JPH0471453B2 - - Google Patents

Info

Publication number
JPH0471453B2
JPH0471453B2 JP19565285A JP19565285A JPH0471453B2 JP H0471453 B2 JPH0471453 B2 JP H0471453B2 JP 19565285 A JP19565285 A JP 19565285A JP 19565285 A JP19565285 A JP 19565285A JP H0471453 B2 JPH0471453 B2 JP H0471453B2
Authority
JP
Japan
Prior art keywords
optical system
pinhole
laser light
fine movement
tested
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19565285A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6255542A (ja
Inventor
Taisuke Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19565285A priority Critical patent/JPS6255542A/ja
Publication of JPS6255542A publication Critical patent/JPS6255542A/ja
Publication of JPH0471453B2 publication Critical patent/JPH0471453B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Optical Devices Or Fibers (AREA)
JP19565285A 1985-09-04 1985-09-04 光学系検査装置 Granted JPS6255542A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19565285A JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19565285A JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Publications (2)

Publication Number Publication Date
JPS6255542A JPS6255542A (ja) 1987-03-11
JPH0471453B2 true JPH0471453B2 (zh) 1992-11-13

Family

ID=16344732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19565285A Granted JPS6255542A (ja) 1985-09-04 1985-09-04 光学系検査装置

Country Status (1)

Country Link
JP (1) JPS6255542A (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100474141B1 (ko) * 2001-07-06 2005-03-08 전자빔기술센터 주식회사 레이저를 이용한 부품의 구멍 정렬방법 및 이를 이용한 부품의 정렬 방법
KR20070052789A (ko) * 2004-09-20 2007-05-22 전자빔기술센터 주식회사 레이저 회절 패턴을 이용한 부품의 마이크로 구멍 정렬방법및 정렬 시스템
CN104807614B (zh) * 2014-01-23 2017-07-11 苏州智华汽车电子有限公司 一种车载摄像头光轴检查机用标定金样品的制作方法
CN107687937B (zh) * 2017-08-10 2020-02-07 苏州精濑光电有限公司 一种准分子激光退火ela制程质量量测方法与系统

Also Published As

Publication number Publication date
JPS6255542A (ja) 1987-03-11

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