩形板状の移動部材であ
り、これらの移動部材１．〜，４は導電性の基台５上に
全体として正方形をなすよう離間して載置されている。In the figure, reference numerals 1.2 and 3.4 are rectangular plate-shaped moving members, respectively. .
移動部材１．〜。Moving member 1. ~.
４の隣接するもの同士は駆動部材６，７，８゜９により
それぞれ接続されている。すなわち、移動部材１，２間
には駆動部材６が、移動部材２．３間には駆動部材７が
、移動部材３，４間には駆動部材８が、そして移動部材
４，１間には駆動部材９が設けられている。駆動部材６
゜〜、９はそれぞれ印加電圧に応じて伸縮する圧電素子
、例えばチタン酸ジルコン酸鉛からなるもので、その伸
縮方向（図中番こ示す矢印方向）両端に前記移動部材ｌ
、〜、４がそれぞれ取着固定されている。な８、この固
定は接着、ねじ止め或いは圧入等のいずれであってもよ
い。才た、駆動部材６にはスイッチ１０ａを介して可変
電圧筒５′ｍ１１ａが接続され、同様に駆動部材７には
スイッチ１０ｂを介して電飾７Ｊｂが、駆動部材８には
スイッチＪＯｃを介して電源１１Ｃが、駆動部材９には
スイッチｌθｄを介して電源ｚｐｄが接続されるものと
なっている。Adjacent ones of 4 are connected by driving members 6, 7, and 8°9, respectively. That is, a driving member 6 is provided between the moving members 1 and 2, a driving member 7 is provided between the moving members 2 and 3, a driving member 8 is provided between the moving members 3 and 4, and a driving member 8 is provided between the moving members 4 and 1. A drive member 9 is provided. Drive member 6
゜~, 9 are piezoelectric elements that expand and contract depending on the applied voltage, such as those made of lead zirconate titanate, and the moving member l is attached at both ends in the expansion and contraction direction (in the direction of the arrow shown in the figure).
, . . . , 4 are respectively attached and fixed. 8. This fixing may be done by adhesion, screwing, press-fitting, or the like. A variable voltage tube 5'm11a is connected to the drive member 6 via a switch 10a, an electric light 7Jb is connected to the drive member 7 via a switch 10b, and an electric light 7Jb is connected to the drive member 8 via a switch JOc. A power source 11C is connected to the drive member 9, and a power source zpd is connected to the drive member 9 via a switch lθd.
一方、前記移動部材１の下部には電極１２ａおよび絶縁
層Ｊ２ｂ、１２Ｇからなる静電チャック（固定部材）１
２が設けられており、同様に移動部材２．〜，４の下部
ζこけ静電チャック１３．１４．１５がそれぞれ設けら
れている。On the other hand, an electrostatic chuck (fixed member) 1 consisting of an electrode 12a and insulating layers J2b and 12G is provided at the bottom of the moving member 1.
Similarly, a moving member 2.2 is provided. ~, 4 lower ζ moss electrostatic chucks 13, 14, 15 are provided, respectively.
そして、これらの移動部材１．〜，４、例えば移動部材
１は−Ｆ記電極１２ａと前記基台５との間にスイッチ１
６ａを介して電源１７ａを接続することにより、基台５
上に吸着固定されるものとなっている。なお、図中１３
ａ、〜、 ）５ａは電極、１３ｂ、〜、１５ｂ、１３ｃ
、〜１５ｃは絶縁１−１Ｊ６ｂ、−，１６ｄはスイッチ
、１７ｂ。These moving members 1. ~, 4, for example, the moving member 1 has a switch 1 between the -F electrode 12a and the base 5.
By connecting the power supply 17a through the base 5
It is fixed to the top by suction. In addition, 13 in the figure
a, ~, ) 5a is an electrode, 13b, ~, 15b, 13c
, ~15c is insulation 1-1J6b, -,16d is a switch, 17b.
〜、Ｊ７ｄは電飾をそれぞれ示している。. . . , J7d indicate electric decorations, respectively.
このように構成された本実施例機構の作用を説明する。The operation of the mechanism of this embodiment configured as described above will be explained.
まず、回転運動をさせるには、静電チャック７４．１５
により移動部材３．４を基台５上に固定したのち、第２
図（ａｌｌこ示す如く駆動部材７を伸長させると共に駆
動部材９を縮長させる。First, in order to perform rotational movement, the electrostatic chuck 74.15
After fixing the movable member 3.4 on the base 5 by
As shown in the figure, the driving member 7 is extended and the driving member 9 is contracted.
これをこより、移動部材１，２が矢印Ｐ方向に微小回転
する。次に、静電チャック１２．１３により移動部材１
．２を基台５上に固定したのち上記静電、チャック１４
．１５による移動部材３゜４の固定を解除する。この状
態で第２図（ｂ）に示す如く駆動部材７を縮長させると
共に、駆動部材９を伸長させると、移動部材３，４が矢
印Ｐ方向に微小回転する。以上の操作を繰り返すことに
よって、移動部材１．〜，４は矢印Ｐ方向に回転せしめ
られることになる。Due to this, the moving members 1 and 2 are slightly rotated in the direction of arrow P. Next, the moving member 1 is moved by the electrostatic chuck 12.13.
．． 2 on the base 5, the electrostatic chuck 14
．． The fixation of the moving member 3°4 by 15 is released. In this state, when the driving member 7 is retracted and the driving member 9 is expanded as shown in FIG. 2(b), the movable members 3 and 4 are slightly rotated in the direction of arrow P. By repeating the above operations, moving member 1. . . , 4 are rotated in the direction of arrow P.
直進運動をさせるには、静電チャック１３゜１４をこよ
り移動部材２，３を基台５上に固定したのち、第３図（
ａｌに示す如く駆動部材６，８を共に伸長させる。これ
番こより、移動部材１．４は矢印Ｑ方向に微小移動（直
進移動）する。次に、静電チャック１２．１５により移
動部材１゜４を基台５上に固定したのち、上記静電チャ
ック１３．１４による移動部材２，３の固定を解除する
。この状態で第３図（ｂｌに示す如く駆動部材６，８を
共に縮長させると、移動部材２，３が矢印Ｑ方向に微小
移動する。以上の操作を繰り返すことによって移動部材
１．〜，４は矢印Ｑ方向（こ直進せしめられることにな
る。In order to move in a straight line, the electrostatic chucks 13 and 14 are used to fix the movable members 2 and 3 on the base 5, and then as shown in FIG.
The driving members 6 and 8 are extended together as shown in al. From this point on, the moving member 1.4 makes a slight movement (straight line movement) in the direction of the arrow Q. Next, after the movable member 1.degree. 4 is fixed on the base 5 by the electrostatic chuck 12.15, the fixation of the movable members 2, 3 by the electrostatic chuck 13.14 is released. In this state, when the driving members 6 and 8 are both retracted as shown in FIG. 4 will be forced to go straight in the direction of arrow Q.
かくして本実施例によれば、移動部材１．〜。Thus, according to this embodiment, the moving member 1. ~.
４を回転成いは直進運動させることができ、さらに回転
および直進運動を同時に行わせることも可能である。ま
た、移動部材１．〜，４の運動方向は駆動部材６．〜，
９の各伸縮作用と静電チャック１２．〜，１５の各固定
作用とを適当に選択することによって、自由に設定する
ことができる。4 can be rotated or moved linearly, and furthermore, it is also possible to perform rotational and linear movement simultaneously. In addition, moving member 1. The direction of movement of the drive member 6. ~,
9 and the electrostatic chuck 12. . . , 15 can be freely set by appropriately selecting each of the fixing functions.
第４図は他の実施例の要部構成を示す平面図である。な
お、第１図（ａ）と同一部分には同一符号を伺して、そ
の詳しい説明は省略する。この天施例が先に説明した実
施例と異なる点は、前記移動部材１．〜，４を材料の弾
性変形を利用した弾性ヒンジでつなげるようにしたこと
であり、他は先の実施例と一様である。このような構成
であれは先の実施例と同様の効果を奏するのは勿論、駆
動部材６．〜，９や静電チャック１２、〜，１５による
駆動時および固定時等における衝撃を緩和することがで
きると云う効果を奏する。FIG. 4 is a plan view showing the main structure of another embodiment. Note that the same parts as in FIG. 1(a) are designated by the same reference numerals, and detailed explanation thereof will be omitted. This top embodiment differs from the previously described embodiments in that the moving member 1. . . . , 4 are connected by an elastic hinge that utilizes elastic deformation of the material, and the rest is the same as the previous embodiment. With such a configuration, it goes without saying that the same effects as in the previous embodiment can be achieved, but the driving member 6. This has the effect of being able to reduce the impact caused by the electrostatic chucks 12, 12, 15, 12, 12, 15, etc. during driving and fixing.
なお、本発明は上述した谷実施例に限定されるものでは
ない。前記実施例では移動部材および駆動部材をそれぞ
れ４個用いた場合を説明したが、これらは３個以上の数
であれば適宜変更することができる。例えば３個とした
場合、第５図に示す如く移動部拐、９１ 、 Ｊ ２．
Ｊ ３および駆動部Ｕ’３４．ｓｓ、、ｑ６を用い、
回転させるには駆動部材３４．３５の伸縮を交互に行い
、才た直進させるζこは駆動部１１ｓ４．ｓｓの伸縮を
同時に行うよう番こすればよい。さらに、この場合移動
部材３ノ、〜、３３と駆動部材３４゜〜、３６との間に
設りた弾性ヒンジ３７をこより各部材間で発生する歪を
緩衝させることが可能となる。Note that the present invention is not limited to the valley embodiment described above. In the above embodiment, the case where four moving members and four driving members were used each was described, but these can be changed as appropriate as long as the number is three or more. For example, if there are three, as shown in FIG.
J3 and drive unit U'34. Using ss,,q6,
To rotate, the drive members 34, 35 are extended and contracted alternately, and the drive members 11s4. All you have to do is make sure that the ss is expanded and contracted at the same time. Further, in this case, the elastic hinges 37 provided between the moving members 3~, 33 and the drive members 34~, 36 can buffer the strain generated between each member.
また、前記移動部材の形状や寸法等は、仕様に応じて適
宜定めればよい。さらに、前記固定部材に必ずしも静電
チャックに限るものではなく、電８チャックその他のも
のであってもよい。Further, the shape, dimensions, etc. of the moving member may be determined as appropriate according to specifications. Further, the fixing member is not necessarily limited to an electrostatic chuck, but may be an electrostatic chuck or other type of chuck.
また、前記駆動部材の伸縮作用および固定部拐の固定作
用を組み合わせた移動部材の駆動方法は、所望とする運
動やその方向等の条件に応じて適宜変更すればよい。さ
らに、駆動部材に印加する電圧は、所望とする運動速度
や移動量等の条件に応じて適宜定めればよい。その他、
本発明の要旨を逸脱しない範囲で、種々変形して実施す
ることができる。Further, the driving method of the movable member that combines the expansion and contraction action of the driving member and the fixing action of the fixed part may be changed as appropriate depending on the conditions such as the desired movement and its direction. Furthermore, the voltage applied to the drive member may be determined as appropriate depending on conditions such as desired speed of movement and amount of movement. others,
Various modifications can be made without departing from the spirit of the invention.
第１図（ａｌ〜（Ｃ１はそれぞれ本発明の一実施例に係
わる微動機構の概略構成を示すもので第１図（ａ）は平
面図、第１図（ｂ）は同図（ａｌの矢視Ａ−Ａ断面図、
第１図（Ｃ）は同図（ａ）の矢視Ｂ−Ｂ断面図、第２図
（ａｔ 、 （ｂ）および第３図（ａ） ｌ （ｂ）は
それぞれ上記実施例の作用を説明するための模式図、第
４図は他の実施例の要部構成を示す平面図、第５図は変
形例を示す平面図である。
１、〜．４ 、．９１、〜，３３・°・移動部材、５・
・・基台、６．〜，９，３４．〜，３６・・・駆動部材
、ｒｏｍ、 〜、ｉｏｄ、１６ａ、 〜、ｚ６ｄ・・・
スイッチ、Ｉｌａ、 〜、ｌｉｄ、１７ａ、 〜。
Ｊ７ｄ・・・電源、１２．〜，１５・・・静電チャック
（固定部材）、１２ａ、〜、１４ａ−・−電極、ｚ２ｂ
、 〜、 １４ｂ、ｚ２ｄ、 〜、ｚ４ｄ−絶縁層、２
１．３７・・・弾性ヒンジ。
出願人代理人 リＰ理士 鈴 江 武 彦第２図
（ｂ）
ｆａ３！！２！
（ａ）
３９９−
（ｂ）Figures 1 (al to (C1) each show a schematic configuration of a fine movement mechanism according to an embodiment of the present invention. Figure 1 (a) is a plan view, and Figure 1 (b) is an arrow in the same figure (al). View A-A sectional view,
FIG. 1(C) is a sectional view taken along arrow B-B in FIG. 1(a), and FIGS. FIG. 4 is a plan view showing the main part configuration of another embodiment, and FIG. 5 is a plan view showing a modified example. 1, ~.4, .91, ~,33°・Moving parts, 5・
...base, 6. ~,9,34. ~, 36... Drive member, ROM, ~, iod, 16a, ~, z6d...
Switch, Ila, ~, lid, 17a, ~. J7d...Power supply, 12. 〜, 15... Electrostatic chuck (fixing member), 12a, 〜, 14a--electrode, z2b
, ~, 14b, z2d, ~, z4d-insulating layer, 2
1.37...Elastic hinge. Applicant's agent Takehiko Suzue, RP, Figure 2 (b) fa3! ! 2! (a) 399- (b)
Claims (4)
個の移動部材と、印加電圧に応じて伸縮する圧電素子か
らなりその伸縮方向両端に上記各移動部材を取着され該
移動部材の隣接するもの同士を接続する駆動部材と、上
記各移動部材をそれぞれ前記基台上に固定する固定部材
とを具備し、前記駆動部材の伸縮作用および固定部材の
固定作用により前記移動部材を回転および［■進運動せ
しめることを特徴とする微動機構。(1) At least three movably placed on a base
a driving member which is made of a piezoelectric element that expands and contracts according to an applied voltage and has each of the above-mentioned moving members attached to both ends in the direction of expansion and contraction and which connects adjacent moving members; A fine movement mechanism, comprising a fixing member fixed on the base, and causing the movable member to rotate and move forward by the expansion and contraction action of the driving member and the fixing action of the fixed member.
電極および誘電層からなる静電チャックをそれぞれ形成
してなるものであることを特徴とする特許請求の範囲第
１項記載の微動機構。(2) The fine movement mechanism according to claim 1, wherein the fixed member is formed by forming an electrostatic chuck consisting of an electrode and a dielectric layer on the surface layer of each moving member. .
ヒンジでそれぞれ接続されてなるものであることを特徴
とする特許請求の範囲第１項記載の微動機構。(3) The fine movement mechanism according to claim 1, wherein the moving members are connected by elastic hinges that utilize the elasticity of the material.
形成すると共に、前記伸縮作用を有する圧電、素子とし
てチタン酸ジルコン酸鉛ヲ用い、かつその他の構成材料
としてべＩＪ ＩＪウム銅、アルミニウム或いはチタン
を用いたことを特徴とする特許請求の範囲第１項記載の
微動機構。(4) The base and all of the members are made of non-magnetic materials, and lead zirconate titanate is used as the piezoelectric element having the expansion and contraction action, and other constituent materials are aluminum, copper, and aluminum. The fine movement mechanism according to claim 1, characterized in that the fine movement mechanism uses titanium.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57072422A JPS58190079A (en) | 1982-04-28 | 1982-04-28 | Mechanism of fine movement |
| US06/429,230 US4455501A (en) | 1982-02-09 | 1982-09-30 | Precision rotation mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57072422A JPS58190079A (en) | 1982-04-28 | 1982-04-28 | Mechanism of fine movement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58190079A true JPS58190079A (en) | 1983-11-05 |
| JPH041512B2 JPH041512B2 (en) | 1992-01-13 |
Family
ID=13488829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57072422A Granted JPS58190079A (en) | 1982-02-09 | 1982-04-28 | Mechanism of fine movement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58190079A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144936A (en) * | 1983-12-30 | 1985-07-31 | Shimadzu Corp | Apparatus for controlling micro-rotation |
| JPS6182433A (en) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | Finely moving mechanism |
-
1982
- 1982-04-28 JP JP57072422A patent/JPS58190079A/en active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60144936A (en) * | 1983-12-30 | 1985-07-31 | Shimadzu Corp | Apparatus for controlling micro-rotation |
| JPS6182433A (en) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | Finely moving mechanism |
| JPH0358855B2 (en) * | 1984-09-29 | 1991-09-06 | Tokyo Shibaura Electric Co |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH041512B2 (en) | 1992-01-13 |
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