JPH0469563B2 - - Google Patents

Info

Publication number
JPH0469563B2
JPH0469563B2 JP62073816A JP7381687A JPH0469563B2 JP H0469563 B2 JPH0469563 B2 JP H0469563B2 JP 62073816 A JP62073816 A JP 62073816A JP 7381687 A JP7381687 A JP 7381687A JP H0469563 B2 JPH0469563 B2 JP H0469563B2
Authority
JP
Japan
Prior art keywords
argon
flow rate
exhaust gas
gas
gas flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62073816A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63239105A (ja
Inventor
Hirobumi Kamikawa
Masaru Nagano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Nippon Steel Corp
Original Assignee
Sumitomo Seika Chemicals Co Ltd
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Seika Chemicals Co Ltd, Sumitomo Metal Industries Ltd filed Critical Sumitomo Seika Chemicals Co Ltd
Priority to JP62073816A priority Critical patent/JPS63239105A/ja
Publication of JPS63239105A publication Critical patent/JPS63239105A/ja
Publication of JPH0469563B2 publication Critical patent/JPH0469563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP62073816A 1987-03-26 1987-03-26 アルゴンガスの回収方法 Granted JPS63239105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62073816A JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62073816A JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Publications (2)

Publication Number Publication Date
JPS63239105A JPS63239105A (ja) 1988-10-05
JPH0469563B2 true JPH0469563B2 (enExample) 1992-11-06

Family

ID=13529060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62073816A Granted JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Country Status (1)

Country Link
JP (1) JPS63239105A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970008347B1 (ko) * 1994-04-12 1997-05-23 한국에너지기술연구소 암모니아 퍼지가스에서 아르곤 및 수소를 고농도로 분리하는 흡착분리방법과 그 장치
JP4112659B2 (ja) * 1997-12-01 2008-07-02 大陽日酸株式会社 希ガスの回収方法及び装置
JP4769350B2 (ja) * 2000-09-22 2011-09-07 大陽日酸株式会社 希ガスの回収方法及び装置
JP5116195B2 (ja) * 2001-09-04 2013-01-09 大陽日酸株式会社 ガス分離精製方法

Also Published As

Publication number Publication date
JPS63239105A (ja) 1988-10-05

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees