JPH0470874B2 - - Google Patents

Info

Publication number
JPH0470874B2
JPH0470874B2 JP60161054A JP16105485A JPH0470874B2 JP H0470874 B2 JPH0470874 B2 JP H0470874B2 JP 60161054 A JP60161054 A JP 60161054A JP 16105485 A JP16105485 A JP 16105485A JP H0470874 B2 JPH0470874 B2 JP H0470874B2
Authority
JP
Japan
Prior art keywords
piezoelectric
clamp
rod
shaped member
actuator device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60161054A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223381A (ja
Inventor
Takenobu Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Priority to JP60161054A priority Critical patent/JPS6223381A/ja
Publication of JPS6223381A publication Critical patent/JPS6223381A/ja
Publication of JPH0470874B2 publication Critical patent/JPH0470874B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/023—Inchworm motors

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP60161054A 1985-07-23 1985-07-23 圧電式アクチュエータ装置 Granted JPS6223381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60161054A JPS6223381A (ja) 1985-07-23 1985-07-23 圧電式アクチュエータ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60161054A JPS6223381A (ja) 1985-07-23 1985-07-23 圧電式アクチュエータ装置

Publications (2)

Publication Number Publication Date
JPS6223381A JPS6223381A (ja) 1987-01-31
JPH0470874B2 true JPH0470874B2 (US20110009641A1-20110113-C00185.png) 1992-11-12

Family

ID=15727730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60161054A Granted JPS6223381A (ja) 1985-07-23 1985-07-23 圧電式アクチュエータ装置

Country Status (1)

Country Link
JP (1) JPS6223381A (US20110009641A1-20110113-C00185.png)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994698A (en) * 1990-06-13 1991-02-19 General Electric Company Vibratory linear motor system
JP2569253B2 (ja) * 1991-12-31 1997-01-08 タントバーク データ エー エス 磁気テープトラックから選択された１つのトラックに対して磁気ヘッドを位置決めするための位置決め装置と位置決め法
US6836056B2 (en) * 2000-02-04 2004-12-28 Viking Technologies, L.C. Linear motor having piezo actuators
EP1992024A2 (de) * 2006-02-16 2008-11-19 nanoswys SA Kraftumsetzer
DE102008034285A1 (de) * 2008-07-22 2010-02-04 Carl Zeiss Smt Ag Aktuator zur hochpräzisen Positionierung bzw. Manipulation von Komponenten und Projektionsbelichtungsanlage für die Mikrolithographie
CN103684037B (zh) * 2012-09-13 2016-01-20 中国科学技术大学 一种利用相向搓动降低摩擦力的双端夹持压电马达及控制方法
JP6225268B2 (ja) * 2014-01-28 2017-11-01 浙江大学Ｚｈｅｊｉａｎｇ Ｕｎｉｖｅｒｓｉｔｙ フレキシブルスマートパワー構造

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589580A (ja) * 1981-07-07 1983-01-19 Norito Suzuki リニアモ−タ
JPS602081A (ja) * 1983-06-16 1985-01-08 Matsushita Electric Ind Co Ltd 回転駆動アクチユエ−タ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589580A (ja) * 1981-07-07 1983-01-19 Norito Suzuki リニアモ−タ
JPS602081A (ja) * 1983-06-16 1985-01-08 Matsushita Electric Ind Co Ltd 回転駆動アクチユエ−タ

Also Published As

Publication number Publication date
JPS6223381A (ja) 1987-01-31

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Legal Events

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