JPH0469528B2 - - Google Patents

Info

Publication number
JPH0469528B2
JPH0469528B2 JP4076487A JP4076487A JPH0469528B2 JP H0469528 B2 JPH0469528 B2 JP H0469528B2 JP 4076487 A JP4076487 A JP 4076487A JP 4076487 A JP4076487 A JP 4076487A JP H0469528 B2 JPH0469528 B2 JP H0469528B2
Authority
JP
Japan
Prior art keywords
ingot
cutting
vacuum
suction
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4076487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63207614A (ja
Inventor
Katsuo Honda
Shuichi Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP62040764A priority Critical patent/JPS63207614A/ja
Priority to US07/156,748 priority patent/US4903681A/en
Priority to DE88102589T priority patent/DE3883804T2/de
Priority to EP19880102589 priority patent/EP0280245B1/en
Priority to KR1019880001932A priority patent/KR930005466B1/ko
Publication of JPS63207614A publication Critical patent/JPS63207614A/ja
Publication of JPH0469528B2 publication Critical patent/JPH0469528B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP62040764A 1987-02-24 1987-02-24 インゴツト切断方法 Granted JPS63207614A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62040764A JPS63207614A (ja) 1987-02-24 1987-02-24 インゴツト切断方法
US07/156,748 US4903681A (en) 1987-02-24 1988-02-18 Method and apparatus for cutting a cylindrical material
DE88102589T DE3883804T2 (de) 1987-02-24 1988-02-22 Verfahren und Vorrichtung für das Schneiden eines zylindrischen Materials.
EP19880102589 EP0280245B1 (en) 1987-02-24 1988-02-22 Method and apparatus for cutting a cylindrical material
KR1019880001932A KR930005466B1 (ko) 1987-02-24 1988-02-24 원통형재료의 절단방법 및 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62040764A JPS63207614A (ja) 1987-02-24 1987-02-24 インゴツト切断方法

Publications (2)

Publication Number Publication Date
JPS63207614A JPS63207614A (ja) 1988-08-29
JPH0469528B2 true JPH0469528B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-11-06

Family

ID=12589689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62040764A Granted JPS63207614A (ja) 1987-02-24 1987-02-24 インゴツト切断方法

Country Status (1)

Country Link
JP (1) JPS63207614A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993810A (ja) * 1982-11-17 1984-05-30 Kawasaki Steel Corp 溶融スラグ薄層固化装置
JP4861027B2 (ja) * 2006-03-15 2012-01-25 日本碍子株式会社 セラミック円柱状体用把持装置
US8425279B2 (en) * 2008-09-30 2013-04-23 Misubishi Polycrystalline Silicon America Corporation (MIPSA) Apparatus for manufacturing seeds for polycrystalline silicon manufacture
JP6197617B2 (ja) * 2013-12-05 2017-09-20 信越半導体株式会社 切断治具及びワークの切断方法
JP6617721B2 (ja) * 2017-01-18 2019-12-11 信越半導体株式会社 インゴット切断装置
CN116619583A (zh) * 2023-04-19 2023-08-22 唐山晶玉科技股份有限公司 一种用于单晶硅棒料切断作业的工件支撑装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5414440A (en) * 1977-07-04 1979-02-02 Dai Ichi Kogyo Seiyaku Co Ltd Adhesive composition
JPS55144963A (en) * 1979-04-26 1980-11-12 Soken Kogyo Kk Adhering method of solid abrasive on buffing surface
JPS5851989Y2 (ja) * 1979-12-04 1983-11-26 寅雄 田之内 木板の塗装仕上げ機
JPS5753857U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-08-27 1982-03-29

Also Published As

Publication number Publication date
JPS63207614A (ja) 1988-08-29

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