JPH047572B2 - - Google Patents
Info
- Publication number
- JPH047572B2 JPH047572B2 JP2775984A JP2775984A JPH047572B2 JP H047572 B2 JPH047572 B2 JP H047572B2 JP 2775984 A JP2775984 A JP 2775984A JP 2775984 A JP2775984 A JP 2775984A JP H047572 B2 JPH047572 B2 JP H047572B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- hard magnetic
- forming
- magnetic film
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 17
- 230000005347 demagnetization Effects 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 8
- 230000005415 magnetization Effects 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 6
- 239000007789 gas Substances 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2775984A JPS60170916A (ja) | 1984-02-15 | 1984-02-15 | 硬質磁性膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2775984A JPS60170916A (ja) | 1984-02-15 | 1984-02-15 | 硬質磁性膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60170916A JPS60170916A (ja) | 1985-09-04 |
| JPH047572B2 true JPH047572B2 (enExample) | 1992-02-12 |
Family
ID=12229936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2775984A Granted JPS60170916A (ja) | 1984-02-15 | 1984-02-15 | 硬質磁性膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60170916A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100345300B1 (ko) * | 1999-10-14 | 2002-07-25 | 한국과학기술연구원 | ＳｍＣｏ계 경자성 박막의 제조방법 |
-
1984
- 1984-02-15 JP JP2775984A patent/JPS60170916A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60170916A (ja) | 1985-09-04 |
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