JPH0467094B2 - - Google Patents
Info
- Publication number
- JPH0467094B2 JPH0467094B2 JP61139792A JP13979286A JPH0467094B2 JP H0467094 B2 JPH0467094 B2 JP H0467094B2 JP 61139792 A JP61139792 A JP 61139792A JP 13979286 A JP13979286 A JP 13979286A JP H0467094 B2 JPH0467094 B2 JP H0467094B2
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- air outlet
- main
- auxiliary
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 claims description 8
- 239000000428 dust Substances 0.000 description 13
- 230000014759 maintenance of location Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 230000003749 cleanliness Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 239000002245 particle Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000012847 fine chemical Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61139792A JPS62297650A (ja) | 1986-06-16 | 1986-06-16 | コンベンシヨナルフロ−形クリ−ンル−ム |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61139792A JPS62297650A (ja) | 1986-06-16 | 1986-06-16 | コンベンシヨナルフロ−形クリ−ンル−ム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62297650A JPS62297650A (ja) | 1987-12-24 |
JPH0467094B2 true JPH0467094B2 (US20090163788A1-20090625-C00002.png) | 1992-10-27 |
Family
ID=15253531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61139792A Granted JPS62297650A (ja) | 1986-06-16 | 1986-06-16 | コンベンシヨナルフロ−形クリ−ンル−ム |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62297650A (US20090163788A1-20090625-C00002.png) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3932334B1 (ja) * | 2005-12-13 | 2007-06-20 | 国立大学法人 北海道大学 | クリーンユニットの運転方法 |
JP2007187436A (ja) * | 2005-12-13 | 2007-07-26 | Hokkaido Univ | クリーンユニット、連結クリーンユニット、クリーンユニットの運転方法およびクリーン作業室 |
CN111536649B (zh) * | 2020-05-19 | 2021-06-22 | 江西吉泰建筑工程有限公司 | 一种建筑内部配套的节能式通风换气设备 |
-
1986
- 1986-06-16 JP JP61139792A patent/JPS62297650A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62297650A (ja) | 1987-12-24 |