JPS63239105A - アルゴンガスの回収方法 - Google Patents

アルゴンガスの回収方法

Info

Publication number
JPS63239105A
JPS63239105A JP62073816A JP7381687A JPS63239105A JP S63239105 A JPS63239105 A JP S63239105A JP 62073816 A JP62073816 A JP 62073816A JP 7381687 A JP7381687 A JP 7381687A JP S63239105 A JPS63239105 A JP S63239105A
Authority
JP
Japan
Prior art keywords
argon
flow rate
gas
exhaust gas
pressure fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62073816A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469563B2 (enExample
Inventor
Hirobumi Kamikawa
神川　博文
Masaru Nagano
長野　優
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Seika Chemicals Co Ltd
Nippon Steel Corp
Original Assignee
Seitetsu Kagaku Co Ltd
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seitetsu Kagaku Co Ltd, Sumitomo Metal Industries Ltd filed Critical Seitetsu Kagaku Co Ltd
Priority to JP62073816A priority Critical patent/JPS63239105A/ja
Publication of JPS63239105A publication Critical patent/JPS63239105A/ja
Publication of JPH0469563B2 publication Critical patent/JPH0469563B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Of Gases By Adsorption (AREA)
JP62073816A 1987-03-26 1987-03-26 アルゴンガスの回収方法 Granted JPS63239105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62073816A JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62073816A JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Publications (2)

Publication Number Publication Date
JPS63239105A true JPS63239105A (ja) 1988-10-05
JPH0469563B2 JPH0469563B2 (enExample) 1992-11-06

Family

ID=13529060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62073816A Granted JPS63239105A (ja) 1987-03-26 1987-03-26 アルゴンガスの回収方法

Country Status (1)

Country Link
JP (1) JPS63239105A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5547492A (en) * 1994-04-12 1996-08-20 Korea Institute Of Energy Research Method for adsorbing and separating argon and hydrogen gases in high concentration from waste ammonia purge gas, and apparatus therefor
EP0983791A4 (en) * 1997-12-01 2000-05-03 Nippon Oxygen Co Ltd Method and apparatus for recovering rare gas
JP2002097007A (ja) * 2000-09-22 2002-04-02 Nippon Sanso Corp 希ガスの回収方法及び装置
JP2003071231A (ja) * 2001-09-04 2003-03-11 Nippon Sanso Corp ガス分離精製装置およびその運転方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5547492A (en) * 1994-04-12 1996-08-20 Korea Institute Of Energy Research Method for adsorbing and separating argon and hydrogen gases in high concentration from waste ammonia purge gas, and apparatus therefor
EP0983791A4 (en) * 1997-12-01 2000-05-03 Nippon Oxygen Co Ltd Method and apparatus for recovering rare gas
US6217633B1 (en) 1997-12-01 2001-04-17 Nippon Sanso Corporation Method and apparatus for recovering rare gas
JP2002097007A (ja) * 2000-09-22 2002-04-02 Nippon Sanso Corp 希ガスの回収方法及び装置
JP2003071231A (ja) * 2001-09-04 2003-03-11 Nippon Sanso Corp ガス分離精製装置およびその運転方法

Also Published As

Publication number Publication date
JPH0469563B2 (enExample) 1992-11-06

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees