JPH0475065B2 - - Google Patents
Info
- Publication number
- JPH0475065B2 JPH0475065B2 JP59077529A JP7752984A JPH0475065B2 JP H0475065 B2 JPH0475065 B2 JP H0475065B2 JP 59077529 A JP59077529 A JP 59077529A JP 7752984 A JP7752984 A JP 7752984A JP H0475065 B2 JPH0475065 B2 JP H0475065B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- film forming
- liquid
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 62
- 239000007788 liquid Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 18
- 230000002452 interceptive effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 83
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 27
- 230000001186 cumulative effect Effects 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000012528 membrane Substances 0.000 description 7
- 239000000470 constituent Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- OMOVVBIIQSXZSZ-UHFFFAOYSA-N [6-(4-acetyloxy-5,9a-dimethyl-2,7-dioxo-4,5a,6,9-tetrahydro-3h-pyrano[3,4-b]oxepin-5-yl)-5-formyloxy-3-(furan-3-yl)-3a-methyl-7-methylidene-1a,2,3,4,5,6-hexahydroindeno[1,7a-b]oxiren-4-yl] 2-hydroxy-3-methylpentanoate Chemical compound CC12C(OC(=O)C(O)C(C)CC)C(OC=O)C(C3(C)C(CC(=O)OC4(C)COC(=O)CC43)OC(C)=O)C(=C)C32OC3CC1C=1C=COC=1 OMOVVBIIQSXZSZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 125000001165 hydrophobic group Chemical group 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000005442 molecular electronic Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7752984A JPS60222167A (ja) | 1984-04-19 | 1984-04-19 | 成膜方法及びその装置 |
| US06/723,923 US4674436A (en) | 1984-04-19 | 1985-04-16 | Film forming apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7752984A JPS60222167A (ja) | 1984-04-19 | 1984-04-19 | 成膜方法及びその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60222167A JPS60222167A (ja) | 1985-11-06 |
| JPH0475065B2 true JPH0475065B2 (US06299757-20011009-C00006.png) | 1992-11-27 |
Family
ID=13636506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7752984A Granted JPS60222167A (ja) | 1984-04-19 | 1984-04-19 | 成膜方法及びその装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60222167A (US06299757-20011009-C00006.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5365507B2 (ja) * | 2009-12-25 | 2013-12-11 | 王子ホールディングス株式会社 | ラングミュア・ブロジェット膜転写用基板ジグ、ラングミュア・ブロジェット膜転写装置およびラングミュア・ブロジェット膜転写方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977530A (ja) * | 1982-09-20 | 1984-05-04 | イ−トン・コ−ポレ−シヨン | シフトレバ−装置 |
| JPS59183861A (ja) * | 1983-03-04 | 1984-10-19 | コミサリヤ・ア・レネルジ・アトミク | 交互形単分子層の形成法及び形成装置 |
-
1984
- 1984-04-19 JP JP7752984A patent/JPS60222167A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5977530A (ja) * | 1982-09-20 | 1984-05-04 | イ−トン・コ−ポレ−シヨン | シフトレバ−装置 |
| JPS59183861A (ja) * | 1983-03-04 | 1984-10-19 | コミサリヤ・ア・レネルジ・アトミク | 交互形単分子層の形成法及び形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60222167A (ja) | 1985-11-06 |
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