JPH047447B2 - - Google Patents

Info

Publication number
JPH047447B2
JPH047447B2 JP58163495A JP16349583A JPH047447B2 JP H047447 B2 JPH047447 B2 JP H047447B2 JP 58163495 A JP58163495 A JP 58163495A JP 16349583 A JP16349583 A JP 16349583A JP H047447 B2 JPH047447 B2 JP H047447B2
Authority
JP
Japan
Prior art keywords
light
wavefront
measurement
mirror
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58163495A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6055214A (ja
Inventor
Toshio Kano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP58163495A priority Critical patent/JPS6055214A/ja
Publication of JPS6055214A publication Critical patent/JPS6055214A/ja
Publication of JPH047447B2 publication Critical patent/JPH047447B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58163495A 1983-09-06 1983-09-06 波面形状測定装置 Granted JPS6055214A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58163495A JPS6055214A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58163495A JPS6055214A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Publications (2)

Publication Number Publication Date
JPS6055214A JPS6055214A (ja) 1985-03-30
JPH047447B2 true JPH047447B2 (enrdf_load_stackoverflow) 1992-02-12

Family

ID=15774948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58163495A Granted JPS6055214A (ja) 1983-09-06 1983-09-06 波面形状測定装置

Country Status (1)

Country Link
JP (1) JPS6055214A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4681451A (en) * 1986-02-28 1987-07-21 Polaroid Corporation Optical proximity imaging method and apparatus

Also Published As

Publication number Publication date
JPS6055214A (ja) 1985-03-30

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