JPH0474420U - - Google Patents
Info
- Publication number
- JPH0474420U JPH0474420U JP11770290U JP11770290U JPH0474420U JP H0474420 U JPH0474420 U JP H0474420U JP 11770290 U JP11770290 U JP 11770290U JP 11770290 U JP11770290 U JP 11770290U JP H0474420 U JPH0474420 U JP H0474420U
- Authority
- JP
- Japan
- Prior art keywords
- organic metal
- container
- supply device
- metal supply
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims 1
- 238000000197 pyrolysis Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000001947 vapour-phase growth Methods 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案の有機金属供給装置の１実施例
の断面図である。 符号の説明、１……容器、２……有機金属、３
……たわみ板、４……二重底部、５……電極板、
６……電気容量測定器、７……キヤリアガス導入
管、８……キヤリアガス取出管。
の断面図である。 符号の説明、１……容器、２……有機金属、３
……たわみ板、４……二重底部、５……電極板、
６……電気容量測定器、７……キヤリアガス導入
管、８……キヤリアガス取出管。
Claims (1)
- 半導体基板上へ薄膜成長させる有機金属熱分解
気相成長法において有機金属供給装置の容器の底
部を可撓性の板から構成しこれに対向させた電極
板を設けたことを特徴とする有機金属供給装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11770290U JPH0474420U (ja) | 1990-11-13 | 1990-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11770290U JPH0474420U (ja) | 1990-11-13 | 1990-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474420U true JPH0474420U (ja) | 1992-06-30 |
Family
ID=31865606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11770290U Pending JPH0474420U (ja) | 1990-11-13 | 1990-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474420U (ja) |
-
1990
- 1990-11-13 JP JP11770290U patent/JPH0474420U/ja active Pending
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