JPS60170916A - 硬質磁性膜形成方法 - Google Patents

硬質磁性膜形成方法

Info

Publication number
JPS60170916A
JPS60170916A JP2775984A JP2775984A JPS60170916A JP S60170916 A JPS60170916 A JP S60170916A JP 2775984 A JP2775984 A JP 2775984A JP 2775984 A JP2775984 A JP 2775984A JP S60170916 A JPS60170916 A JP S60170916A
Authority
JP
Japan
Prior art keywords
film
magnetic film
hard magnetic
substrate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2775984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH047572B2 (enExample
Inventor
Mitsuaki Ikeda
満昭 池田
Kenji Hara
賢治 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP2775984A priority Critical patent/JPS60170916A/ja
Publication of JPS60170916A publication Critical patent/JPS60170916A/ja
Publication of JPH047572B2 publication Critical patent/JPH047572B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Thin Magnetic Films (AREA)
JP2775984A 1984-02-15 1984-02-15 硬質磁性膜形成方法 Granted JPS60170916A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2775984A JPS60170916A (ja) 1984-02-15 1984-02-15 硬質磁性膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2775984A JPS60170916A (ja) 1984-02-15 1984-02-15 硬質磁性膜形成方法

Publications (2)

Publication Number Publication Date
JPS60170916A true JPS60170916A (ja) 1985-09-04
JPH047572B2 JPH047572B2 (enExample) 1992-02-12

Family

ID=12229936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2775984A Granted JPS60170916A (ja) 1984-02-15 1984-02-15 硬質磁性膜形成方法

Country Status (1)

Country Link
JP (1) JPS60170916A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345300B1 (ko) * 1999-10-14 2002-07-25 한국과학기술연구원 ＳｍＣｏ계 경자성 박막의 제조방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100345300B1 (ko) * 1999-10-14 2002-07-25 한국과학기술연구원 ＳｍＣｏ계 경자성 박막의 제조방법

Also Published As

Publication number Publication date
JPH047572B2 (enExample) 1992-02-12

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