JPH0475065B2 - - Google Patents

Info

Publication number
JPH0475065B2
JPH0475065B2 JP59077529A JP7752984A JPH0475065B2 JP H0475065 B2 JPH0475065 B2 JP H0475065B2 JP 59077529 A JP59077529 A JP 59077529A JP 7752984 A JP7752984 A JP 7752984A JP H0475065 B2 JPH0475065 B2 JP H0475065B2
Authority
JP
Japan
Prior art keywords
film
substrate
film forming
liquid
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59077529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60222167A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7752984A priority Critical patent/JPS60222167A/ja
Priority to US06/723,923 priority patent/US4674436A/en
Publication of JPS60222167A publication Critical patent/JPS60222167A/ja
Publication of JPH0475065B2 publication Critical patent/JPH0475065B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP7752984A 1984-04-19 1984-04-19 成膜方法及びその装置 Granted JPS60222167A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7752984A JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置
US06/723,923 US4674436A (en) 1984-04-19 1985-04-16 Film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7752984A JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置

Publications (2)

Publication Number Publication Date
JPS60222167A JPS60222167A (ja) 1985-11-06
JPH0475065B2 true JPH0475065B2 (en。) 1992-11-27

Family

ID=13636506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7752984A Granted JPS60222167A (ja) 1984-04-19 1984-04-19 成膜方法及びその装置

Country Status (1)

Country Link
JP (1) JPS60222167A (en。)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5365507B2 (ja) * 2009-12-25 2013-12-11 王子ホールディングス株式会社 ラングミュア・ブロジェット膜転写用基板ジグ、ラングミュア・ブロジェット膜転写装置およびラングミュア・ブロジェット膜転写方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4497396A (en) * 1982-09-20 1985-02-05 Eaton Corporation Variable mechanical advantage shift lever
FR2541936B1 (fr) * 1983-03-04 1985-10-04 Commissariat Energie Atomique Procede et dispositif pour la realisation de couches monomoleculaires alternees

Also Published As

Publication number Publication date
JPS60222167A (ja) 1985-11-06

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