JPH0470732U - - Google Patents
Info
- Publication number
- JPH0470732U JPH0470732U JP11354690U JP11354690U JPH0470732U JP H0470732 U JPH0470732 U JP H0470732U JP 11354690 U JP11354690 U JP 11354690U JP 11354690 U JP11354690 U JP 11354690U JP H0470732 U JPH0470732 U JP H0470732U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- reduction
- projection exposure
- measurement
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11354690U JPH0470732U (sv) | 1990-10-31 | 1990-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11354690U JPH0470732U (sv) | 1990-10-31 | 1990-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0470732U true JPH0470732U (sv) | 1992-06-23 |
Family
ID=31861147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11354690U Pending JPH0470732U (sv) | 1990-10-31 | 1990-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0470732U (sv) |
-
1990
- 1990-10-31 JP JP11354690U patent/JPH0470732U/ja active Pending
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